VFS4000-OMY0001

15m AXT100-DS25-200 20m AXT100-DS25-300 30m 11 No.VFS4000-OMY0001 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 6 3 5G 7 1) 2)()() 3)3 , 12 12 12 12 2 Nm M5 1.52 Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc 1/2 2830 12 No.VFS4000-OMY0001 8 1EXH 260 9 () 1 ISO VG 32 0 10 1) SUP (AM)(AF) 2) SF4-*-* Nm M3 0.450.6 Nm M3 0.81.2 M4 1.42.5 13 No.VFS4000-OMY0001 11

rangeLinearity Note 3)RepeatabilityPressure characteristicsTemperature characteristicsOutput specificationsResponse timeHysteresisPower supply voltageCurrent consumptionResistanceWeightPort size (Rc, NPT, G)PF2A712HDry air, NitrogenHeater type600 to 12000 l/min10 l/minl/min, CFMl, m3, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999

rangeLinearity Note 3)RepeatabilityPressure characteristicsTemperature characteristicsOutput specificationsResponse timeHysteresisPower supply voltageCurrent consumptionResistanceWeightPort size (Rc, NPT, G)PF2A712HDry air, NitrogenHeater type600 to 12000 l/min10 l/minl/min, CFMl, m3, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999

25

Kinematic viscosity [m2/s] = Viscosity [Pas]/Density [kg/m3] 1 cP = 1 mPas = 10-3Pas 1 cSt = 1 mm2/s = 10-6m2/s 591 PB1313A Series Working Principle: Air Operated When air is supplied with the external 3-port solenoid valve turned ON (energized), air enters the driving chamber and the diaphragm moves to the left.

flow rangeLinearity Note 3)RepeatabilityPressure characteristicsTemperature characteristicsOutput specificationsResponse timeHysteresisPower supply voltageCurrent consumptionResistanceWeightPort size (Rc, NPT, G)PF2A706HDry air, NitrogenHeater type300 to 6000 l/min10 l/minl/min, CFMl, m3, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999

Air Catch Sensor

Material Cover Front rim Retaining rim Description Part no. includes M3 X 8 tapping screws (2 pcs.)

SMC Electronic Switch Series Variations

Material Cover Front rim Retaining rim Description Part no. includes M3 X 8 tapping screws (2 pcs.)

Title not found

Current output 4~20mA2.5% F.S. or less Repeatability 0.2% F.S. 2digit or less 0.2% F.S. 1digit or less response time 2.5ms or less (With anti-chattering function:20ms, 160ms and 640ms selection) Hysteresis Hysteresis mode and window comparator mode selection Port size R1/8 (with M5 female) Enclosure IP40 43 Vacuum Regulator Series IRV 60 l/min (ANR) Note) 100 l/min (ANR) Note) 150 l/min (

VCA

Terminal cover Round head combination screw M3 Tightening torque 0.5 to 0.6Nm A G1/2 Tightening torque 0.5 to 0.6Nm + mark mark 2 1 + A Round head combination screw M3 Tightening torque 0.5 to 0.6Nm Electrical Connections Conduit terminal Caution View A-A (Internal connection diagram) Grommet There is polarity only when equipped with light.

Series VCS

Round head combination screw M3 Conduit terminal View A-A (Internal connection diagram) There is polarity only when equipped with light. Electrical Circuits Caution Operating Precautions Conduit terminal Grommet/Conduit Warning 1. Valves will reach high temperatures from high temperature fluids such as steam.

VCW

A Round head combination screw M3 2 1 + "+" mark "" mark A Round head combination screw M3 Conduit terminal View A-A (Internal connection diagram) There is polarity only when equipped with light.

XL

XLG/XLGV (O-ring seal, Double acting) Low gas entrainment with employment of O-ring seal system. 2 High Vacuum Angle Valve Flange size Options Application Switch Heater Indicator Leakage Pa m3/sec Valve type Operating pressure Pa Service life (Million cycles) Shaft seal system Models Actuation High temp. specification Internal External 16 25 40 50 63 80 XLA Single acting (N.C.)

flow rangeLinearity Note 3)RepeatabilityPressure characteristicsTemperature characteristicsOutput specificationsResponse timeHysteresisPower supply voltageCurrent consumptionResistanceWeightPort size (Rc, NPT, G)PF2A706HDry air, NitrogenHeater type300 to 6000 l/min10 l/minl/min, CFMl, m3, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999

Flow Rate: 2.4 CFM / 4.2 m3/hr / 68 LPM , 2.4 CFM / 4.2 m3/hr / 68 LPM, Max Vacuum: 25.4 in HgV / 115 Torr / -861 mbar , 25.4 in HgV / 115 Torr / -861 mbar, Horsepower (60 Hz): .2, Voltage (60 Hz): 115, Voltage (50 Hz): 115, Frequency (Hz): 50 / 60, Phase: 1-phase, Item Dimensions: Length: 8.07 in / 205 mm Width: 5.98 in / 152 mm Height: 5.91 in / 150 mm

Rated Flow Range: 2 (2.5 to 100 L/min), Output Specifications: K (OUT: Analog 4 to 20 mA; Remote Type Sensor Unit), Port Size: 6 (3/4; Applicable to LFE2), Thread: Rc, Option: 2 (Lead Wire w/M12 Connector; Bracket; L/min Unit Specification), Insulation Type: None, Piping Port is connected to Negative Ground of the Power Supply), Piping Connection: X8 (Stainless Steel 304)

Rated Flow Range: 3 (5 to 200 L/min), Output Specifications: K (OUT: Analog 4 to 20 mA; Remote Type Sensor Unit), Port Size: 8 (1; Applicable to LFE3), Thread: N (NPT), Option: Lead Wire w/M12 Connector; L/min Unit Specification, Insulation Type: None, Piping Port is connected to Negative Ground of the Power Supply), Piping Connection: X8 (Stainless Steel 304)

Rated Flow Range: 1 (0.5 to 20 L/min), Output Specifications: J (OUT: Analog 1 to 5 V; Remote Type Sensor Unit), Port Size: 4 (1/2; Applicable to LFE1), Thread: Rc, Option: 2 (Lead Wire w/M12 Connector; Bracket; L/min Unit Specification), Insulation Type: None, Piping Port is connected to Negative Ground of the Power Supply), Piping Connection: X8 (Stainless Steel 304)

Rated Flow Range: 3 (5 to 200 L/min), Output Specifications: K (OUT: Analog 4 to 20 mA; Remote Type Sensor Unit), Port Size: 8 (1; Applicable to LFE3), Thread: N (NPT), Option: 2 (Lead Wire w/M12 Connector; Bracket; L/min Unit Specification), Insulation Type: Z (Piping Port is Insulated with the Power Supply), Piping Connection: X8 (Stainless Steel 304)

Connection, IN OUT: 0 (Rc), Port Size: 02 (Rc, NPT, TSJ, UOJ; 1/4), Made to Order: X8 (Aluminum Case)

Piping connections come in C37 brass as standard, while the -X8 option offers 304 stainless steel.  LFE is IP65 rated, and CE and RoHS compliant. Flow ranges (lpm): 0.5-20, 2.5-100, 5-200; Port Sizes (Rc, NPT, G): 3/8, 1/2, 3/4, 1 (flow range dependent); Temperature rating: 0-85°C; Output options: 1-5v, 4-20mA; Accuracy: ±4% F.S.; Repeatability: ±2% F.S.