VFR Note 2) Min. operating frequency is once in 30 days.
IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Series ZFB Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Metric size 3/16" 20 22 20 22 30 30 75 40 100 62 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 1/4" 1/4" Inch size (2) 3/8" 1/2" Specifications Fluid Air/Nitrogen Negative pressure 0.5MPa 0 to 60C (Non-freezing) 30m 0.15MPa Nylon/Soft Nylon/Polyurethane
ZS-30-A PSE Connector for pressure sensor controller A ZS-28-C 1 pc. IS ISG Note) The bracket is not attached in the factory, but packed together for shipment.
[F80] Power saving mode completed In power saving mode, when buttons are pressed the display is normal, but if no buttons are pressed for 30 seconds, it will revert to power saving mode.
Function selection mode 30 Default setting 30 F 0 Display units, switch output specifications and diagnostic information selection function 32 F 1 Setting of OUT1 34 F 2 Setting of OUT2 37 F 3 Digital filter setting 39 F 4 Auto-preset function 40 F 6 Fine adjustment of display value 42 F10 Sub display setting 43 F11 Display resolution setting 49 F14 Zero cut-off setting 50 F80 Power saving
Centralized wiring and piping directions Specifications Max. number of outputs: 32 (Valve + Ejector) Valve stations: 2 to 24 stations (Max. number of outputs: 30, Depends on whether single or double) Ejector stations: 1 to 8 stations (Max. number of outputs: 16) Wiring and piping for valves and ejectors can be arranged in the same direction.
IN IN Material 30 40 VDW30-CP7 VDW40-CP10 Stainless steel P7 quick fastener P10 quick fastener R1 L2 Ten pieces come in each set. Quick fastener clip OUT OUT 90 right direction Note) Cannot be reassembled in different combinations. IN Male quick fastener R2 ( Male quick fasteners are not included.)
Function selection mode 30 Default setting 30 F 0 Units selection function 32 F 1 Setting of OUT1 33 F 2 Setting of OUT2 36 F 3 Digital filter setting 38 F 4 Auto-preset function 39 F 5 FUNC terminal setting 41 F 6 Fine adjustment of display value 43 F10 Sub display setting 44 F11 Display resolution setting 50 F80 Power saving mode 51 F81 Security code 52 F82 Input of line name 54 F90 Setting
Max. voltage (with no load): 30 Vrms (42.4 V peak) or less Max. current: (1) 8 A or less (including shorts), and (2) When controlled by a circuit protector (fuse, etc.) with the following rating Max. current rating 5.0 100 Peak voltage value No-load voltage (V peak) 0 to 20 [V] Over 20 [V] to 30 [V] 2) A circuit (class 2 circuit) with maximum 30 Vrms (42.4 V peak) or less, and a power supply
Tightening torque Nm 28 to 30 36 to 38 48 to 50 48 to 50 Tightening torque Nm 7 to 9 12 to 14 22 to 24 28 to 30 Thread Rc 3/4 Rc 1 Rc 1, 1/2 Rc 2 Thread Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Supply voltage > Internal voltage drop of switch Minimum operating voltage of load 2. Apply a wrench only to the metal part of the piping when installing the flow switch onto the system piping.
Refer to page 30 for the noise filter set. Refer to the LECA Operation Manual for installation.
20 (3/4B) 500 3 210 640 741 764 30 25 (1B) 210 645 750 772 30 40 A Elements Sintered Metal/Fiber Nonstandard elements of the FQ1 series can also be used commonly.
ISA11-4L-01BG ZSE2 ISE2 ISA15-1-01G ZSP ISl ZSM Accessories (Optional) PFl Bracket ISA-1-A Gauge G33-3-01 DIN rail ISA-2-1 to 7 IFl Gauge/G33-3-01 Bracket /ISA-1-A DIN rail/ISA-2-1 to 7 Material: SPC (Nickel plated) Material: Aluminum 10 hex. 100 110 q w e r t L 90 10 25 5 4-4.5 7.5 30 R1/8 34 42 28 4.5 35 27 9 16.5 13 5.6 L Applicable model Part No. 105 140 175 210 245 280 315 Description
ble acting Single rod o12, o16/5to30 o20, o2t5 io 50 o32, @40l5lo 1N o50, 063/10 io 1m Double rod 612, E1U5lo 30 amlo @Q/5to50 o50, 0631 0 to 50 Large bor lize Double acting Single rod101o 300 Double rod 10 to 300 Standard Double acting Single @d o12. a16/5 lo 3A o20 p2t510 50 o32, o40l5 to 1 00 o50 to o10cy10 to 100 Double rod 012, 016/510 30 a20. o25/5 lo 5A 632, 64US lo 1OA o50 lo 0100
A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room
NG Nominal thread size Proper tightening torque [Nm] Rc (NPT) 3/8 22 to 24 Rc (NPT) 1/2 28 to 30 Rc (NPT) 3/4 28 to 30 Rc (NPT) 1 36 to 38 NG Off-centering 6. When using a One-touch fitting, hold the fitting by hand to prevent the load required for connecting or disconnecting the tube from being imposed directly on the product. 2. The product body is made of resin.
/set Lead wire assembly with the connector for supply valve/ release valve SY100-30-4A-6 1) 2) 1) Power supply voltage Rated voltage Lead wire assembly with the connector for the supply valve / release valve 2) Lead wire length Nil 300 4 24 VDC 6 600 10 1000 15 1500 20 2000 25 2500 30 3000 50 5000 Supply valve/ Release valve connector socket (common for ZL3 / ZL6) SY100-30-A * Connector
(5) (22)(27) () () () 2) 3) 9-4 IDU Series 9-3 9 2 IDX-OM-W023 10 M 10 M IDU8E/11E/15E1-10/20 10-1 ( ) IDU Series 10-1 10 1 IDX-OM-W023 10 M 10-2 ADM200 IDU8E15E1-10-M IDU8E15E1-20-M IDF-S0087 IDF-S0090 1.0MPa 1 1 2 / AC100V(50/60Hz) AC200V(50/60Hz) 4W (R1/2) (Rc3/8) Rc1/2 26 Rc1/2 IDU Series 10-2 10 2 IDX-OM-W023 10 M 10-3 Rc1/2 32 25 1) 2830Nm 30 (5
30 30 60 60 80 120 120 177 177 177 227 227 227 285 285 110 110 110 130 130 130 150 150 120 120 120 140 140 140 170 170 30 310 380 450 520 590 45 385 485 585 685 560 650 750 850 Fixed Connection part dimensions/ Companion flange Female threaded companion flange L-type block companion flange Differential pressure indication switch d Differential pressure indicator d (75) (50) E (Rc) L-type
It shifts to power-saving mode automatically when there is no button operation for 30 seconds. MChannel scan function Pressure values for each channel are displayed in turn every 2 seconds. MZero-clear function This function clears and resets the zero value on the display of measured pressure.