Actuator Position Sensor

Applying an excessive impact (more than 300 m/s2) may damage the product and cause malfunction. (2) Observe the proper tightening torque for mounting. If the screws are tightened in excessive of the specified torque range (0.2 to 0.4 Nm), it may damage the cylinder/actuator, mounting screws, mounting brackets, and sensor etc.

HRX-OM-K003

Table 8-7 Compliance EMC Directive 2004/108/EC Low Voltage Directive 2006/95/EC CE Marking Machinery Directive 2006/42/EC SEMATECH S2-93, S8-95 SEMI S2-0703, S8-0701, F47-0200 UL E229305 / UL1995 8.7 Compliance HRW Series 8-14 HRX-OM-K003 Chapter 8 Appendix 8.8 Thermo Chiller Daily Inspection Sheet Serial No. Model: Judgment Circulating fluid supply port cap Looseness IN press.

VP3145/3165/3185

(Values at the initial period) Shock/Vibration resistance (m/s2) (3) For vacuum/ low pressure For general Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Pilot pressure (MPa) Solenoid Specifications Grommet (G), Conduit terminal (T) DIN terminal (D) Conduit terminal

VT317

VQ VKF Surge voltage suppressor mounting part (For G) VQZ VZ VS VFN Surge voltage suppressor Electrical entry G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire C Conduit JIS Symbol T Conduit terminal D DIN terminal Rated voltage 50 60 1 2 3 100 VAC, Hz 200 VAC, Hz 110 VAC, Hz 220 VAC, Hz 50 60 50 60 4 50 60 5 6 24 VDC 12 VDC 7 240 VAC, Hz 50 60 9 Other Option Manifold Accessory

5 Port Air Operated Valve Series VFA3000 1

Not required Lubrication Mounting orientation Free Impact/Vibration resistance (m/s2) Note) 300/50 Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal is ON and OFF .

VFRA3000

Refer to page 5-11-4.) 2 position double 3 position exhaust center Not required Lubrication (2) Mounting orientation Free 300/50 Impact/Vibration resistance (m/s2) (3) Note 1) In case of single type, be certain that supply pressure within operating pressure range be supplied to supply port, because return pressure is introduced from supply port 1(P) for activation.

Escapements Series MIW/MIS

Point of application L (mm) Point of application L (mm) Work piece transfer speed Distance of work piece drop V (m/min) H (mm) Coefficient of friction between the work piece and conveyor Gravitational acceleration g (m/s2) Point of application L Transfer speed V Procedure 2 Confirmation of impact 1.

rail type, ACTUATOR, ELECTRIC, SLIDER, ACTUATOR, ELECTRIC ACTUATOR, GC, 16MM LE ELECTRIC ACTUATOR, 4.05650 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation typeGuide

rail type, ACTUATOR, ELECTRIC, SLIDER, ACTUATOR, ELECTRIC ACTUATOR, GC, 16MM LE ELECTRIC ACTUATOR, 5.26353 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation typeGuide

rail type, ACTUATOR, ELECTRIC, SLIDER, ACTUATOR, ELECTRIC ACTUATOR, GC, 16MM LE ELECTRIC ACTUATOR, 3.30693 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation typeGuide

rail type, ACTUATOR, ELECTRIC, SLIDER, ACTUATOR, ELECTRIC ACTUATOR, GC, 16MM LE ELECTRIC ACTUATOR, 4.18878 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation typeGuide

rail type, ACTUATOR, ELECTRIC, SLIDER, ACTUATOR, ELECTRIC ACTUATOR, GC, 16MM LE ELECTRIC ACTUATOR, 4.23463 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation typeGuide

rail type, ACTUATOR, ELECTRIC, SLIDER, ACTUATOR, ELECTRIC ACTUATOR, GC, 16MM LE ELECTRIC ACTUATOR, 4.23463 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation typeGuide

rail type, ACTUATOR, ELECTRIC, SLIDER, ACTUATOR, ELECTRIC ACTUATOR, GC, 16MM LE ELECTRIC ACTUATOR, 2.64554 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation typeGuide

rail type, ACTUATOR, ELECTRIC, SLIDER, ACTUATOR, ELECTRIC ACTUATOR, GC, 16MM LE ELECTRIC ACTUATOR, 4.13975 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation typeGuide

rail type, ACTUATOR, ELECTRIC, SLIDER, ACTUATOR, ELECTRIC ACTUATOR, GC, 16MM LE ELECTRIC ACTUATOR, 4.62370 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation typeGuide

rail type, ACTUATOR, ELECTRIC, SLIDER, ACTUATOR, ELECTRIC ACTUATOR, GC, 16MM LE ELECTRIC ACTUATOR, 4.62970 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation typeGuide

rail type, ACTUATOR, ELECTRIC, SLIDER, ACTUATOR, ELECTRIC ACTUATOR, GC, 16MM LE ELECTRIC ACTUATOR, 3.30693 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation typeGuide

rail type, ACTUATOR, ELECTRIC, SLIDER, ACTUATOR, ELECTRIC ACTUATOR, GC, 16MM LE ELECTRIC ACTUATOR, 3.30693 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation typeGuide

rail type, ACTUATOR, ELECTRIC, SLIDER, ACTUATOR, ELECTRIC ACTUATOR, GC, 16MM LE ELECTRIC ACTUATOR, 3.96832 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation typeGuide