Fieldbus system Digital unit

EX600-DX F No.

MHF2

Operating pressure: 0.4 MPa Model Selection Illustration When gripping a workpiece as in the figure to the left and with the following definitions, F: Gripping force (N) : Coefficient of friction between attachments and workpiece m: Workpiece mass (kg) g: Gravitational acceleration (= 9.8 m/s2) mg: Workpiece weight (N) F F the conditions under which the workpiece will not drop are mg F F

MHF2

Operating pressure: 0.4 MPa Model Selection Illustration When gripping a workpiece as in the figure to the left and with the following definitions, F: Gripping force (N) : Coefficient of friction between attachments and workpiece m: Workpiece mass (kg) g: Gravitational acceleration (= 9.8 m/s2) mg: Workpiece weight (N) F F the conditions under which the workpiece will not drop are mg F F

VEX1

2 1 4 11 4 1 2 1 8 1 4 1 4 3 8 1 2 1 2 3 4 There were not many appropriate large capacity 5 port valves of a closed center.

MLGP

CNS CLS CLQ MLGP RLQ MLU ML1C D-X 20Data 9-11-29

MLGP

CNS CLS CLQ MLGP RLQ MLU ML1C D-X 20Data 9-11-29

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

11 11 23 11 23 SOL.A SOL.B SOL.B Light/Surge voltage suppressor Station 10 Station 10 SOL.A SOL.A 10 10 Light/Surge voltage suppressor Light/Surge voltage suppressor 15 15 15 SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 2 2 SOL.A SOL.A SOL.A Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor 2 SOL.B SOL.B SOL.B 14 Station 1 Station 1 14 14 Station

Secondary Batteries

B L F G D *Mounting brackets are shipped together, (but not assembled).

HRX-OM-Y120

(C or F). Read the circulating fluid discharge temperature which is displayed on the touch panel.

Digital Pressure Switch ( compatible)

OUT1 ON : Green OUT1 OFF: Red [F 2] Setting of OUT2 Page 37 Same setting as [F 1] OUT1.

Compact Cylinder with Lock Series CLQ

to 50 80 116.5 53.5 11 11 99 116 134 43 20 53.5 77 53.5 116.5 75, 100 53 125 10 to 50 100 135 63 11 11 117 136 154 50 22 53.5 94 L1 Rod end nut 63 135 75, 100 Rear flange type: CLQG/CDLQG FV M Rear flange type (mm) 4-FD Without auto switch With auto switch Bore size (mm) FZ FX A + Stroke L FT B + Stroke G Stroke range FD FT FV FX FZ G L L1 M A A B B 36 91 10 to 50 63 101 46 9 9 80 92 108

Low Friction Cylinders Series MQ

I NA D J A F N2 N1 MM S + Stroke F H ZZ + Stroke (mm) P Bore size (mm) MM A NN D F G1 G2 S ZZ I H J N1 N2 NA TN TF 10 15 M12 x 1 4 M5 x 0.8 8 15 6 M4 x 0.7 65 101 18.5 28 16 11 20 16 16 15 M14 x 1 5 M5 x 0.8 10 15 6 M5 x 0.8 74 114 22 30 22 12 21 19.5 20 18 M20 x 1.5 8 Rc 1/8 13 NPT 1/8 25 G 1/8 8.5 M8 x 1.25 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M10 x 1.25 18 M26 x 1.5 10 Rc 1/8 13

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

34.7 [41.7] M5 x 0.8 (A, B port) 2-1.8 (For monifold mounting) (Light/surge voltage suppressor) 28 [35] + 22.1 54.4 [56.6] 2 13.5 12.6 15 R P R (Bracket) 15 11 10 1.2 (PE port) 22.1 7 7 15 M5 x 0.8 (P, R port) L plug connector (L) : SYJ3120-L-M3 (-F) M plug connector (M): SYJ3120-M-M3 (-F) M8 connector (W0): SYJ3120-W0-M3 (-F) (2) Approx. 300 (Lead wire length) 28 [35] 12.6 32.5 M8 x 1 15

Slider Type/Ball Bushing Bearing

Displacement of Section A when force acts on Section F Displacement of Section A when force acts on Section F F A F Guide central axis (1 axis type) F For the double axis type, this is the cylinders central axis.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

2.5 51 62.5 80.5 101 129 29 35.5 47.5 59 71.5 13 15 18 24 38 0.15 0.29 0.56 1.04 2.6 8.5 10 16 21 18 11 13 20 26 22 31 41 50 59.5 79 6 7.5 9.5 11.5 14 11 14 19 24 30 11 13.5 16 20 22 22 27 32 41 46 0.75 1 1.25 2 2.5 6000 11000 18000 28000 54000 1300 3100 5000 7900 15300 Individual -X 443 Series MGZR Minimum Stroke for Mounting (mm) 20 25 32 40 50 63 80 Model No. of auto switches 2 pcs.

DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY

ITV

Output deviation factor (% F .S.) 0.6 0.5 0.4 Return 0.2 0 0 0.2 0.4 0.5 Out 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Table displacement due to yaw moment load Displacement at "A" when load is applied at "F" Table displacement due to roll moment load Displacement at "A" when load is applied at "F" A A F F A F L L L 6 6 6 L = 80mm L = 80mm L = 80mm MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 0.05 0.05 0.06 0.04 Table displacement mm Table displacement

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Description Material Note Body A 1 PBT Handle 2 PBT Body B 3 AS-F Stainless steel 303 Needle 4 Stainless steel 303 Needle guide 5 TMH Stainless steel 303 Lock nut 6 Stainless steel 303 U seal 7 ASD HNBR Spacer 8 Cassette 9 AS Seal 10 NBR O-ring 11 AS-FE NBR KE AS-FG AS-FG Dimensions AS-FP AS-FM Applicable tubing O.D. d AS-D AS-T ASP ASN AQ ASV AK Metric Size Inch Size VCHC Model d Weight

High Vacuum Angle Valve

55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.