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(Page 14) F: Limited warranty and Disclaimer are added. G: Contents revised in several places.

3 AQ ASV Body size Accessory 1 8 Nil None With bracket 1 3 5 6 AK 8 3 B 3 4 1 Port size ASS Applicable series Port size 01 02 03 04 06 10 Type 1 8 ASS100/110 ASS300/310 ASS300/310 ASS500 ASS500/600 ASS600 ASR PAT.PEND 1 4 00 10 Meter-out control type Meter-in control type Meter-in type is available only for ASS110 and ASS310. 8 3 ASF 1 2 3 4 1 JIS Symbol Thread type Nil N F Rc NPT G Meter-out

rate (l/min(ANR)) Auto-drain 00 10 11 None 6 72 Float style auto-drain (N.C.)

)) 00 10 11 None Float type auto-drain (N.C.)

ZSM Thread type Terminal box Nil Rc PF2 0 Without terminal box (Contact: 1ab) N NPT 1 F With terminal box (Contact: 1ab) G IF 2 With terminal box (Contact: 1b) Note) 5 With terminal box (24 VDC, + COM, Contact: 1b) Port size Data Note) 6 With terminal box (24 VDC, + COM, Contact: 1a) 04 03 3/8 Note) 7 With terminal box (24 VDC, COM, Contact: 1b) 1/2 Note) 8 With terminal box (24 VDC, COM

Symbol Air filter Air filter with auto drain AW -A -B How to Order 2 1 2 1 AW 12 AF 00 8 AG L L Option Air filter E Nil None Flow Rate Characteristics (Representative Values) Body size D 5 Drain cock with barb fitting Drain guide 1 2 1 2 8 9 AV AF800 J 6 R Flow direction: Right to left AF AF Pressure drop (MPa) Pressure drop (MPa) Auto-drain specifications Option 00 10 11 None Float type

3 AQ ASV Accessory Body size 1 8 Nil None With bracket 1 3 5 6 AK 8 3 B 3 4 1 Port size ASS Applicable series Port size 01 02 03 04 06 10 Type 1 8 ASS100/110 ASS300/310 ASS300/310 ASS500 ASS500/600 ASS600 ASR PAT.PEND 1 4 00 10 Meter-out control type Meter-in control type Meter-in type is available only for ASS110 and ASS310. 8 3 ASF 1 2 3 4 1 JIS Symbol Thread type Rc NPT G Nil N F Meter-in

Compact Vacuum Unit Series ZB RoHS How to Order Single Unit 5 L 0 2 K1 ZB 00 P1 C4 Vacuum Pump System 5 L 1 1 K1 ZB 04 P1 C4 Ejector Nominal Nozzle Size Rated Voltage Body Type 5 6 24 VDC 12 VDC Port specification Note 2) Symbol Applicable supply valve and standard supply pressure Body specification Nominal nozzle size Large flow (N.C.)

PA02] 0 0 Select a regenerative option. 00: Regenerative option is not used. 00: 100 W 0.2 kW 7 kW 11 kW 22 kW 01: FR-BU2FR-RC FR-CV 02: MR-RB032 03: MR-RB12 04: MR-RB32 05: MR-RB30 06: MR-RB50 () 08: MR-RB31 09: MR-RB51 () 0B: MR-RB3N 0C: MR-RB5N ( ) FA: 11 kW 22 kW UP For drivers of LECSN-T5, do not use a regenerative resistor.

0 0.40.50.69.910.0 000.10.20.30.40.50.69.910.0 ISE75H-(15 MPa) 00 0 0.50.614.915.0 000.10.20.30.40.50.614.915.0 0 0 ISE75 00.410.0 MPa 010.0 MPa ISE75H 00.515.0 MPa 015.0 MPa 0 SETOUT1 -19No.PS-OMH0002CN-D 8 SET 2 SET 2 1. 1) OUT1 1. 2) OUT1 1. 3) OUT2 -27-67 1. 4) OUT2 -27-67 2. 3. 4.

If the number is set to 00, or to 65 or above, the L ERR LED will turn on. : The station number must not be duplicated, this will cause an error. : The default setting is 00. Communication speed setting Setting Communication speed 0 156 kbps 1 625 kbps 2 2.5 Mbps 3 5 Mbps 4 10 Mbps : The communication speed should be set within the range of 0 to 4.

Symbol Air filter Air filter with auto drain How to Order AW -A -B 2 1 2 1 AW 12 AF 00 8 AG L L Option Air filter Flow Rate Characteristics (Representative Values) Nil E None Body size D 5 Drain cock with barb fitting Drain guide 8 9 1 2 1 2 AV AF800 J 6 R Flow direction: Right to left AF AF Pressure drop (MPa) Pressure drop (MPa) Auto-drain specifications Option 00 10 11 None Float type

3 AQ ASV Body size Accessory 1 8 Nil None With bracket 1 3 5 6 AK 8 3 B 3 4 1 Port size ASS Applicable series Port size 01 02 03 04 06 10 Type 1 8 ASS100/110 ASS300/310 ASS300/310 ASS500 ASS500/600 ASS600 ASR PAT.PEND 1 4 00 10 Meter-out control type Meter-in control type Meter-in type is available only for ASS110 and ASS310. 8 3 ASF 1 2 3 4 1 JIS Symbol Thread type Nil N F Rc NPT G Meter-out

Positioning hole Positioning hole Caution e One-touch fitting Tightening torque: 0.12 Nm q Unit Assembly Part No. r Bracket Assembly Part No. 00 VV061 08 5 H Description Part no.

Power supply Load voltage + + + + Power supply Load voltage Power supply voltage Load Fig. 11 Table 7 A F H Terminal no.

Nil N F Rc NPT G Lead wire (Refer to page 35.)

Note 2) Vacuum pilot type pilot solenoid valves will become VO301V-00.

VQC4000 Thread type Note) VVQC4000-3A-1 Series Nil F T Rc G NPT/NPTF Kit type 1 2 4 Thread type VQC1000 VQC2000 VQC4000 Nil F T 1 2 3 Rc G NPT/NPTF S (EX240) kit F, P, T, S (EX250) kit L, M, S (EX500) kit Note) VQC 4000 thread port only Note) Tie-rods (2 pcs.) for additional stations included. U-side end plate assembly !8 U-side end plate assembly part no.

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

24 V F Black 0 V -X G Shield 649 CEP1 Series Construction 12, 20 !