Clean Room Rodless Cylinder Series CYP ø15, ø32 1

MY CY Proper Auto Switch Mounting Position MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A B Auto switch model CX D-Y5 D-Y6 D-Y7P D-Y7PV D-Y5 D-Y6 D-Y7P D-Y7PV D-Z7 D-Z80 D-Y7W D-Y7WV D-Y7W D-Y7WV D-Z7 D-Z80 DCylinder model CYP15 93.5 24.5 -X CYP32 122 33 20Data

XLAQ/XLDQ

Valve side exhaust Refer to page 478 for the maintenance parts. 470 XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12 11 11 E 30 40 55 75 F 17

CQS

, D-F9WV D-M9, D-F9W D-M9V D-A9V D-F9BAL CQ2 No. of auto switches mounted 1.

3 Port Solenoid Valve

U/D End Plate> SS070A012A Replacement Parts No. 9 No. Description Material Number < D Side End Plate Assembly > 3 D side end plate assembly No.

MHY2/MHW2

Operating model: MHY2-16D Opening time: 0.15s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b c B part e f d Material of attachment: Aluminum alloy (Specific gravity = 2.7) r1 = 37 (mm) z r1 Calculate the moment of inertia of attachment.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D-B5/B6, D-B59W, D-A3/A44 Band mounting Reed switch Tie rod mounting D-A5/A6, D-A59W, D-A3C/A44C D-G5/K59, D-G5NTL, D-G5W/K59W D-G5BAL, D-G59F, D-G39/K39 D-F5/J5, D-F5NTL, D-F5W/J59W D-F5BAL, D-F59F, D-G39C/K39C D-H7, D-H7W, D-H7F, D-H7BAL, D-H7C, D-G5NTL, D-G39A/K39A Band mounting Solid state switch Tie rod mounting 3.4-1 Series CB Prior to Use Precautions Be sure to read before handling

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

Operating model: MHY2-16D Opening time: 0.15 s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b c B part e f d 2.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

Operating model: MHY2-16D Opening time: 0.15 s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com c B part e f d 2.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

T 02 03 Port thread Nil T F Rc NPTF G Size 1 2 3 Size 1 Size 2 Size 3 Location of P, EA, EB port Number of stations D U Bottom Top 1 1 station 10 10 stations Size of P, EA, EB port Note) SU and TBU require one station. 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Location and size of A, B port 02 03 04 06 10 02B 03B 04B Side 1/4 Side 3/8 Side 1/2 Side 3/4 SIde 1 Bottom 1/4 Bottom 3/8 Bottom 1/2 Option

VCS

Stainless Steel (mm) A B C D E F G H J L Bracket part no.

HRL

G1, Symbol N: NPT1) CH2: Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Tank drain port CH1: Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) CH2: Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Fluid contact material (Metal/Resin) CH1: Stainless steel, Copper (Heat exchanger brazing), Brass, Bronze, Fluororesin, PP, PBT, POM, PU, PC, PVC, EPDM, NBR CH2: Stainless steel, Alumina ceramic, Carbon, Fluororesin,

Cylinder with Lock Series CNS

Hs Proper auto switch mounting positions Auto switch mounting height (mm) (mm) Auto switch models D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch models D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F5F D-F5NTL D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5/A6 D-A3 D-A44 D-G39 D-K39 D-A59W D-F5NTL D-F5F Bore size (mm) Bore size (mm) A B A B A B B A B Hs Hs Ht Hs Ht A Hs 125 125 0 0 2 2 4.5 4.5 8.5 8.5 9.5 9.5

ITV

Output deviation factor (% F .S.) 0.6 0.5 0.4 Return 0.2 0 0 0.2 0.4 0.5 Out 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

U B A Approx. U A B D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NTL D-F7BAL SMC SMC Approx. U Approx. U Approx. U SMC SMC Approx. U A B B A Approx. U D-A73C D-A80C D-J79C B A A B Approx.

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

U Approx. U A B B A D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NTL D-F7BAL SMC SMC Approx. U SMC SMC Approx. U B A B A Approx. U D-A73C D-A80C D-J79C D-A7*C,D-A80C Approx. U Approx. U D-A7*C,D-A80C A B A B Approx.

CXT

d NN RW RW PW QW PB GP lE W Y Z 2-M5X0.8 2-RB G G HT U (NA) (Option) A L HN(MAX.)

Bernoulli Gripper

Dimensions [mm] Model A B C D E F G H J K L M N P Q R S T U V W Weight [g]*1 Outer body dia.

10

Mounting side Closed C B A A Open D Open E F F Mounting side MHL2-25DZ-X86/X86A MHL2-25D Z-X86/X86A 1 2 200 200 160 160 Gripping force [N] Gripping force [N] Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 120 120 0.5 MPa 0.4 MPa 0.4 MPa 80 80 0.3 MPa 0.3 MPa Closed F (Fingers closed) 40 40 0 0 40 80 120 160 200 0 0 40 80 120 160 200 [mm] Model A B C D E F Weight [g] MHL2-25DZ-X86(A) 9 106 128

Size: 4 (40), Body Material: A (Aluminum), Seal Material: N (NBR), Port Size: 404 (Orifice Diameter: ø4mm; Port Size: 1/2), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: G (Grommet), Coil Orientation: U (Downward), Blow Port Position: F (Front)