Stations: 7 Stations, AB Port: 02R (1/4, Right), AB Thread: Rc, Control: None, PR Port: 03B (3/8, Both Sides), PR Thread: Rc, Silencer: SB (Silencer Box)

Stations: 8 Stations, AB Port: 02L (1/4, Left), AB Thread: Rc, Control: None, PR Port: 03B (3/8, Both Sides)

HRX-OM-X084

Ambient temp. 500 Heating capacity [W] Heating capacity [W] 400 40 40 400 32 32 300 300 25 25 5 5 200 200 100 100 0 0 10 15 20 25 30 35 40 10 15 20 25 30 35 40 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR010-A-20-) 9.5.4 HRR010-W-20400 400 Facility water temp.

ZQ-OM01401

-40 10 -20 -20 5 0 0 0 0.2 0.3 0.4 0.5 0 1 2 3 4 5 6 [MPa] [L/min (AMR) ] ZQ07A 0.43MPa -100 40 -100 35 -80 [L/min (AMR) ] -80 [L/min (AMR) ] 30 [kPa] [kPa] -60 25 -60 20 -40 -40 15 10 -20 -20 5 0 0 0 0 2 4 6 8 10 12 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] ZQ10A 0.43MPa -100 70 -100 60 -80 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 50 -60 -60 40 -40 30 -40 20 -20 -20 10 0 0 0

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

A Insulation: Red (+) 2 x 4.2 (Mounting holes for manifold) 20 2 x 1/4" {A (4), B (2) port} 42 (14) 1.2 (52) (2 x 4.2 Mounting holes) 44 (For E type) (49.5) 0.3 mm2 (42.5) 40 40 14.7 125 (39.4) 123.3 L (Lead wire length) 1/4" {P (1) port} 2 x 1/8" {EA (5), EB (3) port} 39.4 0.9 18 2 1.2 (23.9) EB P EA 39.5 13 36 2 x 2.2 (Positioning for manifold gasket) (66) L plug connector with cover (

VK3000

Mixed Mounting of VK300 and Manifold Base of Series VK3000 Type VV5K3-20 Type VV5K3-40 1. In the case of VV5K3-20/40 When installing the 3 port valve on the manifold base, plug the R port at the corresponding mark side with the rubber plug (VK3000-8-1) as shown in the figures on the right. Plug Plug 2.

VK3000

Mixed Mounting of VK300 and Manifold Base of VK3000 Series Type VV5K3-20 Type VV5K3-40 1. In the case of VV5K3-20/40 When installing the 3 port valve on the manifold base, plug the R port at the corresponding mark side with the rubber plug (VK3000-8-1) as shown in the figures on the right. Plug Plug 2. Other manifold 3 port valve can be mounted without any work.

Series: 1 (JSY1000), Type: 40 (Side Ported), Valve Stations: 5 Stations, P,E Port Entry: D (D Side), A,B Port Size: M5 (M5 x 0.8)

Series: 1 (JSY1000), Type: 40 (Side Ported), Valve Stations: 2 Stations, P,E Port Entry: D (D Side), A,B Port Size: M5 (M5 x 0.8)

Series: 1 (JSY1000), Type: 40 (Side Ported), Valve Stations: 2 Stations, P,E Port Entry: D (D Side), A,B Port Size: M5 (M5 x 0.8), Thread Size: N (NPT)

Series: 1 (JSY1000), Type: 40 (Side Ported), Valve Stations: 2 Stations, P,E Port Entry: U (U Side), A,B Port Size: C4 (ø4 One-touch Fitting; Fixed), Thread Size: N (NPT)

Series: 1 (JSY1000), Type: 40 (Side Ported), Valve Stations: 4 Stations, P,E Port Entry: B (Both Sides), A,B Port Size: C4 (ø4 One-touch Fitting; Fixed), Thread Size: N (NPT)

Series: 1 (JSY1000), Type: 40 (Side Ported), Valve Stations: 4 Stations, P,E Port Entry: B (Both Sides), A,B Port Size: M5 (M5 x 0.8), Thread Size: N (NPT)

Series: 1 (JSY1000), Type: 40 (Side Ported), Valve Stations: 4 Stations, P,E Port Entry: D (D Side), A,B Port Size: M5 (M5 x 0.8)

Series: 1 (JSY1000), Type: 40 (Side Ported), Valve Stations: 4 Stations, P,E Port Entry: D (D Side), A,B Port Size: M5 (M5 x 0.8), Thread Size: N (NPT)

Series: 1 (JSY1000), Type: 40 (Side Ported), Valve Stations: 5 Stations, P,E Port Entry: D (D Side), A,B Port Size: M5 (M5 x 0.8), Thread Size: N (NPT)

Series: 1 (JSY1000), Type: 40 (Side Ported), Valve Stations: 6 Stations, P,E Port Entry: D (D Side), A,B Port Size: M5 (M5 x 0.8), Thread Size: N (NPT)

Series: 1 (JSY1000), Type: 40 (Side Ported), Valve Stations: 8 Stations, P,E Port Entry: D (D Side), A,B Port Size: M5 (M5 x 0.8), Thread Size: N (NPT)

Series: 1 (JSY1000), Type: 40 (Side Ported), Valve Stations: 12 Stations, P,E Port Entry: D (D Side), A,B Port Size: M5 (M5 x 0.8), Thread Size: N (NPT)