Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

TDe8 TY up to 600 117 105 107 71 75 16 22 up to 600 117 105 130 87 90 20 28 up to 750 147 129 150 110 110 20 34 TT TX up to 750 147 129 182 136 132 25 40 TZ 1.7-35

e-Rodless Actuator

(Wn) Weight (mn) Y-axis Yn Z-axis Zn X-axis Xn Z X Wa 5 mm 0.88 kg 0 mm 65 mm 111 Wb 42.5 mm 4.35 kg 0 mm 150 mm Y 210 Y Wc 42.5 mm 0.795 kg 111 mm 150 mm Wd 42.5 mm 1.0 kg 210 mm 150 mm n = a, b, c, d 3 Calculation of composite center of gravity m3 = mn = 0.88 + 4.35 + 0.795 + 1.0 = 7.025 kg 1 m3 X = x (mn x xn) 1 7.025 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 1.0 x 150) = 139.4 mm 1

LEKF-OMZ0035

24 30 to to B With lock A 12 16 20 1200 1200 B 6 8 10 *Refet to Applicable Stroke Table.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

(N) 0 50 100 150 Load (N) 200 16 16 16 L = 120 mm L = 120 mm L = 120 mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N

ITV

Set point 20 0.5 30 Set pressure (kPa) 40 0 50 60 0.5 70 80 90 1.0 50 100 150 100 80 60 40 20 VAC. side pressure (Supply pressure) (kPa) Flow rate (L/min(ANR)) 845 Series ITV209 Dimensions Note) Do not attempt to rotate the cable connector, as it does not turn.

Air Cylinder NCA1 Series

52 : 1 3/4-12 85 : M24 x 1.5 25 : 5/8-11 53 : 1 3/4-5 86 : M26 x 1.5 26 : 5/8-18 54 :1 7/8-12 87 : M30 x 1.5 FEMALE ROD DIAMETER BORE (INCH) A B C MM KK WF 150 (1.5) 3/4 1 1/8 3/8 5/8 7/16-20 1 200 (2) 3/4 1 1/8 3/8 5/8 7/16-20 1 250 (2.5) 3/4 1 1/8 3/8 5/8 7/16-20 1 325 (3.25) 1 1/8 1 1/2 1/2 1 3/4-20 1 3/8 400 (4) 1 1/8 1 1/2 1/2 1 3/4-20 1 3/8 22 Air Cylinder Extended Series NCA1 PARTS

Slider Type/Ball Bushing Bearing

Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) Made to Order: Individual Specifications (For details, refer to pages 1538 and 1539.) 6 10 300 500 50, 100, 150, 200 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350 400, 450, 500 Symbol Specifications -X116 -X168 -X322 -X431 Hydro specifications 15 750 Helical insert thread specifications 20 25

ZP

Applicable Pad Diameter Symbol Breadth x Length (mm) 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 Symbol Breadth x Length (mm) 3.5 x 7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 3507 4010 4020 4030 5010 5020 5030 6010 6020 6030 8020 8030 Dimensions Series ZPT Series ZPR Series ZPY Long dia.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

H 39 45 55 60 UU 134 158 190 220 U 114 136 165 190 N 15 17 20 25 Model U 105 124 153 174 Model H 30 33 43 44 N 15 17 20 25 H 39 45 55 60 U 114 136 165 190 UU 150 177 215 250 Model UU 125 146 178 204 H 30 33 43 44 N 15 17 20 25 U 105 124 153 174 Model CDRA1FW50 CDRA1FW63 CDRA1FW80 CDRA1FW100 CDRA1FX50 CDRA1FX63 CDRA1FX80 CDRA1FX100 CDRA1FY50 CDRA1FY63 CDRA1FY80 CDRA1FY100 CDRA1FZ50 CDRA1FZ63

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

H 39 45 55 60 UU 134 158 190 220 N 15 17 20 25 U 114 136 165 190 Model U 105 124 153 174 Model H 30 33 43 44 N 15 17 20 25 U 114 136 165 190 UU 150 177 215 250 Model UU 125 146 178 204 N 15 17 20 25 U 105 124 153 174 H 39 45 55 60 H 30 33 43 44 Model CDRA1FW50 CDRA1FW63 CDRA1FW80 CDRA1FW100 CDRA1FX50 CDRA1FX63 CDRA1FX80 CDRA1FX100 CDRA1FY50 CDRA1FY63 CDRA1FY80 CDRA1FY100 CDRA1FZ50 CDRA1FZ63

0.

Formula: L5 = 20n + 8 L3 = 20n + 26 n: Stations (Max. 20 stations) Dimensions L n 2 3 123 112.5 86 18.5 68 4 148 137.5 106 21 88 5 160.5 150 126 17.5 108 6 185.5 175 146 20 128 7 198 187.5 166 16 148 8 223 212.5 186 18.5 168 9 248 237.5 206 21 188 10 260.5 250 226 17.5 208 11 285.5 275 246 20 228 12 298 287.5 266 16 248 13 323 312.5 286 18.5 268 14 348 337.5 306 21 288 15 360.5 350 326 17.5

Power Clamp Cylinder

20 25 20 20 20 25 40 50 63 80 40 50 63 80 S Bore size 40 40 50 63 80 50 63 80 B For 40 of A015, S type only Offset Arm position A015 A045 Offset 15 Offset 45 D1 Right D2 H R Center D1 D2 C H Left D1 D2 L H 192 Power Clamp Cylinder Series CKZT Cylinder Specifications 40 50 63 80 Bore size (mm) Action Double acting Fluid Air Proof pressure 1.2 MPa (174 psi) Max. operating pressure 0.8 MPa

air-filter-e

temperature (C) Note 2) 0 to 150 0 to 150 Outstanding mechanical strength, heat resistance and chemical resistance.

Air Preparation Equipment

temperature (C) Note 2) 0 to 150 0 to 150 Outstanding mechanical strength, heat resistance and chemical resistance.

LEF-OM002xx

100 200 300 400 500 600 V(mm/s) V (mm/s) V(mm/s) 10 - Step motor (servo 24VDC) Ball screw drive LEFS40 Model 150 to 1200 Stroke [mm] Note1) 65 55 25 LECP6/LECP1/LECPMJ/JXC91 Horizontal Work load [kg] Note2) 20 50 60 LECPA 2 2 23 Vertical 30 to 1200 20 to 1000 10 to 300 600 30 to 1200 20 to 900 10 to 300 601700 Controller type: LECP6 LECP1 LECPMJ JXC91 30 to 1140 20 to 760 10 to 300 701800

Air Slide Table Series MXS

Bore size (Stroke (mm)) 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 6 8 12 16 20 25 Functional option Standard With buffer With end lock Axial piping type With buffer and end lock With buffer, Axial piping type Nil F R (2) P FR (2) FP Adjuster option Note

Aluminum High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Ionizer Gun

1500 0 150 300 450 600 750 900 1050 1200 1350 1500 Distance [mm] Distance [mm] 5) 6) Supply pressure 0.4 MPa Consumed flow rate 316 L/min (ANR) Supply pressure 0.5 MPa Consumed flow rate 390 L/min (ANR) 200 200 150 150 2s 1.5s 100 100 50 50 1.5s 1s 0.5s 1s 0.5s 0 0 -50 -50 -100 -100 -150 -150 -200 -200 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350

Bag Filter

FGFL1A-20 FGFS1B-20 FGFL1B-20 625 725 820 985 1025 1196 1280 1470 1794 1910 955 1055 1150 1315 1355 FGF5-60 3 x 24 M20 for foundation bolt Davit Air release Fluid release Inlet Drain port Outlet 150 B.C.D570 950 475 Davit for cover Air release Rc1/4 Gauge port in the inlet side (Pressure gauge) 150(6B)JIS10KFF E (When the cover is lifted.)

MY2

Load weight Allowable moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100