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---(AL.01) Contact output signal 2 selected alarm Contact output signal 3 function Sets output signal function of contact output 3. ALM Contact output signal 3 operation Sets output signal operation of contact output 3. B Sets alarm which is selected for contact output 3. [-] is displayed when the setting of the output signal of contact output3 is not selected alarm signal.

/pressure center JIS Symbol 3 position closed center 3 position exhaust center 3 position pressure center (This figure shows a closed center type.)

Series 20, 30 2 W.N.C. & All 3 W. 2 W.N.O. 30, 50, 70 Series 20 Series 20, & All 3 W. & E20 & 30 50, 70 & E20 Series 20 Media S.S. Body Brass Body S. S.

U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)

5 w !9 !0 !7 u !7 w @1 !9 !3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

position Note ) Values inside ( ) denote the low wattage (0.5 W) specifications. 2-6-39 Series VQ5000 Construction Plug Lead Unit Metal seal Rubber seal type e q w q w e VQC SQ VQ0 VQ4 VQ5151 VQ5150 (A) 4 (B) 2 (A) 4 (B) 2 VQ5 VQZ 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD q w e q w VQ5251 (A) 4 (B) 2 VQ5250 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w r q w e VQ5350 VQ5450

2 1 ( 8 . 7 2 ) 2 . 3 1 ( 1 . 9 2 ) 0 . 6 2 ( 3 . 7 5 ) 6 . 6 2 ( 7 . 8 5 * n o i t a c i f i c e p s h c t i w s t a o l F e g a t l o V A 5 2 . 0 V 0 0 1 A 5 2 . 0 V 0 0 1 l e v e l h g i h r o f 2 , ) N O n w o d t a o l F ( l e v e l w o l a r o f 1 x i f f u S d d A . e l b a l i a v a s i h c t i w s t a o l f l e v e l h g i h d n a l e v e l w o l a h t o B : h c t i w s t a

. 3-2 3.2.3 Learning control function . 3-2 3.2.4 External sensor control function . 3-3 3.2.5 Temperature sensor fine control function . 3-3 3.2.6 Memorization of Set values function (Function that backs up with EEPROM) . 3-3 3.2.7 Temperature Upper / Lower Limit Alarm Function . 3-4 3.2.8 Communication Function. 3-4 3.2.9 Remote ON/OFF function. 3-5 3.2.10 Output cutoff Alarm Function

Chemical Thermo-con 13 19 1/2" x 3/8" 3/4" x 5/8" Communication Cooling capacity A B RS-485 RS-232C 003 005 007 300 W 500 W 750 W Radiating method 2 Power supply W Water-cooled Single-phase 180 to 242 VAC 50/60 Hz Combination in Set Heat exchanger model HED003-HW13 HED003-HW19 HED003-HW13 HED003-HW19 HED005-HW13 HED005-HW19 HED005-HW13 HED005-HW19 HED007-HW13 HED007-HW19 HED007-HW13 HED007

Refer to front matters 58 and 59 for Safety Instructions and pages 3 to 7 for 3/4/5 Port Solenoid Valve Precautions. How to Use the Valve for Vacuum Applications (When used as a 3 port valve) Latching Caution Caution 2 3 5 Latching Type 1 2 Application example of VQD1 1 V W (Symbols used are typical examples.)

W X Y M X Y Z LS + Stroke LX LZ ZZ + Stroke (mm) 7 7 6 6 LD 4 4 4 4 LC 3 3 3 3 LT 30 25 22 20 LH 51 53 53 53 LS Z 135 125.5 123.5 118 ZZ 16.5 16 15 15 X 8.5 8 7 7 Y 4 3.5 3.5 3 M B 54 44 36 32 LX 10 10 10 10 W 71 58 49 44 LZ Bore size 63.5 53 52 47 54.5 45 38.5 34 40 32 25 20 50 63 80 100 4.5 4.5 4.5 6 17.5 17.5 20 20 75.5 75.5 95 95 157.5 157.5 188.5 192 55 55 60 60 10 12 11 14 5 5 6 6 40

F FB G J R TF UF W WF Y LF P ZB 150 (1.5) 5/8 7/16-20 3/4 2.02 1 1/8 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 3/8 5/16 1.26 1.1 1.43 2 3/4 3 3/8 5/8 1 1.71 3 5/8 2.36 4 5/8 200 (2) 5/8 7/16-20 3/4 2.6 1 1/8 1 1/8 3/8 9/16 5/16-24 2.5 0.3 3/8 3/8 3/8 1.26 1.06 1.84 3 3/8 4 1/8 5/8 1 1.71 3 5/8 2.4 4 5/8 250 (2.5) 5/8 7/16-20 3/4 3.1 1 1/8 1 1/8 3/8 9/16 5/16-24 3 0 3/8 3/8 3/8 1.3 1.06 2.19 3 7/8

cores) Straight type 3 m 10 bit digital input INI-398-0-59 CC-Link PROFIBUS DP DeviceNetTM Straight type 3 m P398020-500-3 Power cable (4 cores) Right angle type 3 m P398020-501-3 Straight type 3 m P398020-500-3 Power cable (4 cores) Right angle type 3 m P398020-501-3 RS-232C Straight type 3 m P398020-502-3 Communication cables connector (5 cores) Right angle type 3 m P398020-503-3 Note

MHZ Flat Type Fingers [3] MHF 4 x MM thread depth L (Thread for mounting attachment) MHL K J MHR A A D G B MHK MHS D B MHC K J F MHT C MHY S W MHW O -X (mm) F G Mass (g) L MM J K D C B W Model A MRHQ Open Closed MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 +2.2 0 +2.2 0 +2.3 0 +2.5 0 +2.7 0 +2.9 0 +0.2 0 5 4 5 8 10 12 15 18 1 1.4 1.4 1.6 2 3 3 3 5 6 8 10 12 16 M2

3 R/W Hysteresis bit(0) 16 bit 10 Y 1 to 400 SetPoint1 bit(16) 16 bit 3 Y 3 1 R/W 0x003E BDC2 2 R/W SetPoint2 bit(0) 16 bit 3 Y 3 (62) Logic bit(24) 8 bit 0 Y 4 1 R/W 0x003F 2 R/W Mode bit(16) 8 bit 0 Y 5 BDC2 (63) 3 R/W Hysteresis bit(0) 16 bit 10 Y 1 to 400 SetPoint1 bit(16) 16 bit 3 Y 3 1 R/W 0x4000 BDC3 2 R/W SetPoint2 bit(0) 16 bit 3 Y 3 (16384) Logic bit(24) 8 bit 0 Y 4 1 R/W 0x4001

0 w q !7 t e t r !7 i ZL1 Series ZL3/ZL6 Series With valve and pressure switch, Port exhaust !2 !3 !6 !5 !1 !4 Component Parts No.

2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation

o Hard anodized containing PTFE U-side end plate Aluminum q U-side end plate assembly for 3 port valve When neighboring valve is a 3 port valve. E VVCC13-2A-02F Hexagon socket head cap screw with M5 x 20 SW Stainless steel w Hard anodized containing PTFE D-side end plate Aluminum q D-side end plate assembly for 3 port valve Plug POM w When neighboring valve is a 3 port valve.