VZ3000

152 17 6 198 187.5 168 15 7 210.5 200 184 13.5 9 248 237.5 216 16 10 260.5 250 232 14 (mm) (mm) 17 373 362.5 344 14.5 Stations L1 L2 L3 L4 11 273 262.5 248 12.5 12 298 287.5 264 17 13 310.5 300 280 15.5 14 323 312.5 296 13.5 15 335.5 325 312 12 16 360.5 350 328 16.5 18 385.5 375 360 13 19 398 387.5 376 11 20 423 412.5 392 15.5 8 210.5 200 184 13.5 Stations L1 L2 L3 L4 10 248 237.5 216 16

Electric Actuator

LECSB1: Single phase 100 to 120 VAC, 50/60 Hz Connection terminal: L1,L2 LECSB2: Single phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1,L2 Three phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1,L2,L3 Do not connect. L1 L2 L2 Main circuit power supply L3 L3 Regeneration converter N P1 P2 N DC reactor Connect between P1 and P2. (Connected at time of shipping.)

Series AS-FM/AS-M/ASD-FM

L2 Metric sizes A M1 L5 Max.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

20 L2 (mm) Mer m Rolling Yawing 10 L2 0 1 2 3 4 5 Mer Transfer load m (kg) m 30 a = 1000 a = 500 20 L3 (mm) a = 2000 L3 10 m Mey a 0 1 2 3 4 5 Transfer load m (kg) Refer to page 145 for deflection data. 88 Standard Motor/Horizontal Mount Specification Series LJ1S10 Dimensions/LJ1S101SC Scale: 15% 10 6 Work piece mounting reference plane 80 5H10 depth 8 8-M5 x 0.8 thread depth 8 45 20 Cable

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

210.5 9 182 194 225 235.5 10 201 213 237.5 248 11 220 232 262.5 273 12 239 251 275 285.5 13 258 270 300 310.5 14 277 289 312.5 323 15 296 308 337.5 348 16 315 327 350 360.5 17 334 346 375 385.5 18 353 365 387.5 398 19 372 384 412.5 423 20 391 403 425 435.5 L1 L2 L3 L4 39

High Purity Chemical Valve

Dimensions LLAmA-mm-C Stations 4 x Mounting hole for W Y Dimensions (mm) A S K Model LLA2A LLA3A LLA4A LLA5A 11.5 L1 24 L2 L3 29 Sensor (Breathing port) U 34.5 2 x R (mm) H G Station 2 3 4 5 Model C Symbol P N L1 L2 L3 L1 L2 L3 L1 L2 L3 L1 L2 L3 62 93 124 155 E V LLA2A 75 106 137 168 Pitch = B A (OUT) port n x Q 118 149 180 211 P (IN) port 2 x Q 74 111 148 185 (Max.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

L2 Metric Size L5 (1) A (2) M1 Weight (g) d T Model H D1 D2 D3 L1 L2 L3 L4 Max.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Dimensions L6 D4 Universal type H D1 Applicable tubing O.D. d (Hexagon width across flats) M1 L3 A L5 L4 D3 L1 L2 D2 T Metric Size Inch Size A Model A Weight (g) Weight (g) d T H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 M1 d T H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 Model M1 AS131F-M5-23T AS131F-U10/32-01T 1/8" 8.4 3.2 8.4 19.8 19.8 17.5 12.7 17.5 12.7 28.7 10 28.7 AS131F-M5-04T AS131F-U10/32-03T 5/32" 9.3

Manifold Specifications

152 17 6 198 187.5 168 15 7 210.5 200 184 13.5 9 248 237.5 216 16 10 260.5 250 232 14 (mm) (mm) 17 373 362.5 344 14.5 Stations L1 L2 L3 L4 11 273 262.5 248 12.5 12 298 287.5 264 17 13 310.5 300 280 15.5 14 323 312.5 296 13.5 15 335.5 325 312 12 16 360.5 350 328 16.5 18 385.5 375 360 13 19 398 387.5 376 11 20 423 412.5 392 15.5 8 210.5 200 184 13.5 Stations L1 L2 L3 L4 10 248 237.5 216 16

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

L3 L4 1.12-48 VQZ1000/2000/3000 Base Mounted VQZ2000 VV5QZ25 C Station Port size 41 (12) Grommet (G) (35) (5.5) 33 (7.5) 2n-C4, C6, C8 44.5 Mounting holes 15 7.7 C4: One-touch fitting for 4 C6: One-touch fitting for 6 (2) DIN rail clamp screw C8: One-touch fitting for 8 U side n A 4 B 2 Manual override SY 5 4 P=16 23.9 (L4) (L3) P=16 SYJ L1 L2 3 2n-Rc(PT)1/8 2 P=16 20.4 SX 1 SMC A 4 16.9

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Station 2 52 43 Station 20 340 331 Station n L1 L2 3 68 59 4 84 75 5 100 91 6 116 107 7 132 123 8 148 139 9 164 155 10 180 171 11 196 187 12 212 203 13 228 219 14 244 235 15 260 251 16 276 267 17 292 283 18 308 299 19 324 315 43 Series SYJ5000 Flat Ribbon Cable Manifold [ ]: AC SS5YJ5-20PStations -00 For (Built-in one-touch fitting) N3 N7 C4 C6 Manual override L1 L2 M5 x 0.8 (A, B port)

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

As a guide, adjust it within the smaller range than the values of L2 dimension in Table (3). Turning the bottom screw is not allowed. Piston rod Table (2) MXP6 MXP10/12/16 L2 L2 L2 (mm) 10 (One side only) 10 (One side only) 9 8 8 8 8 8 Model MXP6-5C MXP6-10C MXP10-10C MXP10-20C MXP12-15C MXP12-25C MXP16-20C MXP16-30C Damage is not allowed. 3.

VP300/500/700

Y: 4.5 to 7 D: 6 to 8 78.3 2(A) 2(A) 63 19 (A port) Rc1/2 Stations L L1 L2 Formula L1 = 41 x n + 33 L2 = 41 x n + 17 9 402 386 10 443 427 2 115 99 3 156 140 4 197 181 5 238 222 6 279 263 7 320 304 8 361 345 : With light/surge voltage suppressor ( ): Dimensions for external pilot 4-8-15

Stainless Steel 316

Note 1) P Model Weight (g) W L1 L2 P M1 M2 (mm) 4 6 8 10 12 KQGU04-00 KQGU06-00 KQGU08-00 KQGU10-00 KQGU12-00 4.2 10.6 21.2 41 16.8 10.6 18 17 35 L2 M1 10.6 13 26 42.9 17 13 18.8 17.8 54 L1 25.6 15 30 47.7 18.7 15 20.9 19.9 75 18 40 36 52.8 20.5 18 23 22 114 M2 N 57.4 20.8 41.6 57.8 21.9 21 24.8 23.8 175 Note 1) D is maximum diameter.

Air Catch Sensor Series ISA

160 76 114 5 198 114 152 6 236 152 190 Stations L1 L2 L3 63(Max. 65) 34 5 17 Detection port 19 For the bracket attachment position, refer to page 806.

15

Width across flats B1 MM [mm] Size B1 C1 H1 L1 L2 MM 25 22 20.5 8 36 23.5 M14 x 1.5 32 22 20.5 8 40 23.5 M14 x 1.5 63 27 26 11 72.4 39 M18 x 1.5 L1 L2 C1 H1 * The L1 measurement is when the unit is at the retracted stroke end position.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

6 11.5 Note 1) Reference dimensions Note 2) Reference dimensions of threads after installation 673 AS-FG Series For R, NPT thread Dimensions/ Elbow type Seal method: Sealant For R, NPT thread D3 Applicable tubing O.D. d D1 A L4 L3 M T L1 H (Width across flats) L2 Metric Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 1) M Weight [g] Unlocked Locked Unlocked Locked AS22l1FG-01-23(S)

reduces flow setting time

Type Seal method: Sealant For R, NPT thread Indicator window direction: 0 Indicator window direction: 180 D3 W1 W2 X Y Applicable tubing O.D. d A L4 D1 L3 M L2 L1 T H (Width across flats) Metric Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FS-01-23 (S) 3.2 7.2 13 (13) AS221FS-01-04 (S) 4 8.2 AS221FS-01-06 (

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

: Elbow Type Seal method: Sealant For R, NPT thread Indicator window direction: 0 Indicator window direction: 180 D3 W1 W2 X Y Applicable tubing O.D. d A L4 D1 L3 M L2 L1 T H (Width across flats) Metric Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FSG-01-23 (S) 3.2 7.2 13 (13) AS221FSG-01-04 (S) 4 8.2 AS221FSG

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Reference dimensions of 10-32 UNF and NPT threads after installation. 15-9-79 6 Dimensions Universal type L6 D4 Applicable tubing O.D. d H D1 (Hexagon width across flats) M1 L3 A L4 L5 D3 L1 D2 T L2 Metric Size Inch Size A Model A D1 d T H D2 D3 D4 L1 L2 L3 L4 L5 L6 M1 d T H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 Model M1 AS131F-M5-23D AS131F-U10/32-01D 1/8" 8.4 3.2 8.4 19.8 19.8 12.7 17.5 28.7