for applicable tubing diameter of 8) 3.5 2-R1.75 Release valve P PE 13 (Pitch) P =10 L2 L1 Release flow adjusting screw 8 P PE Exhaust part 2-3.5 62.8 (Body mounting hole Note 1)) 3 75 Suction filter With L type plug connector Vacuum pressure switch PE P EXH S R U N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO
AC200230V AC100120V 40 M5 3.24[Nm] M5 3.24[Nm] 6 AC100120V AC200230V AC100120V AC200230V L1 L1 PE PE L2 2-M5 2-M5 L2 L3 CNP1 CNP1 N N P1 P1 M4 1.2[Nm] P2 P2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L11 L11 L21 L21 U U CNP3 V CNP3 V W W 9 2 9 (2) LECSS-S8 [mm] 5 40 6 6 6 (80) (170) 6 6 () CN4 CN2L CN2 CN1B CN1A CN3 CN5 CNP1 L1 L2 L3 N P1 P2 P C D L11 L21 U V W L1 L2 () L3 N P1 CNP2 P2
u r t r t i i e Drain AW20(K) t w i y Drain q AW20K to AW60K (Filter Regulator with Backflow Function) IN OUT u A-A o Drain A r t i SMC K P C U O S L H o t A Drain Component Parts No.
The pressure sensor is shipped together with the product but does not come assembled. 12 ZNC Series Dimensions: 30, 40, 60 Basic type M5 x 0.8 thread depth 4 Air supply port PB1 M5 x 0.8 thread depth 4 Multi-port2, 4, 6 4 x H thread depth J R 16.5 Counterbore diameter P, depth Q Counterbore diameter P, depth Q 6.5 45 45 30 M5 x 0.8 thread depth 4 Air supply port PA1, 4 120 120 A Counterbore
(except for 50) MY1MW16, 20, 50, 63 MY1CW16, 20, 50, 63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25, 32, 40 MY1CW25, 32, 40 L L This port is not available for use. (except for 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 39 Series MY1W Specific Product Precautions 2 Be sure to read before handling.
3.5 21 25 X 21 14 R P 12 26 40 4 (3.6) (26) 54.2 40.5 48.8 (34) 54.5 54.3 1/8 (P, A, R port) 14.5 16 0.8 R P 18 1.8 (Breathing hole) 1.8 (Breathing hole) 20 12 23 15 1/8,1/4 (P , R port) 48 1797
M-5HL-6 P. 92 M-01AN-6 P. 90 6/4 6/4 P. 93 Plug To plug unused M5 port. Barb fitting M-01AU-4 Hose elbow(H) M-5HLH-4 4/2.5 4/2.5 M-5P For soft nylon and polyurethane tube. 1 8 R(PT) P. 93 Gasket M-01AU-6 P. 90 M-5HLH-6 P. 92 6/4 6/4 To seal M5 thread. M-5G1 Hose nipple M-01H-4 Elbow P. 93 4/2.5 For nylon, soft nylon and polyurethane tube.
(A) L (B) P C D M Q Purge air for H dew point indicator J F K 37 N IN OUT (G) (E) (Maintenance space 100 mm or more) M5 female thread Drain P (A) IDG30AM2, 50AM2 IDG30HAM2, 50HAM2 IDG30LAM2, 50LAM2 (B) P D C Purge air for L Q H dew point indicator M J 37 F Drain Discharge N With float type auto-drain IN OUT OUT (R) K (E) N.O.: Black N.C.: Gray (G) Applicable tubing O.D.: 10 (NPT threads:
5 5.5 5.5 6 10 14 M8 M10 X 1.25 M10 X 1.25 M14 X 1.5 24 29 35.5 44 8 10 12 16 6 8 ZZ With rod boot W Without rod boot ZZ e f h l Bore (mm) Stroke range H1 P PG PH PL PW S TA TB TC WA WW WB WH H 20 25 32 40 M5 M5 Rc(PT)1/8 Rc(PT)1/8 30 30 25 20 141 151 10 10 20 24 24 24 38 41 41 41 154 169 5 6 6 8 33 38 39 44 19.5 24 24 24 11 11 M5 M6 X 0.75 M8 M10 X 1.25 86 96 97 5.5 7 7 9 15 15 15 15 23
B B B B B N.O.: Black Dimensions B B B N.C.: Gray O S O S M5 x 0.8 1/8 1/4 Barb fitting Applicable tubing: T0604 10 one-touch fitting Width across flats 17 Width across flats 14 Model Standard specifications Optional specifications Bracket mount With auto drain P A B C D E G J M N Q R S T U V B AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 M5 x 0.8 25 67 7 12.5 25 12.5 85 AC 1/8, 1/4 40 97 10 20
Grommet: G Conduit: C (Q) Approx. 300 Approx. 280 Approx. 300 D D F Q F Q Width across flats H Class H coil Broken line section C C R G1/2 R E E A H A B B 2 x P Port size 2 x P Port size 2 x M, thread depth N 2 x M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6 to 12 F S Q 27.5 34 F (Q) 25 R C U C (44) R E R G1/2 E G1/2 A H D (S) B B A H D 2 x P Port size 2 x P Port size
26 35 47 N 8.4 8 10.5 Q 2.3 2.3 2.3 L 22 23 26 P 40 53 70 W 34.5 41 A NPT 1/4 NPT 3/8 NPT 1/2 C 40 53 70 F 40 53 70 E 10 14 18 G 57 73 H 18 16 17 J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AF20 AF30 AF40 Auto Drain mm Dimensions Mounting Bracket Kit (Optional) AF30P-050AS-X480 AF40P-050AS-X480 Model Port Size D 158 194 M 6.5 8.5 R 35 47 N 8 10.5 Q 2.3 2.3 L 23 26 P 53
L M N NN P Q QQ R X Y U Model 2-3.4 through 2-6.5 counterbore with depth 3.3 4-M3 x 0.5 with depth 4.5 2-M4 x 0.7 with depth 7 2-M3 x 0.5 with depth 5 M3 x 0.5 x 10 46 17 44 15 7.5 2-M4 x 0.7 35 20 4 8 20 6 33.6 8.5 7 30 M5 x 0.8 x 5 CXS10 2-4.3 through 2-8 counterbore with depth 4.4 4-M4 x 0.7 with depth 5 M5 x 0.8 x 10 2-M4 x 0.7 with depth 6 2-M5 x 0.8 with depth 8 38.5 58 20 56 18 9
66.9 M4 x 12 M5 x 40 11 NT M5 x 0.8 9 70 50 5 47.5 89.8 66.9 M3 x 12 M5 x 40 12 NM2 M4 x 0.7 8 50 36* 4.5* 41.4 89.8 66.9 M4 x 12 M5 x 25 10 40 * Dimensions after mounting a ring spacer 803 LEFS Series Dimensions: Motor Flange Option Motor mounting position: Motor parallel e w q r PD (I.D.)
VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.
VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.
VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.