ARM10/11

n) + 23 (79 x n) + 25 (188 x n) + 43 (187 x n) + 45 Common IN Individual IN Common IN Individual IN 1 8 1 8 1 4 1 8 1 8 1 8 1 8 1 8 ARM1000 57 ARM2000 136 How to Order Option ARM 1000 A1 5 01 G 1 1 0.2 MPa setting Note 1) Pressure gauge for 1.0 MPa is used.

ARM10/11

n) + 23 (79 x n) + 25 (188 x n) + 43 (187 x n) + 45 Common IN Individual IN Common IN Individual IN 1 8 1 8 1 4 1 8 1 8 1 8 1 8 1 8 ARM1000 57 ARM2000 136 How to Order Option ARM 1000 A1 5 01 G 1 1 0.2 MPa setting Note 1) Pressure gauge for 1.0 MPa is used.

Compact Pressure Switch Series ZSE2 (For Vacuum)/ISE2 (For Positive Pressure)

8.5 PSE 2 x 3.5 Mounting hole Piping port M5 x 0.8 depth 5 2 x 3.5 Mounting hole Piping port M5 x 0.8 depth 5 13 13 01: R 1/8 T1: NPTF 1/8 01: R 1/8 T1: NPTF 1/8 IS ISG ZSM 785

SV

n1 + 53 L4 = L3 + 81 + 21 x n2 L5 = (L1L4)/2 L6 = 10.5 x n1 + 42 L7 = 21 x n2 + 81 B A B A B A B A Dimensions are the ones for SV1300--.

HRX-OM-X084

When a notice for maintenance is generated, "X" is displayed on the display panel. Table 5.4-1 shows the contents of the notice for maintenance number. X is displayed if a maintenance notification has occurred. RUN Table 5.4-1 Notice for maintenance list Contents No. Generation time Notice for pump maintenance MT.01 Cumulative operation time: It occurs at 20,000 hours.

SYJA300

ported: SYJA72-01(-F) 1/8,1/4 (A port) 2 x 3.2 (For manifold mounting) 25 25.5 SYA 12 SYJA 13 1.5 A 1 M5 x 0.8 (Pilot port) 23.5 11 VZA (Bracket) 48.7 VFA Manual override M5 x 0.8 (Pilot port) 2 x 4.5 (For mounting) 2 x 4.3 (For mounting) (External pilot port) (For solenoid valve) VFRA Manual override 2 x M4 x 0.7 (Mounting screw) 23.5 2 x 3.2 (For mounting) 11 VA A 1 (44) (36) 28 18 27 34

CNG

0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 141 (149) 11 11 88 15 (16) 23 5.5 3 12 30 M6 x 0.75 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 151 (159) 11 11 98 15 (16) 25 6 3 12 25 M8 x 1.0 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 Rc 1/8 26.5 2.5 73 154 (162) 11 10 (11) 99 15 (16) 28.5 6 3 12 20 M10 x 1.25 M6 x 1 depth 12 6 14 M14 x 1.5 44 Rc 1/8 28 2.5 81 169 (

125

9.8)/Theoretical output) x 100% VEX VEX Conditions System Solenoid valve Speed controller Silencer Tubing diameter x Length A VEX31 22-02 AS4000-02 AN20-02 10 x 1 m B 12 x 1 m C VEX33 42-03 04 AS420-03 AN30-03 12 x 1 m D AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air operated Pilot solenoid VEX3 B 12 0 01 1 Air operated VEX3 D B 5 1 12

VDW

174.5 192 2 stns. x 1 Manifold composition 3 stns. x 1 2 stns. x 2 2stns. + 3stns. 3 stns. x 2 3 stns. x 3 2 stns. x 2 + 3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 Note) Manifold base is consisted of the junction of 2 and 3 station bases.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

-m-L3m-mmm : 0 x 00016F (367) PF2M701-m-L4m-mmm : 0 x 000170 (368) PF2M725-m-Lm-mmm : 0 x 00017D (381) PF2M725-m-L2m-mmm : 0 x 00017E (382) PF2M725-m-L3m-mmm : 0 x 00017F (383) PF2M725-m-L4m-mmm : 0 x 000180 (384) PF2M702-m-Lm-mmm : 0 x 000171 (369) PF2M702-m-L2m-mmm : 0 x 000172 (370) PF2M702-m-L3m-mmm : 0 x 000173 (371) PF2M702-m-L4m-mmm : 0 x 000174 (372) PF2M750-m-Lm-mmm : 0 x 000181

EXxx-OMU0020CN

Valve diagnostics 1 . 5-4 Valve diagnostics 1 Bit 0 Valve 0, 1 diagnostics 01() 1 Valve 2, 3 diagnostics 01() 2 Valve 4, 5 diagnostics 01() 3 Valve 6, 7 diagnostics 01() 4 Valve 8, 9 diagnostics 01() 5 Valve 10, 11 diagnostics 01() 6 Valve 12, 13 diagnostics 01() 7 Valve 14, 15 diagnostics 01() 5.1.1.4.

3 Port Air Operated Valve Series SYJA300 1

x 0.5 (Mounting screw) M5 x 0.8 (P, A, R port) 44.5 1.8 (Breathing hole) With filter (80 mesh) 8.5 P R 6 1 1 .5 11 17 9 1.8 (Breathing hole) (P, A, R port) 1/8 42 With filter (80 mesh) Series SYJA700 Base mounted: SYJA74-01 02 Body ported: SYJA72-01 (-F) 2-3.2 25 25.5 (For manifold mounting) 12 1.5 13 A 18 1 23.5 11 M5 x 0.8 48.7 (Bracket) (Pilot port) (Pilot port) 2-3.2 M5 x 0.8 (For mounting

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

0.7 depth 7 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 16 M10 x 1.5 depth 16 M10 x 1.5 depth 22 M12 x 1.75 depth 22 12 12 12 13 14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 77 77 79 87 102 102 122 122 18 22 22 30 35 35 40 40 13 17 17 19 27 27 32 41 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 24 29 35.5 44 55 69 80 100 1

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

With One-touch fitting Port size For low speed control M5 U10/32 01 02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT N Needle Valve/Flow Characteristics AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa

42

The load ratio is obtained by the following formula: ((Load mass x 9.8)/Theoretical output) x 100% Conditions MB, CA2 series CS1, CS2 series Series Condition 10A x 1 m SGP (Steel pipe) dia. x Length VQ4100--03 VQ4101--03 AS420-03 Speed controller AN30-03 Silencer 10A x 1 m SGP (Steel pipe) dia. x Length VQ5100--04 VQ5101--04 AS420-04 Speed controller AN40-04 Silencer 448 INDEX Page 446 Base

CG1

Description 25 32 40 50 63 80 100 Piston seal NBR PDU-20Z PDU-8Z PDU-10Z PDU-12LZ PDU-16Z PDU-25Z PDU-30Z u Rod seal NBR GY-20 X 11 X 4 GY-25 X 16 X 4 GY-32 X 21 X 5 GY-40 X 28 X 5 GY-50 X 38 X 5 GY-63 X 51 X 5 GY-80 X 66 X 6 GY-100 X 86 X 6 i Tube gasket NBR CM-020-16-123 CM-025-16-124 CM-032-16-126 CM-040-16-127 CM-050-16-128 CM-063-16-129 CM-080-16-152 CM-100-16-153 o Back up O ring NBR

ZSE2/ISE2

0.8 depth 5 Piping port M5 x 0.8 depth 5 13 01: R 1/8 T1: NPTF 1/8 01: R 1/8 T1: NPTF 1/8 IF Data 16-6-13

0.4

Load factor: ((Load mass x 9.8)/Theoretical force) x 100% Conditions Series Conditions CJ2 series CM2 series MB, CA2 series T0604 (O.D. 6/I.D. 4) x 1 m Tube x Length VQC1101 Speed controller AS3002F-06 AN15-C08 Silencer T0806 (O.D. 8/I.D. 6) x 1 m Tube x Length VQC2101 Speed controller AS3002F-08 AN20-C10 Silencer 542 I N D E X P.538 P.540 P.542 P.544 P.550 P.556 Features Variations Cylinder

Miniature Regulator

thread) Air 1.2 MPa 0.8 MPa Standard: 0.2 to 0.7 MPa, Low pressure use (0.2 MPa setting): 0.05 to 0.2 MPa 5 to 60C (No freezing) Relieving type 0.065 Ambient and operating temperature range Construction Weight (kg) Model Port size IN Model OUT ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R1/8, M5 x 0.8 NPT1/8, M5 x 0.8 Rc 1/8 Symbol NPT 1/8 4 One-touch

JXCx-OMX0009

The station No. of CC-Link is shown. (01 to 64) Set the CC-Link communication speed. STATION NO. Switch name Set range Description STATION NO. (X10) Set upper bits of the station. 01 to 64 STATION NO. (X1) Set lower bits of the station. The CC-Link address setting at the time of the factory shipment is set in 01".