Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: N7H (One-touch Fitting ø1/4", Straight Type), Option 1: L (Lead Wire w/Connector, 2m), Option 2: D (Panel Mount Adapter + Front Protection Cover), Option 3: K (Operation Manual, Calibration Certificate)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: C4L (One-touch Fitting ø4mm, Elbow Type), Option 1: L (Lead Wire w/Connector, 2m), Option 2: B (Panel Mount Adapter)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A2 (Bracket B, Horizontal Mounting)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: N7H (One-touch Fitting ø1/4", Straight Type), Option 1: L (Lead Wire w/Connector, 2m)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m), Option 2: D (Panel Mount Adapter + Front Protection Cover)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: C4L (One-touch Fitting ø4mm, Elbow Type), Option 1: L (Lead Wire w/Connector, 2m)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: N01 (NPT 1/8), Option 1: w/o Lead Wire, Option 2: None, Option 3: T (w/o Operation Manual, Calibration Certificate)

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T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

on option V, M (non-leak, medium vacuum) Note) Dew point temperature: 10C or less 15 16 Direct Operated 2 Port Solenoid Valve Series VX21/22/23 For Air/Single Unit How to Order (Single Unit) VX 2 0 21 01 VX 2 2 21 01 1 G 1 G 1 1 Normally Closed (N.C.)

Rubber seal 5 Port Solenoid Valve Series SYJ5000

[76.6] 45 50.1 [57.1] + 54.2 34.7 31.5 6 8.5 21.5 6 43.9 32 24 15 17 17 1/8 (P, R port) 45.5 L plug connector (L): SYJ5240-L-01 M plug connector (M): SYJ5240-M-01 DIN terminal (D): SYJ5240-D-01 M8 connector (W0): SYJ5240-W0-01 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 125.2 Max. 10 75.4 50.1 [57.1] 64.1 34.7 54.6 49 M8 x 1 37.1 61.2 [68.2] Approx. 300 (Lead wire

OMU0023

Instruction to perform the Return to Origin operation 4 01 05 001A FF00 01 05 001A FF00 sent. 5 01 02 004B 0001 01 02 01 Acquires the INP signal information.

IIIIIII

F O F ' 14 33 lbs (6 5 kg) T T 1 2 " '75 PSIG (5 Kgf/cm2) A B c D E F G H J K il 6.97 (1771 6.26 (159) 5.98 (1521 2.13 154) 2.91 (74\ 2.O9 (53) 2.76 (70) 0.63 (16) (1e) 0.75 0.43 ( 1 1 ) 1.24 131.5 Millimeters in Parentheses MECHANICAL VALVES DIMENSIONS Series NVM NVM220-N02-01 230-N02-01 230-N02-02 F O F , I 529 lbs (2+kg) F O F 4,85 lbs (2 2ko ) P T 2 7 6 i n ( 7 m m ) O T 0 197 in (smm

Mechanical Valves Series NVM, NVFM, NVZNI

F O F ' 14 33 lbs (6 5 kg) T T 1 2 " '75 PSIG (5 Kgf/cm2) A B c D E F G H J K il 6.97 (1771 6.26 (159) 5.98 (1521 2.13 154) 2.91 (74\ 2.O9 (53) 2.76 (70) 0.63 (16) (1e) 0.75 0.43 ( 1 1 ) 1.24 131.5 Millimeters in Parentheses MECHANICAL VALVES DIMENSIONS Series NVM NVM220-N02-01 230-N02-01 230-N02-02 F O F , I 529 lbs (2+kg) F O F 4,85 lbs (2 2ko ) P T 2 7 6 i n ( 7 m m ) O T 0 197 in (smm

LEC-OM02704CN

) PD20 (LSP)(LSN)OFF PD20 PD20 (LSP)(LSN) 0 1 2 3 (LSP) (LSN) 0() 1() 2() 3() PD20 0 S S S S () 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L O F F L S N S N 1 S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F O F F L L S N S N 2 S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L S N O F F L S N 3 S S S S S S S 0 r / m i n 0 r / m

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Approx. 600 (Lead wire length) 31.5 [38.5] 70.6 [72.8] (Light/surge voltage suppressor) 2-3.2 (For mounting) 23.5 10.9 74.2 [76.4] + 28 25 16.1 21 31.5 [38.5] 18 10 (Bracket) 3.6 1/8 (P, R port) R P 28 8 1.6 (PE port) 14.5 16 L plug connector (L): SYJ72-L-01 (-F) M plug connector (M): SYJ72-M-01 (-F) DIN terminal (D): SYJ72-D-01 (-F) M8 connector (M0): SYJ72-W0-01 (-F) Approx. 300 (Lead wire

CLA

X1US nol available v.ith lube type or Rear flan e G iron tube N Non-lube Single clevIs C D Double clevis Number of auto switch F Iron Lube 'Not available on Xl US T Center trunnion 20es Bore size 3 3 pes n n pes 40mm 50mm 40 50 Cylinder stroke (mm) 63mm 63 Applicable Auto Switch Please refer to page 7 for standard stroke. eo BOm m -Refer 10 table below lor selec1'0f1 01 aWlcable auto sWllch

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

VS 8-2/VS 8-4

1) x 19 52 3 U side D side n Station number 4 5 2 1 Indicator light L2 45 L1 45 (n-1) x 19 45 88 15 19 2 2 Manual override 152 (Double dual 3-port) 133 118 (Single) 165(3-position) 6.5 112 99 Circular connector cable assembly AXT100-MC26-015 :1.5 m AXT100-MC26-030 :3.0 m AXT100-MC26-050 :5.0 m 4 x M5 mounting holes Formula: L1 = 19n + 71, L2 = 19n + 123 n: Stations (Maximum 16 stations) Dimension

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

I J K L M N O P Misc.

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L D-A73 (Example) 20Lead wire length Data 5 m None Nil L 0.5 m 3 m Z N Applicable for the connector type (D-C) only.