2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

0 kPa 50 kPa 50 kPa 4 70 kPa 2 0 0 0.2 0.6 0.4 0.8 1.0 Flow [L/min] Flow [L/min] PF2M705(-L) 5 L/min PF2M710(-L) 10 L/min 10 20 Pressure loss [kPa] Pressure loss [kPa] 350 kPa 750 kPa 8 30 kPa 15 350 kPa 70 kPa 750 kPa 50 kPa 6 0 kPa 10 4 30 kPa 50 kPa 5 2 70 kPa 0 kPa 0 0 2 4 6 8 10 0 0 1.0 3.0 2.0 4.0 5.0 Flow [L/min] Flow [L/min] PF2M725(-L) 25 L/min PF2M750(-L) 50 L/min 40 30 25 20 15

RSH/RS1H

of transfer Cylinder stroke Bore size Port 15mm (RSH20) 20mm (RSH32) 20mm 32mm 20 32 15 20 20 32 Z73 D L RSH RS1H 30 50 Z73 D L Bore size Number of auto switches 50mm 63mm 80mm 50 63 80 Thread type Nil S 2 pcs. 1 pc.

RSH/RS1H

Q G 50 12(10.5) 22 22 13.5 22 6 63 15.5(14) 24.5 24.5 17 24.5 9.5 RS H A 80 22(20.5) 37 37 23.5 37 16 The values inside ( ) are for D-Z73.

39

6Hexagon socket head cap screw wStopper bolt @1Seal washer rBumper @2Bumper stopper 50 CKZ3N-S050W Note 1) 63 CKZ3N-S063W Note 1) Table 1 50 CKZ3N-B050 Note 2) Opening angle Code J H G F E D C B A Stopper bolt kits 15 30 45 60 75 90 105 120 135 63 CKZ3N-B063 Note 2) tRubber cover !7Spacer !8Short head cap screw 50 CKZ2N-T050 63 CKZ2N-T063 Top cover kits 50 yMetal cover !

MHK2

Note) Be careful for the hysteresis of 2-color indication type D-F9BAL. Refer to Auto Switch Hysteresis on page 12-6-16.

MHK2

Note) Be careful for the hysteresis of 2-color indication type D-F9BAL. Refer to Auto Switch Hysteresis on page 12-6-16.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 14 (2, 4 port) 112 93 12 Y 25 (14 port) PE port 5 3 37 25 22 14 1 25 25 9 1/8 12 port 3/8-2 port 3, 5 port 1/4, 3/8 1 port 14 port 1/8 1/4, 3/8-2 port 2, 4 port EVS7-6-FG-D-M0 EVS7-6-F G-D-M0 H J I 186 196 89 89 13 (4 port) 50 50 13 (2 port) 13 (4 port) 50 50 13

Speed Controller with One-touch Fitting

Refer to back page 50 for Safety Instructions, pages 543 to 546 for Flow Control Equipment Precautions, and pages 573 to 575 for Specific Product Precautions. Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

VCC

Indication of A B C D E F G T VCKH1209-02F VCKH1008-02F VCKH1075-02F VCKH0806-02F VCKH0604-02F 12/9 13 38.5 10 19 17 18.5 9 to 12 Nm 10/8 11 38 9 17 17 18.5 6 to 9 Nm 1075 11 38 9 17 17 18.5 6 to 9 Nm 8/6 9 36.5 8 14 14 16 4 to 9 Nm 6/4 7 36.5 8 12 14 15 3 to 8 Nm VCKK 40 swivel elbow 40 B A 10 Approx. F D Width across flats 14 Tightening torque: Tighten within 10 1 Nm. Approx.

Pin Clamp Cylinder Series CKQ/CLKQ

more 22 or more 17 or more 54 or more 52 or more Auto Switch Mounting Height Atmosphere General use Mounting Rail mounting Rail mounting Welding Direct mounting D-A7 D-A80 D-A7H D-A80H D-F7BAL D-F7W D-J79W D-F7NTL D-F79F D-F7D-J79 D-F7WV D-F7BAVL D-F7V D-A9V D-F9WV D-F9V D-M9V D-A79W D-A73C D-A80C D-J79C D-F9BAL D-P5DWL D-P5DWSC Model U 43.5 C(L)KQ 41 42 48 44.5 47.5 36.5 38.5 36 50 Rail

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

D-Y69A, D-Y69B, D-Y7PV D-Y7NWV, D-Y7PWV, D-Y7BWV ( ) MY1CW 25, 32, 40, 50, 63 B A Solid state switch D-Y59 , D-Y69 , D-Y7P(V) D-Y7NW(V), D-Y7PW(V), D-Y7BW(V) A B A B Reed switch D-Z73, D-Z76, D-Z80 D-Y7BAL 63 50 40 32 25 Mounting position 40 32 25 Mounting position 25 Mounting position 32 40 50 63 A 323.5 278.5 157.5 127.5 97.5 157.5 127.5 97.5 97.5 127.5 157.5 278.5 323.5 A A B 136.5 121.5

LX Series Compact Electric Actuators

: LXF: LXFH5BD 30 Screw LXFH5SA 30 Slide LXFH5SB 20 I LXP82BC 60 50 220 Linear ball bearing LXP82BD 60 50 90 Ball Screw 60 50 160 6 0 ' .

Heavy Duty Stopper Cylinder Series RSH/RS1H

Note 2) The figure shows an extended piston rod. 7 Heavy Duty Stopper Cylinder Series RSH/RS1H Auto Switch Proper Mounting Position Auto switch B A Auto switch proper mounting position D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W Auto switch models D-Y69 D-Y7PV D-Y7WV D-Y7BAL Bore size (mm) A B A B A B 20 8(6.5) 18 18 9.5 18 2 32 10.5(9) 13.5 13.5 12 13.5 4.5 50 12(10.5) 22 22 13.5 22 6 63 15.5(14) 24.5

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

MHR3-10R/MDHR3-10 MHR3-10R/MDHR3-10 10 10 Pressure 0.6 MPa Pressure 0.6 MPa 8 8 Gripping force (N) Gripping force (N) 0.5 MPa 0.5 MPa 6 6 0.4 MPa External grip 0.4 MPa 4 4 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 2 2 0 10 20 30 40 50 0 10 20 30 40 50 L Gripping point L (mm) Gripping point L (mm) Internal grip MHR3-15R/MDHR3-15 MHR3-15R/MDHR3-15 20 20 Pressure Pressure 0.6 MPa 0.6 MPa Gripping force

LEF-OM002xx

Bolts Size Belt Belt tension Part number (N) LEF16 LE-D-6-1 9.8 pull LEF25 LE-D-6-2 19.6 LEF32 LE-D-6-3 49.0 LEF40 LE-D-6-4 98.1 Bolts Size Tightening torque 6.Motor cover is installed. (Only "With motor cover") (Nm) M2.5 0.3610% M3 0.6310% M4 1.510% M5 310% The fingernail of "Grommet" is inserted in the hole of "Pulley box". Grommet 43 - 7.

Pin Clamp Cylinders

workpiece C D d K SR Q Model number Hole diameter of workpiece C D d K SR Q Model number Hole diameter of workpiece C D d K SR Q Model number 115 11.6 116 11.7 117 11.8 118 11.9 119 12.0 120 155 15.6 156 15.7 157 15.8 158 15.9 159 16.0 160 7.5 075 7.6 076 7.7 077 7.8 078 7.9 079 8.0 080 11.5 15.5 8 6 20 12 8.5 20 16 11.5 25 3.5 3.5 5 5 10.9 6 6.5 14.3 8.5 085 8.6 086 8.7 087 8.8 088 8.9

Profile Design ISO/VDMA Air Cylinder Series CP95

D C d H B 32 40 50, 63 80 100 16.5 21 26 31 39 19.6 25.4 31.2 37.0 47.3 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 6 8 11 13 16 17 22 27 32 41 NT-03 NT-04 NT-05 NT-08 NT-10 Piston rod ball joint KJ (DIN 648) Zinc chromate plated steel Bore d3 Order No. d1 h d6 b3 b1 l d7 l3 sw 32 M10x1.25 KJ10D 10 43 28 10.5 14 20 19 13 14 17 40 M12x1.25 KJ12D 12 50 32 12 16 22 22 13 16 19 50/63

SQ1000/2000

-10A-3 (1 set) Stations 1 2 3 4 5 6 7 8 9 U side 3m SQ1000-10A-3 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 D-sub connector cable AXT100-DS25-030 Cylinder port fitting C6: 6 One-touch fitting D side Manifold base (9 stations) SS5Q13-09FD2-D F kit (D-sub connector kit) SS5Q13-09FD2-D . 1 set: F kit 9 station manifold base SQ1130-5-C6 .

ZPT/ZPX

F 4-9.5 F 4-8 4-6 3-6.5 4-5 G 3-4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37

Prevents Micro-Bubbles

) 114 VXA 53 VN 43 63 LVC LVA LVH LVD LQ-GM LQ-GL LVQ LQ 50 LVN 50 207 85 TI/ TIL 342 85 LQ-GL 40 28 PA SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112 17-5-37 35 Series LV Fitting Assembly Procedure Assemble fittings following the procedure shown below.