High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

A Work load [kg] Work load [kg] LEJ LEJ 40 Lead 20: LEJS63A Lead 16: LEJS40A Lead 30: LEJS63H 30 Lead 24: LEJS40H LEL A 20 A LEM 10 A A 0 LEY 0 200 400 600 800 1000 1200 1400 1600 1800 0 200 400 600 800 1000 1200 1400 1600 1800 Speed [mm/s] Speed [mm/s] LES Vertical Vertical LEPY LEPS 10 20 Lead 10: LEJS63B Lead 8: LEJS40B A Area where the regeneration option is required.

HRX-OM-I051

L Approx.16 (4.2 [gal]) Approx.17 (4.5[gal]) Circulating fluid port Rc 3/4 Facility water C /MPa 10 to 25 / 0.3 to 0.7 (45 to 100 [PSIG]) Required flow of facility water*9 (50Hz/60Hz) L/min 5/5 6/6 15/22 18/23 (1.3/1.3[gal/min]) (1.6/1.6[gal/min]) (4.0/5.8[gal/min]) (4.8/6.0[gal/min]) Facility water port Rc 1/2 Power supply 3-phase 50/60Hz AC200/200 to 208V10% Main breaker size A 30 60 W415D1080

MXF

For details, refer to page 8-30-31. 8-6-14

Slide Unit Series CX2/CXWM/CXWL

Plate mounting 2.5 2.5 3 Since the operating range is provided as a guideline including hysteresis, it cannot be guaranteed (assuming approximately 30% dispersion).

Slide Unit Series CX2/CXWM/CXWL

Plate mounting 2.5 2.5 3 Since the operating range is provided as a guideline including hysteresis, it cannot be guaranteed (assuming approximately 30% dispersion).

Compact Slide Series MXH

24 4 20 25 30 62 4 30 30 30 30 62 4 40 20 72 45 20 6 50 82 55 25 6 25 60 60 92 6 30 30 D-X Individual -X 25 Series MXH Dimensions: 10 LT 11 19 11 LA LB J x M4 x 0.7 Depth 8 3 x M5 x 0.8 through Bottom hole dia 4.3 6 x 7.5 counterbore depth 4.4 Plug for port (Hexagon socket head set screw) 4 x M5 x 0.8 x 4 l 2 x M5 x 0.8 Guide rail width 7 4 x M4 x 0.7 Depth 7.5 4 x M4 x 0.7 Depth 6 23

MXH Series Compact Slide

4 25 62 30 30 4 30 62 30 4 30 40 45 72 6 20 20 50 55 25 25 82 6 60 30 92 60 30 6 33 MXH Series Compact Slide Dimensions 10 LT (mm) 11 19 11 LA LB J-M4 x 0.7 Depth 8 3-M5 x 0.8 through Bottom hole dia. 4.3 6-7.5 counter bore depth 4.4 Plug for port (hexagon socket head set screw) 4-M5 x 0.8 x 4l 2-M5 x 0.8 Guide rail width 7 4-M4 x 0.7 Depth 7.5 4-M4 x 0.7 Depth 6 23 5 13 8 18 21.5 46 47

Bernoulli Gripper

Body Mounting Model Body material Screw size Max. screw-in depth [mm] Tightening torque [Nm] ZNC(20, 30) Aluminum 0.63 ZNC(20, 30)P Resin 0.32 ZNC(20, 30)S Stainless steel 0.63 ZNC(40, 60) Aluminum No restraining force in the horizontal direction Restrain horizontal movement with a guide. M3 x 0.5 6 2.

90

No. 3 4 5 6 7 8 9 Note) When ordering a manifold ZZK2---A on page 3, q to e are delivered as a set.

Compact Type Dual-Rod Cylinder Series CXSJ

Weight Unit: g Auto Switch Internal Circuit D-A90(V) Contact protection box OUT () Brown Reed switch CD-P11 OUT () Blue CD-P12 D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V Model Lead wire length: 0.5 m 6 6 6 6 8 8 D-A93(V) 30 30 30 30 41 41 Lead wire length: 3 m LED Brown Contact protection box D-A90, D-A93, D-A96 Dimensions OUT (+) Brown Resistor Reed switch Zener diode CD-P11 CD-P12 OUT () Blue

LEF-OM002xx

500 600 V(mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 Vertical Transfer 12 50 B B B 20 A 10 A A 40 H W(kg) W(kg) H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500 600 0 100

PFxx-OMA1007

to "AMS20/30/40/60A-R/N/F#D" for dimensions other than "A" and "F".

240

NS 14 14 24 24 30 30 45 55 60 LT 42 42 52 52 62 62 72 82 92 LB 20 25 30 LA 10 10 20 20 30 30 20 25 30 J 4 4 4 4 4 4 6 6 6 Stroke (mm) 5 10 15 20 25 30 40 50 60 24 Compact Slide MXH Series Dimensions: 10 LT MXH MXH 19 11 MXS MXQ 11 LA LB J x M4 x 0.7 Depth 6 MXQ 3 x M5 x 0.8 through Pilot hole dia 4.3 2 x 3 x 7.5 counterbore depth 4.4 MXF 2 x 2 x M5 x 0.8 Cylinder port (With plug for port)

25

A 13 15 22 06 08 10 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 End bracket/IZS40-BE 35 22 4.5 30 18 2 x 5.4 105 33 L 33 Intermediate bracket/IZS40-BM 55 35 22 4.5 36 30 18 2 x 5.4 A 105 33 A A-A section 431 IZS40/41/42 Series Dimensions Ionizer/IZS41, 42 30 44 304 6.8 30 85 9 60 50 A 60 x (n-1) L n (Number of emitter cartridges), L Dimension L (mm) IZS4-340 IZS4-400 IZS4-460 IZS4

Floating Joint

JB140-22-250 JB160-24-300 12 16 20 25 32, 40 50, 63 80 100 125, 140 160 3 4 5 6 8 10 16 20 22 24 3 4.5 5 6 8.5 10 16 21 17 20 4 6 6.5 8 11 13 20 26 22 26 16 16 21 24 31 41 50 59.5 79 96 2 2 4.5 5 6 7.5 9.5 11.5 14 16 6 6 7 8 11 14 19 24 30 36 5 5 7 8 11 13.5 16 20 22 24 10 10 13 17 22 27 32 41 46 55 13 15 19.5 22.5 29 35.5 47.5 59 71.5 83 0.02 0.02 0.04 0.07 0.15 0.29 0.56 1.04 2.6 4.5 0.5

10

hole DIN terminal Conduit terminal S Q F Cable 6 to 12 Q2 S2 F D G1/2 (44) 31.5 32 25 Y T R E C R C G1/2 (1.5) (1.5) Y E B1 B A A B1 B 2 x P Port size 2 x P Port size U W M U W M 2 x 5.3 Mounting hole X 2 x 5.3 Mounting hole X (mm) Mounting bracket dimensions Port size P Size A B B1 C D E F M 12.8 19 19 U 46 56 56 W 36 46 46 X 11 13 13 Y 6 7 7 1 2 19 24 24 30 43 45 45 50 21 22.5 22.5

MQQ

Dimensions Foot style: MQMLL 6 25 14 33 42 18.5 2.3 6 9 2-5.5 66 + Stroke 75 + Stroke 93.5 + Stroke RE A B REC 10, 16, 20, 25 CX CY LY LH MQQ M X X Y Y LX LZ Z 4-LC S + Stroke LS + Stroke ZZ + Stroke LT RHC MK(2) RS Q G RS H A Bore size (mm) LC LH LS LT LX LY Z ZZ X S LZ Y RZQ 10 5.5 14 83 2.3 33 25 19 108 6 65 42 9 16 5.5 18 92 2.3 42 30 21 119 6 74 54 9 MI W S 20 6.8 25 137.5 3.2 40 40

MQQ

(Except clevis style) B L F G C (1) MK(2) 20 15, 30, 45, 60, 75, 100 25 15, 30, 45, 60, 75, 100 RS Q G Dealing with the stroke by the 1 mm interval is available by installing a spacer with the standard stroke cylinder. RS H A Function D (2) Nil HNote) Standard type High speed/High frequency type (Without fixed orifice) RZQ Note) Except 6 mm bore size.

5 Port Solenoid Valve

010 050 Straight connector type Angle connector type M12 14.9 M12 6 6 5 1 2 1 2 28.3 5 4 3 4 3 48 34 18 30 5 31.3 30 5 Socket connector pin arrangement Socket connector pin arrangement 50 L 50 L A code A code 14.8 SPEEDCON 44.5 L 50 2 1 5 PCA 1401804 Cable length (L) 1500 [mm] 3000 [mm] 5000 [mm] 4 3 M12 SPEEDCON 5.00.15 5.00.15 1401804 1401805 1401806 Socket connector pin arrangement A code

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

1 #6 !0 yoiu@2%0%1q%3e !6!7!8#8!9@0 !3 CX MY2C16 @9 D%6 -X !4 #1@3@9 !5@8 @7 %5!2%4$2$4$5 @4 #0 Section A-A' 20A Data A' $0 $1 #4 #5 #2 @1 $6 $3 Component Parts No. Description Cam follower cap Magnet Magnet Seal magnet Rail End spacer Square nut Square nut Spring pin Parallel pin No.