Vacuum System Peripherals:

S U D side D U side 2 to 10 stations B Special specifications M 2 to 20 stations Both sides Made to order. When using both types, specify C4 and C6 specifically; do not just use X marking.

Hydraulic Filters

G E H INLET X OUTLET X' INLET OUTLET OUTLET INLET 10 G40 SSA32 Differential pressure indication switch Differential pressure indicator 12 Bracket mounting base port size 10 to 24 G50 SSA40 Bracket mounting base port size 03 to 08 D D J J' 16 G60 SSA50 X X' X X' J 20 24 G75 G85 SSA65 SSA80 2 x K depth L 4 x K depth L DRAIN Note) The companion flange mounting base conforms to JIS B 2291 (21

•

L RR,IU1 E, A, L, t MM NX Part no A2 NDHIO boreSlzc Dl!:;;I~ '!I!

LEC-OM071xx

D i s p l a y a n d SigmaWin+TM 2.

Fluoropolymer Piping Equipment

B E E F G H L L M Min. port size 2 x B L, L LQ3T11 4 3.5 10 9 4.8 9.5 11 28.5 27.5 14 2.5 LQ3T12 3 2 LQ3T21 6 4 17 16 6 12 16 34.5 33.5 20 4 LQ3T31 10 5 22.5 19.5 9 18 21 47.5 44.5 25 7.5 LQ3T32 8 6.4 LQ3T41 12 6 24 22 10 20 24 52.5 50.5 29 9.5 LQ3T51 19 7 26.5 24 14 28 32 64 61.5 37 16 LQ3T61 25 8 30 26 18 36 41 78 74 49 22 M (E, E) (E, E) G H L, L L, L (E,E): Reference dimension for the

CLQ

Minimum Stroke For Auto Switch Mounting (mm) D-A7 D-A80 D-A73C D-A80C D-A9V D-A7H D-A80H D-F7 D-J79 D-F9W D-F7W D-J79W D-F7BAL D-F79F D-F9BAL D-F7WV D-F9WV D-F7BAVL D-F7V D-J79C D-M9V No. of auto switches mounted D-A9 D-M9 D-A79W 1 pc. 2 pcs. 5 5 5 10 10 15 15 15 15 20 20 20 10 10 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

VFS

1 AXT625-2A-20 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

LEC-OM069xx

D i s p l a y a n d SigmaWin+TM 2.

CV/MVGQ

CC Clevis Pin Rod End Nut Knuckle Pin RB J D-X 20Material: Carbon steel Material: Carbon steel Material: Rolled steel d (Drill through) Applicable plain washer Applicable plain washer Applicable bore size (mm) 50 63 80 100 Applicable bore size (mm) Applicable bore size (mm) 40 50, 63 80 100 Applicable cotter pin Applicable cotter pin l l d Dd9 L Dd9 L B C m m d H D Part no. Part no.

Auto Switch Guide

Add -61 at th end of the part number for the flexible lead wire except D-Y59, D-Y69, DY7 and D-M9/M9V type auto switches. L D-A73 (Example) 20Lead wire length Data 5 m None Nil L 0.5 m 3 m Z N Applicable for the connector type (D-C) only.

Large Size Vacuum Module: Series ZR

Example) ZR100-K15MZ-EC (-Q) . 1 pc. 3 L 38 ZS VJ10-20-4A-6 . 3 pcs.

Precautions 1

Rod End Nut (mm) Trunnion Nut (mm) Mounting Nut (mm) H Material: Carbon steel Material: Carbon steel Material: Carbon steel d d B D D C C C D H B H B d Applicable bore size 20 25, 32 40 Applicable bore size 20 25, 32 40 Applicable bore size 20 25, 32 40 B C D d H D d H C B d H B C D Part no. NT-02 NT-03 NT-04 Part no.

Series IDG

Outlet air atmospheric pressure dew point C P1 = 0.5MPa P1 = 0.5MPa 10 10 20 20 P1 = 0.7MPa P1 = 0.7MPa 30 30 40 40 0 40 80 120 160 20 40 60 80 0 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG20 IDG30 P1 = 0.3MPa P1 = 0.3MPa 0 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C P1 = 0.5MPa 10 P1 = 0.5MPa 10 P1 = 0.7MPa 20 20 P1

C95

20 Y7BAL 20 + 45 (n 2)/2 20 + 45 (n 2)/2 n n = 2, 4, 6, 8 n = 2, 4, 6, 8 1, 2 15 20 P5DWL 15 + 65 (n 2)/2 20 + 65 (n 2)/2 n n = 2, 4, 6, 8 n = 2, 4, 6, 8 6-12-25 Series C95N Auto Switch Mounting Position and Mounting Height [First angle projection] Hs A B Ht Auto Switch Mounting Position D-F5, D-F5W D-J5, D-J59W D-F59F, D-F5BAL D-Z7, D-Y59, D-Y7BAL D-Z80, D-Y69, D-Y7W(V) D-Y7P(V) D-A5

EX120/121/122

EX510-VSS EX510-VSQ L 20 20 L 20 20 2.8 2.8 B C A How to Order EX510-V + 10 S S EX510-VWS EX510-VWQ Output Valve connector L 20 20 L 20 20 S W 1 point 2 points Nil S Q None For SY, SYJ series For VQ, VQZ series Note) Cable length (L) 2.8 2.8 10 30 1 m 3 m B C A + Note) VQ is compatible with the positive common only.

New

port R S (32) U G1/2 L L G1/2 H E H E U F F 2 P 2 P G G Port size Port size Faston terminal A B C D K J I 1/4 Exhaust port 11 Q R S 12.5 L H E U F G 2 P Port size Dimensions (mm) Model Port size P A B C D E F G H I J K L S VXF24A< 80 118 23.5 62.5 39 16.5 30 2 136 112 112 78 185 40 Conduit terminal Conduit Faston terminal Model Q R U T Q R 99.5 20 169 68.5 47.5 20 VXF24A< Q R U 169 23

Clamp Cylinder with Lock

pin hole 3 x 38 l 19 17 30 30 17 20 20 2 x M6 thread depth 11 (for IA type) 2 x M6 thread depth 11 (for YA type) 15 15 35 18 15 2 x M6 thread depth 11 (for YA type) 2 x M6 thread depth 11 (for IA type) 20 20 17 17 40 A 20 20 19.5 0.2 0.5 15 45 60 25 45 60 A Part no.

Compact Cylinder with Air Cushion Series RQ

Knuckle Pin (common with double clevis pin) Rod End Nut d d Dd9 C m l L t m t H B Material: Carbon steel mm Material: Rolled steel mm Part no. Applicable bore size (mm) 20 25 32, 40 50 Applicable bore size (mm) Snap ring l Part no.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

B A C D Non-standard Motors: The following motors will be mounted when a motor mounted type is specified.

CG5-S

Material: SUS440 (pin) SUS304 (snap ring) D C d Dd9 H1 B1 t m t l m L (mm) Part no.