Rotary Table/

Positioning pinhole Counter-clockwise 5 Adjustment bolt A 5 (For counter-clockwise rotation end adjustment) 9 22 e B port g .5 n Adjustment bolt B ra (For clockwise rotation end adjustment) nt e e m is st w u k dj c lo a 0 -c e d C 19 s n i er a w lo A port B port e k dj c c nt o l Clockwise C k n e u u w o st ng o is ti C m e ta ra ro e ro ta nt ti o on n ra e d n n ti g e ta 5 9 ro m u

0.4

B A B A B A B A A A PWR 93.5 COM (35) 64.4 43.2 66 75 (40) series EX500 2 9 SI unit 4 x M4 mounting hole 8 7 6 5 4 3 2 1 n D side Stations U side C8 [3(R) EXH port] C8: 8 One-touch fitting M12 8-pin socket DIN rail clamp screw R R 0 62.5 3 3 60 1 X X 40.5 B B B B B B B B 12 12 22.2 P P 25 1 1 A A A A A A A A 18.5 7.5 9.5 (12) (7.5) M12 8-pin plug C8 [1(P) SUP port] C8: 8 One-touch fitting

3

ZS-40-K ZS-40-L 1 1 1 1 With 4 tapping screws (3 x 8) With 4 tapping screws (3 x 8) For PF3W704/720/504/520 For PF3W740/540 For PF3W711/511 Bracket Note) ZS-40-M ZS-40-A With 4 tapping screws (4 x 10) Lead wire with M8 connector Lead wire length (3 m) Note) For units with flow adjustment valve, 2 brackets are required. 1 Digital Flow Switch for Water Series PF3W 3-color display Refer to Handling

Digital Flow Switch (Integrated display type)

Vinyl chloride piping tube (30 A) ZS-40-U30 30 A Vinyl chloride piping tube 1 pc. 25 A Holding plate ZS-40-U25-A 1 pc., With two hexagon socket head cap screws of M5 x 80. 30 A Holding plate ZS-40-U30-A 1 pc., With two hexagon socket head cap screws of M5 x 65. : Accuracy may vary by 1 to 2%, if vinyl chloride piping tube is replaced. -13No.PF-OMM0005-N Summary of Product parts Body 1 DC(

Vacuum Unit Ejector / Vacuum Pump System

How to Order Single Unit Ejector System ZK2 A 12 K 5 A L A 08 L Vacuum Pump System ZK2 P 00 K 5 A L A 08 L (1) (2) (3) (4) (5) (6) (7) (8) Remains blank when no option is selected. (1) System/Body Type Symbol System Body type Exhaust type A Silencer exhaust B Port exhaust note 2) Single unit G High-noise reduction silencer exhaust Ejector system C Complex exhaust note 3) F Individual port

5 Port Solenoid Valve Series VQZ1000/2000/3000

4 4 4 2 x Rc 1/8, 1/4 2 x one-touch fitting assembly 2 2 2 A A A 17.5 4 (A, B port) Applicable tubing O.D.: 6, 8 B B B 2 A 2 x Rc 1/8, 1/4 2 x one-touch fitting assembly B (A, B port) Applicable tubing O.D.: 6, 8 DIN rail clamp thread 23 P=22 L1 L2 L3 (For C6, C8) ( 9.5) 2 x M4 mounting hole 80 ( 9.5) (For C6, C8) (For C6, C8) 4.5 2 x M6 mounting hole IN IN IN IN 5.5 80 6.5 (40) 69.5 58

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Note 2) Assembly includes a bracket and 2 mounting screws. Note 3) Please consult with SMC regarding the set nuts for the 10-/21-AR50(K)-B and AR60(K)-B. Note 4) in part numbers for a round pressure gauge indicates a type of connection thread. No indication is necessary for R; however, indicate N for NPT.

CV/MVGQ

A H F N S + Stroke ZZ + Stroke M 73.6 l C B K CY h + l ZZ + l + Stroke MQQ M Stroke range Bore size (mm) S A AL B B1 C D E F H1 MM K KA M N HX J (mm) 40 50 63 80 100 RHC 30 35 35 40 40 130.6 133.6 140.6 152.6 159.6 27 32 32 37 37 6 7 7 11 11 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 60 70 86 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 8 11 11

2/3 Port Valve

2 2-Rc 3 4 2-Rc1 Model J L K M N O P Q R S T U V M5 X 0.8 Depth 5.5 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 X 8 7 X 0 9 X 2 9 X 2 202.5 232 267 286.5 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B M6 X 1 Depth 6 70 92 109 M8 X 1.25 Depth 6 M8 X 1.25 Depth 6 4.2-34 2 Port Valve for Steam

Basic Type/Direct Mount Type

HB HT HC N X A W K 2 x plug H 2 x P (Piping port) HA CB 4 x counter bore dia.

One-touch Fittings

Triple universal male elbow KQ2VT Union tee P.40 Male elbow P.35 KQ2L Use to three-branch a female thread at right angles. Three individual parts rotate 360. Use to pipe a female thread at right angles. Most general model.

New

Depth 5 H 2 x M Depth 5 G A H i G A 2 x P Port size B1 B b B1 B 2 x P Port size DIN terminal Cable 6 to 12 G1/2 Q F S Bracket mounting hole dimensions D a1 (VXZ23, 25) Note) a a1 (VXZ24, 26) Note) (44) 31.5 6.5 R C E 10.5 IN OUT 2 x M Depth 5 G A H 2 x P Port size B1 B (mm) A B B1 C D E F G Port size P H J M Model 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 35 35 40 40 10.5 14 17 20 22 22 24.5 24.5

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

0.56 0.66 0.70 B 0.56 0.66 0.70 A 1.50 1.81 2.29 A 1.50 1.81 2.29 B 0.48 0.58 0.61 B 0.48 0.58 0.61 A 1.42 1.72 2.21 A 1.42 1.72 2.21 B 0.60 0.70 0.74 B 0.60 0.70 0.74 A 1.54 1.85 2.33 A 1.54 1.85 2.33 B 0.37 0.46 0.50 B 0.37 0.46 0.50 A 1.30 1.61 2.10 A 1.30 1.61 2.10 Bore Bore 075 (3/4") 106 (1 1/16") 150 (1 1/2") 075 (3/4") 106 (1 1/16") 150 (1 1/2") Mounting Height (NCDM) (in) D-C7 D-C80

Series 10-, 21- AW-B Filter Regulator

Note 5) Assembly of a bracket and set nuts (10-/21-AW20(K)-B to AW40(K)-B) Including 2 mounting screws for the 10-/21-AW60(K)-B Note 6) The only difference from the standard specifications is the adjusting spring for the regulator. It does not restrict the setting of 0.2 MPa or more. When the pressure gauge is attached, a 0.4 MPa pressure gauge will be fitted.

Modular Type Air Filter Series AF

Note 3) Bowl assembly for AF30 to 60 models comes with a bowl guard (steel band material). 26 AF10 to 60 Dimensions L AF10, 20 AF50, 60 A G D Bracket (Option) L Bracket (Option) F D M G K K F M J J B E E B H OUT IN C OUT IN H C Port size OUT OUT Port size o s AF10: 25 AF20: 40 Drain A P Min. clearance for maintenance AF30, 40, 40-06 L Bracket (Option) A D G F M K J B E Drain Min. clearance

48

(32 x 2) Standard: JMGPM WA + Stroke/2 Z X 4 x YY depth YL GD 40 Bottom view WA + Stroke/2 Z 2 x P (Plug) 4 x MM depth ML 4 x OA through 4 x OB counterbore depth OL L (OL) 4 x NN through U X PW PE VA 2 x P (Plug) H R T 2 x P D GB GC S Q 2 x P (Plug) GA JC PD C + Stroke FB FA K J G A + Stroke [mm] Bore size Standard stroke A C D FA FB G GA GB GC GD H J JC K L MM ML NN Nil TN TF 20 (16 x 2

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

2000 1000 L1 a = 3000 0 20 40 60 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 20 40 60 m Transfer load m (kg) 2000 a = 1000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 20 40 60 Transfer load m (kg) Refer to page 145 for deflection data. 62 Non-standard Motor/Horizontal Mount Specification Series LJ1H30 Dimensions/LJ1H303ND(X10) Scale: 10% 8H10 depth 10 4-M8

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

20 L (mm) L K MA V J S Z H M W Model 24 22 9 59 68 15 76 40 29 55 MXP12-15B 42 40 29 89 98 25 106 60 49 75 MXP12-25B 12 Series MXP Dimensions MXP16 Z 3 With metal stopper 2-M5 x 0.8 depth 8 V K 6.5 5 M G Max. 4 Max. 4 11 25 2-M4 x 0.7 depth 6 Stroke: S MXP16-20 Width across flats 3 Width across flats 8 Piping port A 17 2-M5 x 0.8 (Plug: M-5P) 11 H 26.7 M6 x 1 10.5 5.5 35 34 8.5 A 30 4-M6

NCA1

cushions H Head end R Rod end Dimensions C85 C95 CP95 P + stroke A 4-EE (NPTF) P + stroke B 4-DD NCM D across flats D across flats NCA D-X Stroke A Stroke B SN + Stroke (A + B) 4-NT Depth ND 20LD + Stroke (A + B) Data ZZ + Stroke (A + B) Bore size (in) MM KK A AA B C D DD E EA EE G K R WF Y LD P PC ZZ SN 150 (1.5") 5/8 7/16-20 3/4 2.02 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 9/32 1.43 1 1.71

NCA1

Auto switch capable How to Order NC D A1 B 150 0400 + 0200 H XC11 R Mounting Bore size Auto switch Stroke B-A Dual operationSingle rod Stroke A Cushion Both ends N W/o cushions H Head end R Rod end Dimensions PA + Stroke B PB + Stroke A 4-EE (NPTF) 4-DD D across flats Stroke A Stroke B 4-NT Depth ND SN + Stroke A + Stroke B LF + Stroke A + Stroke B ZB + Stroke A + Stroke B Bore size (in)