Shock absorber External shock absorber With adjustment bolt 0.007[J] 0.025[J] 0.048[J] 0.081[J] 0.240[J] 0.320[J] 0.560[J] With internal shock absorber 0.039[J] 0.116[J] 0.116[J] 0.294[J] 1.100[J] 1.600[J] 2.900[J] Allowable Kinetic Energy (J) With external shock absorber (For low energy) 0.161[J] 0.574[J] 0.805[J] 1.310[J] With external shock absorber (For high energy) 0.231[J] 1.060[J
x J K B C CM3 CG1 CG3 Positional relationship between port and cushion valve JMB Port MB MB MB1 CA2 Cushion valve CS1 CS2 [mm] Bore size [mm] A AL B B1 C D E F G H H1 J K KA KB 32 22 19.5 46 17 32.5 12 30 13 13 47 6 M6 x 1 6 12.2 10 40 30 27 52 22 38 16 35 13 14 51 8 M6 x 1 6 14.2 14 50 35 32 65 27 46.5 20 40 14 15.5 58 11 M8 x 1.25 7 19 18 63 35 32 75 27 56.5 20 45 14 16.5 58 11 M8 x 1.25
/4 200 204 265 132 320 18.5 M18 x 1.5 M40 x 1.5 63 60 162 45 20 41 115 70 39 48 17 24 25 Up to 1200 3/4 1 225 226 280 150 335 18.5 M20 x 1.5 M45 x 1.5 63 182 20 60 50 46 115 39 74 48 17 24 25 Lube Non-lube Up to 1200 Data 275 277 355 180 420 23 M24 x 1.5 M56 x 2 71 225 25 67 60 140 56 49 86 60 20 29 30 Up to 1200 330 330 400 212 475 23 M30 x 1.5 M64 x 2 1 80 270 30 76 70 65 140 49 96 60 20
Size 3 10 20 30 50 5 Drain discharge Nil Manual valve C N.C. auto-drain D N.O. auto-drain Drain guide (Aperture 1/4, without valve) J Port size Note) IDG50M and 50HM are 03 only.
A tree stop of a rotating mass without cushioning or overloading risks breaking the pinion or vane, The allowable energy published by the manutacturer musl be caretully respected. a J=m.r 6 J = m . V c J = m . r l 2 + 1 2 2 T I v I + I I ri J' r 2 4 d = m . ,#,*, a J = m . I a 'ilE' d !-::-!. mb= n, t r a+b l l ta2+c2 i a ' Ti+l 2 . ^ 2 12 ho'oo#" ' 1 J = n y r = m " . * * ' o .
A tree stop of a rotating mass without cushioning or overloading risks breaking the pinion or vane, The allowable energy published by the manutacturer musl be caretully respected. a J=m.r 6 J = m . V c J = m . r l 2 + 1 2 2 T I v I + I I ri J' r 2 4 d = m . ,#,*, a J = m . I a 'ilE' d !-::-!. mb= n, t r a+b l l ta2+c2 i a ' Ti+l 2 . ^ 2 12 ho'oo#" ' 1 J = n y r = m " . * * ' o .
T Y P E F L AT W I T H R I B I: M6X1 I: M5X0.8 Y Model A B C D E F G H H Flat Flat with rib G ZPR10 U C 10 12 12 21 29.9 46 20 67 72 3 1.7 25 ZPR13 U C 13 15 12 21 29.9 46 20 67 72 3 1.8 25 ZPR16 U C 16 18 12.5 21.5 30.4 46.5 20 67.5 72 3.5 1.2 25 D E E P T Y P E I: M6X1 I: M5X0.8 Model A B C D E F Y G H H G ZPR10D 10 12 15 24 32.9 49 20 70 75 6 25 ZPR16D 16 18 16 25 33.9 50 20 71 76 7 25
200 201 to 350 44.5 8 201 to 350 6.5 9 20 to 300 22 19.5 17 45 103 1/8 16.5 10 14 2 97 10 (12) 25 7 6 31 to 300 301 to 400 51.5 10 301 to 400 6.5 9 20 to 300 22 19.5 17 45 104 1/8 20 12 18 2 97 10 (12) 25 7 6 38 to 300 301 to 450 51.5 10 301 to 450 7 11 20 to 300 30 27 19 52 112 1/8 26 16 25 2 104 10 (13) 26 7 8 47 to 300 301 to 800 58.5 12 301 to 800 (mm) Bore size (mm) 20 25 32 40 P J
200 201 to 350 44.5 8 201 to 350 6.5 9 20 to 300 22 19.5 17 45 103 1/8 16.5 10 14 2 97 10 (12) 25 7 6 31 to 300 301 to 400 51.5 10 301 to 400 6.5 9 20 to 300 22 19.5 17 45 104 1/8 20 12 18 2 97 10 (12) 25 7 6 38 to 300 301 to 450 51.5 10 301 to 450 7 11 20 to 300 30 27 19 52 112 1/8 26 16 25 2 104 10 (13) 26 7 8 47 to 300 301 to 800 58.5 12 301 to 800 (mm) Bore size (mm) 20 25 32 40 P J
C 4-O D T 2-P Q E B U W S K L Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com AA I A R AP AB Y + Stroke X J V Z + Stroke AC AD 8-AF AE Stroke range (mm) Bore size (mm) AF AE AD AC AB AA G F N E M D L C K B J AP H I A 20 30 75 16.5 11 12 5.5 45 92 25 60 80 24 60 108
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
with M5 thread Flow direction: Right to left With element service indicator Size 1/8 1/4 3/8 1/2 3/4 1 1 1/2 2 01 02 03 04 06 10 14 20 2B, 150 4B, 250 8B, 350 11B, 450 22B, 550 37B, 650 75B, 850 Rc NPT G 1/8 1/4 3/8 1/2 3/4 1 1 1/2 Nil J M R T Nil B C D Option Accessory Size Bore size RT T R JR JRT MR J MRT JT MT M 03 06 04 01 02 20 14 Size 10 2B, 150 4B, 250 8B, 350 11B, 450 22B, 550 37B
(mm) F F' GA I GS H J 5 ,~t' , 10st I 1&$\ 49'S\ ;p~" K I MM NN 8 I M3XO .5 MlOX 1.0 7 30.5 35.5 40.5 45.5 6 7 9 14 ,4 3 8 6.5 6 6 17 6 I 8 ;lOS 35.5 40.5 4!to. : 5.5,5 1 10 '0 '2 '5 ,7 I 5 8 I M4 XO.7 M'2XlO 8 1 6.5 6 J 7 20 7 '0 I 8.5 6 I 7 I 24 9 110 30.5 35.5 40.5 45.5 55.5 I 15 '2 14 20 _' 9 i 6 -8 I MS X: O.8 M14xtO -Flange Mount : CO JPF z H s p A' F GA 2-M3 GB ~-IJ~J I A ~ u: > !
22 19.5 17 45 103 1/8 51.5 16.5 10 14 2 97 10 (12) 25 6.5 9 7 10 6 31 Up to 300 301 to 400 20 to 300 301 to 400 Data 22 19.5 17 45 104 1/8 51.5 20 12 18 2 97 10 (12) 25 6.5 9 7 10 6 38 Up to 300 301 to 450 20 to 300 301 to 450 30 27 19 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 Up to 300 301 to 800 20 to 300 301 to 800 Bore size (mm) 20 25 32 40 W J K KA MM NA PG PH PL S TA
Spacer with Bracket (Z) G Center of F.R.L. body C BB (Y100T, Y200T only) E 1 X-X EE (Y100T, Y200T only) RELEASE X B 2 E X G Seal Y200T Y400T J F A H K Spacer width D Applicable model F 6.8 12 14 18 18 20 G 4.5 5.5 7 9 9 11 H 14 19 21 26 27 31 J 2.8 3.2 4 4 4.6 6.4 K 25 30 41 50 50 70 A 6 3 4 5 5 6 B 82 96 96 120 BB 56 67 C 24.5 29 41 48 48 60 D 40.5 53 68 81.5 86 112 E 20 24 35 40 40 50
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 A AL B1 C D E F GA GB H H1 I J K KA MM NA P S TA TB ZZ 5 6 6 8 11 11 13 16 M4 x 0.7 depth 7 5 M8 x 1.25 24 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 114 119 121 139 162 162 196 196 12 12 12 13 14 14 20 20 35 40 40 50 58 58 71 71 77 77 79 87 102 102 122 122 26 31 38 47 58 72 89 110 11 11 11 12 13 13 12 12 12 13 14 14 20 20 11 11 11 12 13 13
N W V 32 40 50 63 80 100 27 27 31.5 31.5 38 38 38 M27 x 2.0 13 M12 x 1.75 6 20 22 30 35 35 40 40 27 125 to 1000 50 223 97 15 4 4 5 9 11.5 17 17 120 1/2 13 14 15.5 16.5 19 19 19 27 60 32 32.5 38 46.5 56.5 72 89 110 136 54 46 52 65 75 95 114 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72 72 16 16 16 16 16 16 4 4 5 5 5 5 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10
dia. 5.1 19 6.5 W 32 0.05 46 0.5 0.05 8 B D Piping port 2-M5 x 0.8 47 13 J Mounting reference planes B D 16.5 14.5 Section AA MXP16-30 Without magnet and switch rail 2-M3 x 0.5 depth 3.5 For rail mounting 8 2-M2 x 0.4 depth 3 For magnet mounting 8.5 10.7 6-M5 x 0.8 depth 7 20 20 L (mm) MXP16-20 MXP16-30 SMXP16, #1(#1 + #3) SMXP16, #2(#2 + #4) L K J V H S Z G M W Model 36 40 93 82 58 20