Rotary Table/

Positioning pinhole Counter-clockwise 5 Adjustment bolt A 5 (For counter-clockwise rotation end adjustment) 9 22 e B port g .5 n Adjustment bolt B ra (For clockwise rotation end adjustment) nt e e m is st w u k dj c lo a 0 -c e d C 19 s n i er a w lo A port B port e k dj c c nt o l Clockwise C k n e u u w o st ng o is ti C m e ta ra ro e ro ta nt ti o on n ra e d n n ti g e ta 5 9 ro m u

VCC

1 u u Note) Note) Valve element: SUS316 yNote) Piston seal: HNBR Body: Aluminum + Anodized B: 3 port valve VCC13-00 e y r t Note) q w Note) Component Parts Model Part no. Description Orifice body assembly Symbol Component Material Qty. Order qty. A-q A-w A-e A-r A-t A-y A-u A-!1 A-y A-u A-!2 A-!

Compressed Air Preparation Filter

AD27-2-A AD37m-2-A AD47m-2-A With level gauge AD37m-8-A AD47m-8-A Normally open (N.O.) AD38m-2-A AD48m-2-A With level gauge AD38m-8-A AD48m-8-A Automatic (Auto drain) The bowl assembly for sizes 20 to 40 comes with a bowl seal. The bowl assembly for sizes 50 and 60 comes with a flange and a bowl seal.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

B A B A A A A A A 2.PUSH 2.PUSH B B B B 1.TURN 1.TURN VQZ 28 5.5 35 74.5 SMC VQD 13 2-M4 clamp screw EXH outlet M5: External pilot port 9 D side U side Stations 1 2 3 4 5 6 7 8 n C8: 3(R) port Lead wire length: L0, 600 mm L1, 1500 mm L2, 3000 mm C8: 1 (P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 44 29.5 2n-C3, C4, C6, M5 (4(A),

Vacuum Regulator

Inch Bottom bracket Single sided connections IRV 20 A C08 Made to Order For details, refer to page 10.

HEC_001W-E

O f f s e t V a l u e M O D E < 0 . 1 5 C A l l o w a b l e U p p e r T e m p . R a n g e M O D E < 1 . 5 C 6. Allowable Upper Temp. Range Setting range : 0.1 to 10.0 C Min. increment : 0.1 C Indicated content : Temp. from target to upper limit (Ex.: 1.5 C) Function : Sets upper limit of temp. where the warning arises.

Multi-Axis Step Motor Controller

Connector A B1 (Terminal no.) 1 2 5 6 B 15*1 A1 (14) (18) (17.7) (10.2) C 20*1 A6 B1 B3 A1 A3 B6 (13.5) *1 Produced upon receipt of order (Robotic cable only) 1 2 15 16 Connector B Connector D (14.7) (30.7) L (11) (10) With lock and sensor Signal Connector A terminal no. A B-1 A A-1 B B-2 B A-2 COM-A/COM B-3 COM-B/ A-3 Cable color Connector C terminal no.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: Y Y = X = X = Long shaft side (mm) (mm) Long shaft side Long shaft side Y Y X X Size Size Body (B) Body (B) 10 10 1 to 14 1 to 14 1 to 14 1 to 14 Body (B) Body (A) Body (A) X = X = 15 15 1.5 to 18 1.5 to 18 1.5 to 18 1.5 to 18 Body (A) Y = Y = 20 20 1.5 to 20 1.5 to 20 1.5 to 20 1.5 to 20 Short shaft side Short shaft side 30 30 2 to 22 2 to 22 2 to 22 2 to 22 Short

7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

Speed Controller with Indicator

Description Material Note 1 Body A PBT 2 Elbow body PBT 3 Body B Stainless steel 4 Knob POM 5 Needle PBT 6 Needle guide Stainless steel 7 U-seal HNBR 8 O-ring NBR 9 O-ring NBR 10 O-ring NBR 11 Cassette 12 Seal NBR 13 Spacer PBT 3.2 and 1/8" only 14 Bonnet A POM 15 Bonnet B POM 16 Gear POM 17 Indicator gear POM 18 Clip Stainless steel 19 Gasket NBR/Stainless steel 20 Seal NBR 20 Series AS-FSG

Tie-rod Type Hydraulic Cylinder

16 47 125 15 340 1/2 77 140 12 20 16 55 160 20 375 3/4 94 159 12 24 20 60 421 CHAW Series Dimensions Rod flange type: CHAWF 4 x FD 4 x J 2 x Rc P T T V V Cushion adjustment screw GA Air release GA M Width across flats G Width across flats G MM MM R (max.) d d W W D E E D FY B C MA a a FT MA B F NA NA F K A A K H + Stroke S + Stroke FX H ZZ + 2 strokes FZ (mm) Bore size (mm) A B C a B E D

Sine Rodless Cylinder Series REBR Direct Mount Type

M1 = F x L A M2 = F x L M3 = F x L Note) Deflection: Displacement of section A when force acts on section F REBH15, 25 REBH15, 25 REBH15, 25 REBH15 REBH15 REBH25 REBH15 REBH25 0.08 0.03 REBH25 0.02 Deflection (mm) Deflection (mm) Deflection (mm) 0.06 0.02 0.04 0.01 0.01 0.02 5 10 15 20 0 25 25 5 10 15 20 0 5 10 15 20 0 25 Moment (Nm) Moment (Nm) Moment (Nm) REBHT25, 32 REBHT25, 32 REBHT25

CLA

1 ,l1I~1 f AI U, , L~ f-~, ~' 45' 'C'C' '111 i'-"-l :2< ~ "'" _Ie P. eE, MM R, U, eND"IO NX l P . ~z l . A A, L, no. (min) bontala A, eE, L, MM R, U, eNOHlO NX No. (mm) 1-04 40 69 22 24 55 M14X1.5 15.5 2Q 12-g D70 .. -8!.

100

valves because the generation of surge voltage is prevented by a rectifier. * For type U, only DC voltage is available.

Modular Type Filter Regulator Series AW

Construction AW20K to 40K A-A i A w t SMC K P q C U O S L H o t OUT (Outlet pressure) IN (Inlet pressure) A Parts list y Material AW20K AW30K AW40K AW40K-06 Description No. Note e Zinc die-cast Aluminum die-cast Platinum silver 1 2 Body r Bonnet Black Polyacetal u Parts no. AW20K Description Material No.

3 Port Solenoid Valve

Effective use as a safety measure for maintenance.

HRS100/150

HRS 100/150 HRS 100/150 Applicable model Dimension [mm] A B C HRS100/150-A-20/40-A 830 302 1552 HRS100/150-W-20/40-A 570 401 1353 C HRSH 090 HRSH 118 HRSE A B Option symbol With Earth Leakage Breaker B HRZ HRZD HRS 20 B With earth leakage breaker HRW A leakage breaker is built in to automatically stop the supply power when it has short-circuit, over current or electrical leakage.

One-touch Fittings Series KQ2

O e b u t ) m m ( e l b a c i l p p A e z i s g n i t t i f d . o N t r a P D L1 L2 P Q A M n o l y N e n a h t e r U 2 . 3 2 . 3 9 9 3 2 U 2 Q K 6 . 9 0 5 5 . 7 1 6 . 9 9 5 3 5 . 5 1 4 . 3 9 . 2 6 4 4 9 9 4 0 U 2 Q K 4 . 0 1 5 . 1 5 8 1 4 . 0 1 7 . 9 5 . 5 3 6 1 2 . 4 2 . 4 2 1 6 6 9 9 6 0 U 2 Q K 8 . 2 1 5 . 5 5 0 2 8 . 2 1 7 . 1 1 5 . 8 3 7 1 4 . 3 1 4 . 3 1 9 1 8 8 9 9 8 0 U 2 Q K 2

1

A Series MGC 20 to 50 SZ + Stroke B D port C port A, B port B port A C port A port D port A View A-A GD GD Front mounting flange SB + Stroke B SA + Stroke A ZZ + Stroke A + Stroke B Bracket mounting With R Without R Stroke A stroke Stroke A + Stroke B ( ) Bore size (mm) W1 W2 SB SA GD ZZ GC SZ availability 30 30 Up to 200 96 50 9 176 21 20 35 st or more 89 110 30 30 96 50 9 183 21 25 60 st

High Purity Chemical Valve

Stations PFA Port size Orifice diameter 1/2 3/4 1/4 3/8 Valve type Symbol Type 12 20 4 8 Basic type N.C. P P P Stations are counted from station 1 on the left side, with the A (OUT) ports in front. PA PB PA P PB A A A N.O. PA PB PA A (OUT) port PB A A A Double acting N.C. N.O. Double acting LLA2A-03-02-C 1 set 1 set Manifold base part no.