VQ Consult SMC for other voltages. 2.9-12 Series VQ100 Plug Lead Unit Manifold (VV3Q12) L1 10.8 3.5 5 L2 3 P E 8.9 P E 11 Round head screw M1.7 X 14 W (L type) 28.7 26.5 W (M type) 300 33.8 300 2-3.5 Mounting hole 4-M5 SY P, E port Manual override SYJ 11.5 P=10 300 Latching, 100V AC or more VK H (M type) U side D side n 5 4 3 2 1 300 H (L type) VZ VT VT 42.2 L type M type 36.3 VP W
22.5 15.5 9.6 17.5 10 2.5 25.5 24.5 13.7 15.4 14.29 7 18 2.7 8 9 18 5 10 19 3.2 10 20 32 12 20 28 16 23 33 59 28 36 62 10-32UNF 12.7 2.3 9.3 15.6 1 16 22 11.11 5 32 23 16 1 8 1 4 10.4 10 18 3 26 25 14.29 KQ2L05-32 10-32UNF 20 22 2.3 11.11 11.4 10 19.5 3 16 1 8 1 4 22.5 26.5 15.1 23.5 27.5 29.5 24.5 28.5 30.5 26.5 29.5 31.5 35.5 31.5 33.5 37.5 24 26 16.5 3.5 14.29 10-32UNF 2.3 18.1 13.6
8 u o !3 !8 u o !3 !7 !7 !9 !9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !
Description w HRZD q DI filter vessel (Resin) Circulating fluid return port w Mounting bracket HRW e DI filter inlet tube !0q r DI filter outlet tube HECR t Tapping screw (4 pcs.) u y Mounting screw (4 pcs.) Circulating fluid outlet To circulating fluid outlet HEC u DI control piping assembly e i DI sensor assembly HEB o Nipple (2 pcs.) o !
0 e e u u r !1 i r t !1 !0 P Port A Port P Port A Port t q q o o w VX y w VN VQ B Port <3 port valve> <2 port valve> Component Parts Operation principles No. Description Material Note Body Undercover Cover Plate Valve element A Valve element B Piston Return spring Valve seat Rod Parallel pin Pilot solenoid valve When the pilot operated solenoid valve !
Reset button 12 Suction Guard Series FHG Dimensions A 135 170 10 A I 10 Port size: 04 to 16 Port size: 20, 24 4 x 10 6 x 10 Element removal dimension T+100 B H Element removal dimension T+100 B H 10 10 L L M C D M Cap C D Cap Air breezer Air breezer (65) (U) T (V) (S) (65) T (V) (S) (U) MIN (r) AG F MIN (r) AG F Seat seal Seat seal IDG IDG Lubrication port strainer Lubrication port strainer
8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o !9 !8 @2 @6 !4 !2 @4 @5 !5 t MX MTS MY CY !3 y !1 e q !3 y !1 q @7 MG CXSJM20 to 32 CXSJL20 to 32 CX @5 !6 i u !7 o !5 t r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 D-X 20Data Rod cover Head cover Rod cover Head cover Component Parts No. Description No. Description Material Note Material Note Hard anodized Aluminum alloy Polyurethane q !
8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o MX MTS MY CY !3 y !1 e q !3 y !1 q @7 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CXSJM20 to 32 CXSJL20 to 32 CX @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !
Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and
Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 Material Rolled steel plate Rolled steel plate Carbon steel Rolled steel plate Carbon steel Steel wire Urethane Cast iron Lead-bronze casted Carbon steel Carbon steel Rolled steel No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !
3 A A u !0 o q e !2 y i w r !1 Replaceable Kits List !2 !1 !0 o i u y t r e w Switch actuator q Contents Kit no.
MTS Leakage [Pam3/sec] 10-8 MY Note 2) The leakage test result shown is based on a test conducted for 10 minutes after the cylinder was pressurized with helium at 0.1 MPa. CY Note 3) This data is considered typical but not guaranteed. 10-9 MG Leakage test result CX 10-10 0 5 10 DTime [min] -X e e a a l l k k w w a a 2 o o g g 1 O-ring seals separate vacuum and atmosphere.
10 Torr-0 PSI (10 Torr-Okqt/cm2) 0.012 // Without subplate \\ ( 0.029 Il \ (13) ll NVJl24 N.O. 0-100(0-7) '10 Torr-0 PSI (10Torr'Qkg cm,) '10 Torr-85 PSI (10 Torr 6kg7cm,) 0.008 NVJl24A 0 * 7 1 ( 0 5 ) 10 Torr-0 PSI (10 Torr'0kgl/cmr) 10 Torr-57 PSI (10 Torr-4kgf/cmr) 0.012 Note) In cas ot NVJ124O, suDply air to "R" port, "P' port will be the exhaust port Solenoid Specifications Snecifications
10 Torr-0 PSI (10 Torr-Okqt/cm2) 0.012 // Without subplate \\ ( 0.029 Il \ (13) ll NVJl24 N.O. 0-100(0-7) '10 Torr-0 PSI (10Torr'Qkg cm,) '10 Torr-85 PSI (10 Torr 6kg7cm,) 0.008 NVJl24A 0 * 7 1 ( 0 5 ) 10 Torr-0 PSI (10 Torr'0kgl/cmr) 10 Torr-57 PSI (10 Torr-4kgf/cmr) 0.012 Note) In cas ot NVJ124O, suDply air to "R" port, "P' port will be the exhaust port Solenoid Specifications Snecifications
[C] 5 10 15 20 25 30 35 Circulating fluid temperature [C] HRS090-W-20/40 (50 Hz) HRS090-W-20/40 (60 Hz) 14 12 12 10 Facility water temperature 32C Facility water temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 8 8 6 Facility water temperature 40C Facility water temperature 40C 6 4 4 2 2 0 0 5 10 15 20 25 30 35 Circulating fluid temperature [C] 5 10 15 20 25 30 35 Circulating
1 y q e u o w i Male thread Parts List Remarks Remarks Description Material No.
5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Component Parts MB No. q w e r t y u i o !0 !1 No.
5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts MB No. q w e r t y u i o !0 !1 No.
POM Stainless steel Material Note No. y Description q Description Plunger Spring Valve Body T.T. = 2.5 mm only, w/threads w e u i Stainless steel Lever Packing O-ring NBR Valve Retainer Spring r POM o NBR t Stainless steel !
10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate