SMC

30 55 65 70 ZZ 107 107 107 117 132 182 230 280 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 G 16 16 16 16 21 26 39 19 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 NA 2 2 2 2 2 4 4 4 GA 16 16 16 16 51 61 109 159 KA 125 173 223 13-/22-MXS16L-10 13-/22

High Vacuum Angle Valve, XL Series

The U type is DC only. 40 50 63 80 Electrical entry G Grommet (lead wire length 300mm) H L Grommet (lead wire length 600mm) L type plug connector M M type plug connector Flange type Symbol Type Applicable flange size Nil D KF(NW) K(DN) 16, 25, 40, 50, 63, 80 63, 80 Solenoid valve action Nil 2 position single W 2 position double Solenoid valve direction K Left flange surface Rated voltage

Series KP/KPQ/KPG

Elbow: KPL D 2-Applicable tubing Effective area mm Note 1) D Model L Applicable tubing O.D. mm Weight g M Q TPH TPS M M L Q L Q 20.7 4.5 18 3.5 3.5 3 10.4 KPL04-00 4 22.8 5.3 19.5 9 9 7 12.8 KPL06-00 6 D 26.3 6 21.5 22 15 11 15.2 KPL08-00 8 4.2 29.4 6.8 24 35 25 16 18.5 KPL10-00 10 M 8 31.4 7.5 25 50 40 20 20.9 KPL12-00 L 12 Note 1) D indicates the maximum diameter.

Series KP/KPQ/KPG

Elbow: KPL D 2-Applicable tubing Effective area mm Note 1) D Model L Applicable tubing O.D. mm Weight g M Q TPH TPS M M L Q L Q 20.7 4.5 18 3.5 3.5 3 10.4 KPL04-00 4 22.8 5.3 19.5 9 9 7 12.8 KPL06-00 6 D 26.3 6 21.5 22 15 11 15.2 KPL08-00 8 4.2 29.4 6.8 24 35 25 16 18.5 KPL10-00 10 M 8 31.4 7.5 25 50 40 20 20.9 KPL12-00 L 12 Note 1) D indicates the maximum diameter.

10

Solid state auto switch: D-M9m 40 60 80 100 Long: MHL2-mD2 60 80 100 120 M Performance and mounting dimensions are interchangeable with the current model.

Digital Flow Switches Series PF2A

Pin description Load is an analog input equipment such as a voltmeter, ammeter. 1 DC(+) PF2A7H-(-M) 68 69 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30 V 80 mA or less OUT1 Load Black H 0 V or Blue 50 msec 50 msec PF2A7H-(-M) 28 29 A B C D E F G H I J Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc1, NPT1, G1 36 M5 x

Cylinder with Lock Series CNG

Load in direction of rod extension Load in direction of rod retraction m 0.3MPa Graph 5 F 0.4MPa Graph 6 m 0.5MPa Graph 7 F 19 Cylinder with Lock Series CNG Model Selection Selection Graphs Graph 5 Graph 2 0.3MPaP<0.4MPa 0.3MPaP<0.4MPa 200 200 100 100 40 30 40 50 30 40 50 32 40 25 Load weight: m (kg) Load weight: m (kg) 20 20 20 32 10 10 25 20 5 4 3 5 4 3 2 2 1 1 0.5 100 500 400 300 200

Title not found

N lszo-oH /Pressure Center 5 GJ1.81(300) H:23.62(600) Leading wire length Manual ovorrido o (PE Port) w/filter ' r ' r ' 1 ' I : : : ' ' M type plug connector/Nv4t320-OM/Closd Center tMzi!

Series AP3100

Specifications AP3260 Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 1000 psig (6.9 MPa) 8000 psig (55.2 MPa) 40 to 194F (40 to 90C) (No freezing) 0.27 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 1) 1 x 10-7 Pam3/sec 1) Ra max 15 in. (0.4 m) Option: 10 in. (0.25 m), 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld Bottom mount (Option: panel mount) 0.06

Multi-Axis Step Motor Controller

(R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.

IDG

Tubing size (O.D. x I.D.) mm: 12 x 9 IDG30L IDG50L 0 m 40 1 m 39 3 m 38 5 m Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1C or less. 14-19-25 22 Series IDG Single Unit/Standard Dew Point 60C Specifications How to Order 03 B IDG 60 S Option Flow rate by size None (Standard) With

Series VQ Base Mounted Metal Seal/Rubber Seal

Description Material Note q w e No.

CL

40 50 Up to 200 Up to 300 Up to 300 Up to 300 11 11 11 12 5 6 6 8 11 11 10 10 24 29 36 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 198 215 218 241 20 25 32 40 0.25 stroke For long stroke refer to page 9-2-32. 9-2-30 Series CLG1 Fine Lock Cylinder Double Acting, Single Rod With Mounting Bracket Foot style: CLG1LN Foot Style Without rod boot With rod boot ZZ Bore size (mm) BZ M W X Y LS LT LX

ARM10/11

t y w F.R.L.

ARM10/11

t y w F.R.L.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

7MPa) 10 Load weight (kg) 100 80 63 m 50 1000 40 10 100 100 1000 Speed (mm/s) Series CH2F Load weight for horizontal motion Speed chart (extension, pressure 7MPa) 10 Load weight (kg) 100 80 m 63 50 1000 40 32 10 100 100 1000 Speed (mm/s) 30 Technical Data Series CH2G/H Load weight for horizontal motion Speed chart (B rod retraction, pressure 14MPa) 10 100 10 80 Load weight (kg) m 63 50

Heavy Duty Stopper Cylinder Series RSH/RS1H

30 40 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 16

4-channel Flow Monitor ( compatible)

Set the connection range of PF2D5. 0: 4 L 1: 20 L 2: 40 L rAnG (PF2D5, Selection of connection range) Y U8 0x00 3 R/W (0) 0: PFA (PF2A5) 1: PFW (PF2W5) 2: PFd (PF2D5) 3: USEr (User setting) 4 R/W Setting of connection product Y U8 0x01 (1) Setting of connection sensor (For PF3W5) Y U8 0x00 0: FloW 1: tEMP 5 R/W (0) Unit (Selection of display unit, for PF2A5) Y U8 0x00 0: L 1: Ft 6 R/W (0)

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

N lszo-oH /Pressure Center 5 GJ1.81(300) H:23.62(600) Leading wire length Manual ovorrido o (PE Port) w/filter ' r ' r ' 1 ' I : : : ' ' M type plug connector/Nv4t320-OM/Closd Center tMzi!

PF2A/PF2W

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.