5 Port Solenoid Valve

Note SOL.A 9 Station 9 SOL.B 22 1.5 m 3 m 5 m AXT100-DS25-015 AXT100-DS25-030 AXT100-DS25-050 Cable 0.3 mm2 x 25 cores SOL.A 10 Station 10 SOL.B 23 SOL.A For other commercial connectors, use a 25pin type with female connector conforming to MIL-C-24308.

7.5

Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% T type 24 VDC: 5% to +10% 12 VDC: 6% to +10% PS port 2(B) Vacuum pad port Flow Characteristics Response Time Flow Characteristics (When restrictor is fully open) 2(B)3/5(E) 1(P)2(B) b 0.19 Cv 0.05 C [dm3/(sbar)] 0.40 b 0.18 Cv 0.10 C [dm3/(sbar)] 0.24 Valve model Fluid passage 2(B) Port size M5 Valve model Response time ms (at 0.5 MPa) SJ3A6-ll-l

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

0.25 to 0.7 Ambient and fluid temperature (C) 10 to 50 (No freezing.

NCQ8

(M) NC(D)Q8WA-(C)(M) NC(D)Q8A-S(M) NC(D)Q8A-T(M) Both Ends Tapped (Inch) O1 R Bore size Remarks R R O1-Thread 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") #4-40UNC 0.34 Through tap for NCQ8A056-012(C) #6-32UNC 0.34 Through tap for NCQ8A075-012(C) #6-32UNC 0.50 Through tap for NCQ8A106-012(C) #10-24UNC 0.50 Through tap for NCQ8A150-012(C) #10-24UNC 0.53 Through tap

LJ1H

Positioning distance (mm) 1 10 100 300 600 10 0.5 2.0 11.0 31.0 61.0 100 1.1 1.2 2.1 4.1 7.1 Speed (mm/s) 250 1.1 1.2 1.5 2.3 3.5 500 1.1 1.2 1.4 1.8 2.4 Values will vary slightly depending on the operating conditions. A B C D 37 Series LJ1 Options T-nuts for Mounting Electric Actuators Use T-nuts for T-slot mounting of an actuator.

VFS

[dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv Weight (kg) Plug-in Non plug-in VF 2.6 2.8 2.6 2.8 2.5 2.7 2.6 2.9 2.7 2.9 2.8 3.1 2.8 3.1 2.3 2.6 2.3 2.4 2.7 2.8 3 8 0.20 0.22 0.20 0.22 0.14 0.22 0.15 0.15 0.22 0.22 VFS4110 11 12 11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000

New

Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

MHZ

MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

MHZ

MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

1.1 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCJ2 SERIES NCJ2 BORE SIZES Ø6•10•16 Double Acting Single Rod / Double Rod Single Spring Return / Extend Compact and Lightweight Auto Switch Sensing Optional M A D E I N USA Non Rotating Piston Rod Optional High

H B Basic L Axial Foot F Rod Side Flange D Double Clevis (Except for 6) 6 (1/4) 10 (3/8) 16 (5/8) P O R T L O C AT I O N O N H E A D C O V E R Symbol Bore Size: 6 10, 16 R In-Line In-Line Perpendicular S T D S T R O K E/H U N D R E D T H S O F A N I N C H 6 (1/4) 050, 100, 150, 200 10 (3/8) 050. 100. 150, 200 16 (5/8) 050, 100, 150, 200, 300, 400, 500 A C T I O N S Spring Return T Spring

Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

Series AP500

Specifications AP501mmA 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) AP510 1 to 100 psig (0.007 to 0.7 MPa) AP506 1 to 60 psig (0.007 to 0.4 MPa) Select compatible materials of construction for the gas Vacuum to 150 psig (1.0 MPa) 500 psig (3.4 MPa) 1000 psig (6.9 MPa) 40 to 160F (40 to 71 C) (No freezing)1) 0.06 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max

Programless Controller Series LECP1

Connector C (Terminal no.) Cable length(L)[m] A1 1 2 5 6 (17.7) (10.2) (14) (18) 1 3 5 8 A B C 1.5 3 5 8 A6 B1 B3 A1 A3 B6 (13.5) 1 2 15 16 (5.7) Connector B Connector D (30.7) L (11) (14.7) (10) 8 A B C 10 LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m (Produced upon receipt of order) 15 Actuator side Controller side 20 (5.5) (6.3) (5.7) (14.2) Connector C (Terminal no.)

Valve Single Unit

2n-One-touch fittings Applicable connector: 20 pins MIL type Applicable connector: 10 pins MIL type Applicable connector: 26 pins MIL type (Conforming to MIL-C-83503) (A, B port) Applicable tubing O.D.: 4, 6, 8 (Conforming to MIL-C-83503) (Conforming to MIL-C-83503) DIN rail holding screw DIN rail Triangle mark position Triangle mark position Triangle mark position 45PG (20 pins) 45PH (10

Valve Single Unit

MIL with strain relief; Conforming to MIL-C-83503 Flat ribbon cable connector socket: 10 pins MIL with strain relief; Conforming to MIL-C-83503 Flat ribbon cable connector socket: 20 pins MIL with strain relief; Conforming to MIL-C-83503 SY D-sub connector: Conforms to MIL-C24308 Flat ribbon cable Terminal block (M3) 9 pins Terminal block (M3) 18 pins Connector SYJ SX +COM (Type 45), COM

0.4

connectors, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)

NCQ8

Clevis (1) RCS-015 RCS-02 RCS-03 RCS-04 RCS-05 RCS-08 RCS-10 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 PS-08 PS-10 Clevis (1) RCD-015 RCD-02 RCD-03 RCD-04 RCD-05 RCD-08 RCD-10 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 PS-08 PS-10 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 PC-08 PC-10 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 PC-08 PC-10 056(9/16") 075(3/4") 106(1 1/16") 150(1 1/2") 200(2")

Air Cylinder

across flats B1 ZZ + 2 Stroke S + Stroke NA C 8 x J Female rod end thread depth A1 MM ZZ + Stroke H (mm) Bore size Stroke range A AL B1 C D E F GA GB H H1 I J K KA MM NA P 20 Up to 125 18 15.5 13 14 8 12 2 12 10 35 5 26 M4 0.7 depth 7 5 6 M8 x 1.25 24 1/8 25 Up to 200 22 19.5 17 16.5 10 14 2 12 10 40 6 31 M5 0.8 depth 7.5 5.5 8 M10 x 1.25 29 1/8 32 Up to 200 22 19.5 17 20 12 18 2 12 10

Parallel Style Air Gripper Series MHZ

Type K F G H 10 16 20 25 5.5 6.5 7.5 10 40 38.7 44.2 51.3 17 16.7 18.2 18.3 Axial Ported (with M5 port) [M] MHZ (mm) MHF Auto switch mounting groove (4 locations) (Except 10) Model A B D2 E2 D1 M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZL2-10 M 12f8 15 7 11 62.8 MHL 0.016 0.043 MHZL2-16 M 16f8 20 10 15 66.4 Plug End boss assembly H G Note 1) MHR 0.020 0.053 20f8 MHZL2-20 M 22 12

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

pressure differential [MPa] Cv JSXD31-Am02 410 3/8 9.2 2.4 JSXD31-Am03 410 1/2 9.2 2.4 JSXD31-Am04 410 Aluminum 1/4 8.5 0.35 2.0 30 10 1/4 8.5 0.35 2.0 1.6 1.9 JSXD31-C Sm02 500 3/8 9.2 2.4 2.0 2.4 JSXD31-C Sm03 500 1/2 9.2 2.4 2.0 2.4 JSXD31-C Sm04 500 Brass Stainless steel 0.02 1.0 Table of UL-compliant Products JSXD Series JSXZ Series JSXM Series Option Replacement Parts 40 Brass Stainless