High Vacuum L Type Valve

Valve size Description Valve size Material Part indication No. 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4

ITV2-OM0095

Contents Contents P1 Safety Instructions P2 Handling precautions P4 Wiring method and LED indication P6 System configuration P7 Communication specification P7 Setting of dipswitch P8 Pressure setting and output monitoring P10 Communication data P10 Maintenance and inspection P11 1 - E/P Regulator Safety Instructions These safety instructions are intended to prevent hazardous situations and

RS-232C-E

Contents Contents P1 Safety Instructions P2 Handling precautions P4 Wiring method and LED indication P6 Communication specification P7 Pressure setting method P7 Communication protocol P8 Maintenance and inspection P9 1 - E/P Regulator Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

ITV2-OM00114

Contents Contents P1 Safety Instructions P2 Handling precautions P4 Wiring method and LED indication P6 System configuration P7 Communication specification P7 Setting of dipswitch P8 Pressure setting and output monitoring P9 Communication data allocation P10 Maintenance and inspection P11 1 - E/P Regulator Safety Instructions These safety instructions are intended to prevent hazardous situations

ITV_P-E

Contents Contents P1 Safety Instructions P2 Handling precautions P4 Wiring method P6 Relation of input signal and preset pressure P8 Setting method P8 Key locking function P9 Setting of min. pressure, max. pressure and preset pressure P10 Auto memory function P10 Switch output (Out of range mode) P11 Error indicating function P11 Detail setting mode P12 Gain setting P12 Sensitivity setting

Electric Actuator/Rod Type LEY16, 25, 32 Series LEY Step Motor (Servo/24 VDC) Servo Motor (24 VDC)

1 Controller type1 Motor mounting position Type Symbol Parallel P P P P P4 P Nil 6N 6P 1N 1P Without cable Standard cable2 Without controller Nil S R LECP6/LECA6 (Step data input type) In-line P P P NPN PNP NPN PNP LECP12 Ends tapped (Standard)2 Robotic cable (Flexible cable) Nil U L F G D Body bottom tapped Foot Rod flange2 1. The standard cable should be used on fixed parts.

D series Pin Clamp Cylinder G G Series CKQ D/CLKQ D P P How to Order Built-in standard magnet D A 50 177 R A L KQG C P4DWSC With magnetic field resistant auto switch Built-in strong magnet D A 50 198 R A L KQP C P79WSE With magnetic field

(Unclamp side) The D-P4/P7 type is different-surface mounting. (Refer to page 1308.) Mounting surface (viewed from top) Auto switch type Port location Symbol Nil Without auto switch (Built-in magnet) Port Mounting surface For applicable auto switch models, refer to page 1269. Auto switches are included, (but not assembled).

Clean Air Module LLB Series

Without restrictor With restrictor S Digital flow switch ON/OFF valve Nil Without digital flow switch NPN open collector 1 output + Analog output (1 to 5 V) PNP open collector 1 output + Analog output (1 to 5 V) NPN open collector 2 outputs PNP open collector 2 outputs NPN open collector 1 output + Analog output (4 to 20 mA) PNP open collector 1 output + Analog output (4 to 20 mA) P1 P2 P3 P4

Flat Type Pad/Bellows Type Pad with Groove

Form/Diameter Model Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EA-P1 V V V V ZP3EA-P2 V V ZP3EA-P3 V V V ZP3EA-P4 V V ZP3EA-P5 V V ZP3EA-P6 V Pad diameter 32 to 50 Pad form Flat type with groove Dimensions: Pad Unit ZP3E-32UMlZP3E-40UMlZP3E-50UMl36 31 27 27 23 20 27 23 20 10.3 (Plate) 10.3 (Plate) 10.3 (Plate) 13.5 13 13

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

pressure 200 kPa 30 30 30 Supply pressure 200 kPa Supply pressure 400 kPa Supply pressure 200 kPa 20 20 20 Supply pressure 400 kPa Supply pressure 400 kPa 10 10 10 0 0 0 0 40 80 120 160 200 0 200 400 600 800 1000 0 100 200 300 400 500 Flow [L/min] Flow [L/min] Flow [L/min] Straight Piping Length and Accuracy PFMB7201/7501/7102 Straight piping length IN OUT (8 cm or more) p6 p5 Accuracy [%F.S.] p4

Electric Actuator

1 Controller type1 Motor mounting position Type Symbol Parallel P P P P P4 P Nil 6N 6P 1N 1P Nil S R Without cable Standard cable2 Without controller LECP6/LECA6 (Step data input type) In-line P P P NPN PNP NPN PNP LECP12 Ends tapped (Standard)2 Robotic cable (Flexible cable) Nil U L F G D Body bottom tapped Foot Rod flange2 1. The standard cable should be used on fixed parts.

Size: Ports A & B Same Size, Pilot Port Thread Type: 2 (M5X0.8), Pilot Port Position: P4 (Position 4), Material: Standard, Option: 2 (With By-Pass)

Size: Ports A & B Same Size, Pilot Port Thread Type: 2 (M5X0.8), Pilot Port Position: P4 (Position 4), Material: Standard, Option: 3 (With Flow Rate Adjustment & By-Pass)

Type: 3 [Standard, 100 â„“/min (ANR)], Port Size: 1 (One-touch Fitting: Size 3=ø10, Size 4=ø12), Digital Flow Switch: P4 (PNP Open Collector, 2 Outputs), Regulator: R1 (w/Regulator+Pressure Outlet Port Assembly), ON/OFF Valve: Without ON/OFF Valve, Restrictor: Without Restrictor, Filter: F (With Filter)

Type: 4 [High Flow, 500 â„“/min (ANR)], Port Size: 1 (One-touch Fitting: Size 3=ø10, Size 4=ø12), Digital Flow Switch: P4 (PNP Open Collector, 2 Outputs), Regulator: R (With Regulator), ON/OFF Valve: V (With Air Operated), Restrictor: Without Restrictor, Filter: F (With Filter)

Type: 4 [High Flow, 500 â„“/min (ANR)], Port Size: 3N (NPT3/8), Digital Flow Switch: P4 (PNP Open Collector, 2 Outputs), Regulator: R1 (w/Regulator+Pressure Outlet Port Assembly), ON/OFF Valve: V (With Air Operated), Restrictor: Without Restrictor, Filter: F (With Filter)

Type: 3 [Standard, 100 â„“/min (ANR)], Port Size: 1 (One-touch Fitting: Size 3=ø10, Size 4=ø12), Digital Flow Switch: P4 (PNP Open Collector, 2 Outputs), Regulator: R1 (w/Regulator+Pressure Outlet Port Assembly), ON/OFF Valve: V (With Air Operated), Restrictor: S (With Restrictor), Filter: F1 (With Filter w/Differential Pressure Indicator)

Type: 3 [Standard, 100 â„“/min (ANR)], Port Size: 1 (One-touch Fitting: Size 3=ø10, Size 4=ø12), Digital Flow Switch: P4 (PNP Open Collector, 2 Outputs), Regulator: Without Regulator, ON/OFF Valve: V (With Air Operated), Restrictor: Without Restrictor, Filter: F (With Filter)

Type: 3 [Standard, 100 â„“/min (ANR)], Port Size: 2N (NPT1/4), Digital Flow Switch: P4 (PNP Open Collector, 2 Outputs), Regulator: Without Regulator, ON/OFF Valve: V (With Air Operated), Restrictor: S (With Restrictor), Filter: F (With Filter)

Type: 3 [Standard, 100 â„“/min (ANR)], Port Size: 2N (NPT1/4), Digital Flow Switch: P4 (PNP Open Collector, 2 Outputs), Regulator: Without Regulator, ON/OFF Valve: V1 (With Air Operated Flow Adjuster), Restrictor: Without Restrictor, Filter: F (With Filter)