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ZPT16 ZRJ'20 32 32 32 32 32 32 ZPT25 ZPT16 ~ '6 18 12.5 21 .5 33 56 B9 B9 89.5 3.5 1.2 Deep type mm ZPT32 33 33 33 33 33 33 M_I 1>A 1> 8 C 0 E F G 1:4 1:6 y H 92 6 ZPT400 105 110 105 110 105 110 105 110 .

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (mm) Model Standard stroke Manufacturable stroke range CXS6 CXS10 CXS15 CXS20 CXS25 CXS32 10, 20, 30, 40, 50 60 to 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 60, 70, 75 80 to 150 110 to 150 10, 15, 20, 25, 30, 35, 40, 45, 50, 60, 70, 75, 80, 90, 100 110

MGG

226 200 326 300 30 32 Rc 1/2 280 For long strokes Bracket mounting strokes Bore size (mm) Stroke range (mm) Bore size (mm) Bore size (mm) Bracket mounting stroke Z Y X W V U T S R Q Y R 63 80 100 63 80 100 63 80 100 350 to 1100 308 107 54 86 108 192 30 72 14 29 119 16 300mm or more 350 to 1200 355 131 66 104 128 224 35 89 19 40 145 23 400mm or more 350 to 1300 410 131 66 128 143 262 40 110

High Vacuum Angle Valve, XL Series

209 250 E Note 1) A 40 50 65 70 88 90 J 26 28 36 38 45 56 Model XLC-16 XLC-25 XLC-40 XLC-50 XLC-63 XLC-80 12 11 11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

Series PF2W Digital Flow Switch For Water

Specifications PF2W540/540T--1 PF2W200/201 Model PF2W511--1 Applicable flow rate sensor PF2W520/520T--1 PF2W504/504T--1 0.35 to 4.50 L/min 1.7 to 17.0 L/min 3.5 to 45.0 L/min 7 to 110 L/min Flow rate measurement range Note 1) 0.35 to 4.50 L/min 1.7 to 17.0 L/min 3.5 to 45.0 L/min 7 to 110 L/min Set flow rate range Note 1) 0.05 L/min 0.1 L/min 0.5 L/min 1 L/min Minimum set unit Note 1) Accumulated

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

(Example) SYJ3120-5M-M3 VJ3000-13-1 -+ Single Double Rated voltage 5 port DC AC (50/60 Hz) 5 6 V S R 1 2 3 4 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] For type W, DC voltage is only available.

125

fluctuation 10 to +10% of rated voltage* a a 12(P1) PA 2(A) 3(R) 1(P) 2(A) 3(R) 1(P) 2(A) 3(R) 1(P) 100 V 0.78 (With indicator light: 0.81) 110 V 0.86 (With indicator light: 0.89) 200 V 1.18 (With indicator light: 1.22) 220 V 1.30 (With indicator light: 1.34) G, L, M Apparent power [VA] AC 100 V 0.78 (With indicator light: 0.87) 110 V 0.86 (With indicator light: 0.97) 200 V 1.15 (With indicator

VDW

Thread type Voltage Rc G NPT Nil F N 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Port size Please consult with SMC regarding other voltages.

2/3 Port Valve

36 45 63 35.5 40 57 VXF2150 VXF2160 VXF2280 32.5 38 49 20 20 23 30 30 35 23 23 25 113 127 162 103 118 152 33 37 28 1 1 1 2 4.1-94 VXF Conduit: C VXF2150, 2160 VXF2280 Conduit K 39 N 96 39 41 Model VXF2150 110 144.5 VXF2160 VXF2280 DIN connector: D VXF2150, 2160 VXF2280 DIN connector K 59 N 96 59 60 Q 45 110 144.5 Model VXF2150 45 48 VXF2160 VXF2280 VX VNl VQ Conduit terminal: T VXF2150,

ZR

VAC ( Hz) 100, 110 VAC (With rectifier) Nil None Caution L LO Lead wire length 0.3 m Plug connector type Z With light/surge voltage suppressor (Possible only solenoid valve connector type.)

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 11 12 22 25 25 25 25 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 29 33 38 46 55 66 86 39 43 49 59 71 82 106 20 25 32 40 50 63 80 12.5 18 19.5 23.5 28 34.5 36 Up

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

servo motor (200 VAC) Encoder Absolute 20-bit encoder (Resolution: 1048576 p/rev) LEY -X5 Power consumption [W] Note 6) Horizontal 29 41 72 Vertical 11LEFS Standby power consumption when operating [W] Note 7) Horizontal 2 2 2 Vertical 11LEJS Max. instantaneous power consumption [W] Note 8) 445 725 1275 Type Note 9) Non-magnetizing lock Lock unit specifications 25AHolding force [N] 27 54 110

Compact

LEC Y Top mounting Bottom mounting With lock LEMHT32T-BWith lock LEMHT32UT-BMotorless LAT Motor cable length 300 LZ 65 20 167.3 (167) 0.3 (167) LC3F2 136.5 15 20 65 20 Table details Lock cable length 300 4 4 110 100 63 6H9 (+0.030 0 ) depth 8 Bottom mounting LEMHT32UT-135 124.7 (Table width) (119.4) 110 (64.4) Workpiece mounting center line (124) 93.5 6H9 (+0.030 0 ) depth 8 4 x M8 x 1.25

Compact 5-Port Solenoid Valve

For the part numbers of the SI units to be mounted, refer to page 110.

15

st or less 0.36 + (1.80 x 103) x [ST]: Over 110 st 0.50 + (2.40 x 103) x [ST]: 110 st or less 0.55 + (2.51 x 103) x [ST]: Over 110 st 25AOther inertia [kgcm2] 0.012 (LEYG25) 0.015 (LEYG25D) 0.035 (LEYG32) 0.061 (LEYG32D) LEC Friction coefficient 0.05 Mechanical efficiency 0.8 Note 7) LEC S Motor shape l40 l60 Motor type AC servo motor Reference motor spec.

JXCx-OMU0004

1800 110 1800 15 120 2000 120 2000 55 No.JXC-OMU0004-A 10.3 LES LES LES [mm/s] 20 2] 100 [mm/s [mm/s] 20 2] 500 [mm/s [mm] 1 3 LESH**J 20mm/s LESH**K 10mm/s LESH8R LESH16R LESH25R J K J K J K 4 6 15 23.5 43 77 7 10.5 25 39 71.5 128.5 [N] 10 15 35 55 100 180 *20%F.S.

smcmaintenancepartslist

Note 3) For wear ring A of 10, please consult with SMC. 110 Magnetically Coupled Rodless Cylinder/Direct Mount Type: Both Sides Piping Type Series CY3R 6, 10, 15, 20 25, 32, 40, 50 63 Replacement Procedure is P.316 Construction Both sides piping type Actuators Modular F.R.L.

CY1

1.0 S 63 63 83 W 25 30 35 X 10 16 19 Model CY1B6 CY1B10 CY1B15 ZZ 81 81 103 Port size M5 x 0.8 M5 x 0.8 M5 x 0.8 CY1B20 to 40 CY1B50, 63 (mm) B 36 46 60 70 86 100 MM x J M4 x 0.7 x 6 M5 x 0.8 x 8 M6 x 1.0 x 8 M6 x 1.0 x 10 M8 x 1.25 x 12 M8 x 1.25 x 12 C 32 38 D 22.8 27.8 35 43 53 66 E 30 32 G 8 8 9 11 14 14 H 20 20.5 22 29 33 33 I 28 34 40 50 58.2 72.2 K 8 10 15 16 25 26 L 66 70 80 92 110

SX

0.39 2.2 0.97 [0.61] 0.23 [0.32] 4.3 [2.4] SZ 1(P) port Rc 114 116 122 124 0.82 0.37 3.2 0.77 0.26 3.2 2 position 1 4 C8 SY 0.62 0.31 2.4 0.63 0.24 2.6 SX720--C8 5, 3 (EA, EB) Port One-touch fitting for 8 Exhaust center Pressure center Single Double Closed center 0.70 [0.56] 0.42 [0.46] 2.6 [1.9] 0.57 0.25 2.4 131 132 3 position SYJ 0.60 0.34 2.2 0.78 [0.57] 0.28 [0.22] 3.3 [2.4] Rc 1 8 110

Table of Contents

(mm) Weight (g) L1 L2 L3 D1 D2 Model L1 Nylon Urethane KQ2V04-M5 KQ2V04-01S KQ2V06-M5 KQ2V06-01S KQ2V06-02S KQ2V08-01S KQ2V08-02S KQ2V08-03S KQ2V10-02S KQ2V10-03S KQ2V12-03S KQ2V12-04S KQ2V16-03S KQ2V16-04S 6 14 7 15 26 24 30 47 40 49 63 80 103 110 Reference dimensions after R thread installation. Note 1) D: Max. diameter Note 2) ( ): Values for soft nylon.