Electric Actuator Miniature Rod Type Miniature Slide table Type

J 8 10 AP PNP (Pulse input type) C9 JXC9 (EtherNet/IP direct input type) Stroke(mm) * For details about controllers/driver and compatible motors, 25 25 refer to the compatible controllers/driver below. 50 50 75 75 I/O cable length [m] 6* 1* A* * Without cable Nil 1.5 Motor cable mounting direction 1 Top type 3 Nil 3 Entry on the right side 5 R 5 L Communication plug connector MJ *

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

5 CJ1 CJP CJ2 CM2 C85 !

XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

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4-3/8 4-1/2 4-3/4 4-3/4 4-7/8 5 150 5-3/8 5-3/8 5-3/8 5-1/2 5-1/2 5-1/2 5-3/4 6 CAUTION: Horizontal or angle mounted cylinders (anything other than vertical) creates a bend stress on the rod when extended, just from the weight of the rod and cylinder itself.

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4-3/8 4-1/2 4-3/4 4-3/4 4-7/8 5 150 5-3/8 5-3/8 5-3/8 5-1/2 5-1/2 5-1/2 5-3/4 6 CAUTION: Horizontal or angle mounted cylinders (anything other than vertical) creates a bend stress on the rod when extended, just from the weight of the rod and cylinder itself.

MU

D-A79W 13 13 14 14 14 2 1 5 5 10 5 15 10 15 15 D-F7/J79 D-F7V/J79C D-F7W/F7lWV D-J79W/F7NTL D-F7BAL/F7BAVL D-F79F 20 Mountable only for equivalent bore sizes 40, 50, 63. 6.5 7 6.5 6.5 6.5 D-P5DWL 5 5 5 Since this is a guideline including hysteresis, not meant to be guaranteed.

High Vacuum Angle Valve, XL Series

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

MU

D-A79W 13 13 14 14 14 2 1 5 5 10 5 15 10 15 15 D-F7/J79 D-F7V/J79C D-F7W/F7lWV D-J79W/F7NTL D-F7BAL/F7BAVL D-F79F 20 Mountable only for equivalent bore sizes 40, 50, 63. 6.5 7 6.5 6.5 6.5 D-P5DWL 5 5 5 Since this is a guideline including hysteresis, not meant to be guaranteed.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Indicator light 3.5 to 7 : AC 82.5 75 01 02 M plug connecter (M): VQZ2l5(R)-lMl56.5 Cover dia 1.5 Cross section 0.23mm2 (Lead wire) 58(63) 300 77(78) 89 Indicator light : AC 2.10-29 VQZ100/200/300 Base Mounted VQZ300 Valve single unit Grommet (G): VQZ3l5(R)-lGl02 03 37 5 2-4.5Mounting holes 23.5 5 R5 Cover dia 1.6 Cross section 0.34mm2 Manual override 2 A 45 18 3 R 1 P 47 76 300 (Lead wire

Moisture Control Tube

angle Tube O.D. 2 mm IDK02-100 IDK02-200 Tube O.D. 4 mm IDK04-100 IDK04-200 Tube O.D. 6 mm IDK06-100 IDK06-200 Size Tube length (m) 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 90 180 10 Single 270 CRB CRBU2 90 15 90 Double 10 100 90 180 1 Single MSU 90 3 90 Double 1 90 90 CRQ2 10 180 90 1 MSQ 2 90 3 Note) If the piping is longer than the above tube

CNG

Load in direction of rod extension Load in direction of rod retraction m 0.3MPa Graph 5 F 0.4MPa Graph 6 m 0.5MPa Graph 7 F 19 Model Selection Series CNG Selection Graphs Graph 5 Graph 2 0.3MPaP<0.4MPa 0.3MPaP<0.4MPa 200 200 100 100 40 30 40 50 30 40 50 32 40 25 Load weight: m (kg) Load weight: m (kg) 20 20 20 32 10 10 25 20 5 4 3 5 4 3 2 2 1 1 100 500 400 300 200 100 0.5 500 400 300 200

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Note 2) Through-hole in case of 5 mm stroke. Note 3) Through-hole in case of 5 to 15 mm stroke.

MXQ

P FR (2) 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 FP Note 2) W/ end lock is not available in Series MXQ6.

Turntable Cylinder Series MGT

Series MGT Turntable Cylinder Operating Conditions Allowable eccentric load 300 200 l 200 P = 0.5MPa MGTL63 P = 0.5MPa 100 MGTM63 m 100 Larger than 100st 50 Load weight m(kg) Load weight m(kg) 40 50st or smaller 75, 100st 30 Larger than 50st 20 50 40 25, 50st 10 30 5 4 3 2 20 10 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) Eccentric distance

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 60 12 3.2 26 5.8 2 39.5 60 12 3.2 26 5.8 2 39.5 75 17 4.2 28 7.5 3 50 75 17 4.2 28 7.5 3 50 Screw-in connection (Mounting hole) Model A 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 70.5 30.5 18 12

Guide Table Series MGF ø40, ø63, ø100 1

5 5 D-Y7BAL Since this is a guideline including hysteresis, not meant to be guaranteed.

CG5-S

23.9 63.5 9.7 5/8-18 202.5 FX 0.15 100 B 31.8 29.3 27.8 69.9 10.7 3/4-16 210.9 80 and 100mm-X165US are a future release.

Water-cooledThermo-chiller

Outlet pressure [60 Hz] 75 75 60 60 Outlet pressure [50 Hz] 45 45 30 30 Return port pressure Return port pressure 15 15 0 0 0 2 4 6 8 10 12 14 16 18 20 0 5 10 15 20 25 30 35 40 45 50 55 60 Flow rate (L/min) Flow rate (L/min) If the circulating fluid flow drops below 0.53 gpm (2 L/min)., the shutdown alarm activates and operation stops.

1.63

Note 1) 5 D-M9 10 2 pcs. 5 Note 2) 1 pc.

MK

5 !6 !7 !8 !