Base Mounted Metal Seal/Rubber Seal Series VQ

With lead wire ZS-20-A ZS-20-5A-50 0.6 m 3 m 5 m Nil 30 50 (The flow characteristics are for the supply pressure of 0.5 MPa.)

ITV

Count ARP Pressure Characteristics Flow Characteristics Set pressure: 10 kPa IR 0 1 10 kPa 20 kPa Output deviation factor (% F .S.) 20 IRV 0.5 40 kPa Set pressure (kPa) 40 VEX Out 60 kPa 60 0 SRH Return 80 kPa 80 SRP 0.5 100 kPa 100 SRF 100 80 60 40 1 4 20 0 1 1.5 0.5 2 2.5 3 3.5 120 VCHR Supply pressure (kPa) Flow rate (L/min (ANR)) ITV ITV IC ITVX PVQ VEF VEP VER VEA VY1 VBA VBAT AP100

C95

Bore size (mm) C76 GKM10-20 40 10 20 20 10 + 0.50 + 0.15 32 52 M10 x 1.25 GKM12-24 48 12 24 24 + 0.50 + 0.15 40 12 62 M12 x 1.25 C85 GKM16-32 64 16 32 32 + 0.50 + 0.15 50, 63 16 83 M16 x 1.5 + 0.60 + 0.15 M20 x 1.5 GKM20-40 80, 100 20 80 20 105 40 40 C95 CP95 NCM NCA D-X 20Piston Rod Ball Joint KJ (ISO 8139) Steel Data d3 Part no. d1H9 h d6 max. b1h12 l min. a l3 Bore size (mm) 32 KJ10D 10

MXH Series Compact Slide

63.5 64.5 34 34 32 7 32 7 6 20 20 11 6 15 NS 15.5 52.5 + Stroke 68 + Stroke 32 4-M5 x 0.8 depth 8 10 + Stroke 15 20 Stroke (mm) LT NS LB J LA 5 20 64 4 10 10 20 10 64 4 15 74 25 20 4 20 74 25 4 20 25 40 84 4 30 30 40 30 84 4 40 20 94 50 20 6 50 104 70 25 6 25 60 70 114 6 30 30 36 Compact Slide MXH Series Auto Switch Specifications Auto Switches/Proper Mounting Position for Stroke

AS

Applicable cylinder bore size (mm) Speed controller with Model Port size 4 6 8 10 12 One-touch fittings for AS121-M5 M5 x 0.8 6, 10, 16, 20 1 8 AS221-01 R 20, 25, 32 metal body specifications 1 4 AS221-02 R 20, 25, 32, 40 3 8 AS321-03 R Uses flame resistant resin as standard.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

M14 x 1.5 30 22 1/4 37 15 106 50 9 25 73 53 14 23 19 20 50 28 17 17 13 M10 x 1.5 20 35 22 M16 x 1.5 30 26 3/8 43 18 112 63 8 28 80 60 16 27 21 22.4 55 30 17 17 13 M10 x 1.5 22 40 25 M18 x 1.5 30 26 3/8 47 20 116 80 8 32 100 75 18 31 26 28 65 32 22 20 15 M12 x 1.75 26 45 29 M22 x 1.5 35 30 1/2 57 22 127 100 6.5 38 118 90 20 35 34 35.5 80 35 27 19 16 M12 x 1.75 27 50 34 M27 x 2 35 32 1/2 66

Vacuum Pad

QU-5M-RRD

Vacuum Pad

QU-5M-RRD

Vacuum Pad

QU-5M-RRD

HRX-OM-Y098

-A-20 .

HRX-OM-X010

C HRZ008-L1-F 16 14 [HRZ008-L1-F] Cooling capacitykW 12 10 8 6 4 2 0 -20 -10 0 10 20 30 40 Circulating fluid setting temp.deg.

Compact Cylinder with Air Cushion Series RQ

Piston seals Wide size variations from 20 to 50 Standard stroke Model Mounting Rod end configuration Auto switch 15 20 25 30 40 50 75 100 R(D)Q20 Through hole Double end tapped Foot type Front flange type Rear flange type Double clevis type 20 to 50 Direct mount auto switch R(D)Q25 Female threads R(D)Q32 Male threads 32 to 50 Rail mount auto switch R(D)Q40 R(D)Q50 Sizes 20 and

HRX-OM-R016

-(BJMT) . 9-5 9.3.2 HRS030-W-20-(BJMT) . 9-5 9.4 Cooling capacity . 9-6 9.4.1 HRS030--20-(BJMT) . 9-6 9.5 Heating capacity . 9-6 9.5.1 HRS030-A-20-(BJMT) . 9-6 9.5.2 HRS030-W-20-(BJMT) . 9-6 9.6 Pump capacity. 9-7 9.6.1 HRS030--20-(BJM) . 9-7 9.6.2 HRS030--20-T . 9-7 HRS Series HRX-OM-R016 Contents 9.6.3 HRS030--20-MT . 9-8 9.7 Required facility water flow (for water-cooled type) . 9-8 9.8

HRX-OM-W038

0.0 5 0 10 20 30 5 0 10 20 30 Circulating fluid flow[L/min] Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS040--20-(BJM)) 9.6.2 HRS040--20-T,-MT 0.5 50 Available area 0.4 40 Circulating fluid pressure[MPa] Pump head[m] Outlet50Hz Outlet:60Hz 0.3 30 0.2 20 0.1 10 Return port Available area 0 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-8 Pump capacity(HRS040--20-T/-MT)

Step Motor Controller

LE CP 1 (14.2) (13.5) Connector C Actuator side (Terminal no.) 1 2 Cable length (L) 1 3 5 8 A B C (14) (18) A1 B1 8 1.5 m 3 m 5 m 8 m (17.7) (17.7) 5 6 1 2 Connector A A6 B6 Connector D 10 m L (11) (30.7) (14.7) 5 6 15 m (10) 20 m Controller side Produced upon receipt of order 8 10 15 20 LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) (Terminal no.) (14.2) (13.5

HRX-OM-W060

. 8-1 8.1.2 Refrigerant with GWP reference. 8-2 8.1.3 Communication specifications . 8-2 8.2 Dimensions . 8-3 8.2.1 HRL100-A-20 . 8-3 8.2.2 HRL200-A-20 . 8-4 8.2.3 HRL300-A-20 . 8-5 8.3 Flow Diagram . 8-6 8.3.1 HRL-A-20 . 8-6 8.4 Cooling Capacity . 8-7 8.4.1 HRL100A20 CH1 . 8-7 8.4.2 HRL200A20 CH1 . 8-7 8.4.3 HRL300A20 CH1 . 8-8 8.4.4 HRL100/200/300-A-20 CH2 . 8-8 8.5 Pump Capacity . 8-9

Guide Cylinder Series MGG

the same as those on pages 17, 18, 19 and 20.

Compact Cylinder with Lock Series CLQ

Through holes Double end taps Extension locking Easy manual unlocking B Locked A 40 to 100 20 to 32 W Retraction locking Unlocked 40 to 100 20 to 32 W A B Wide variations from 20 to 100 Standard stroke (mm) Locking direction Bore size (mm) Mounting Series 5 10 15 20 25 30 35 40 45 50 75 100 20 Through holes, double end taps common 25 Extension locking 32 40 CLQ Through holes 50 Retraction

HRX-OM-O021

[] 60Hz 50Hz Fig. 9-5 Heating capacity(HRS050-A-20-(BJM)) 9.5.2 HRS050-W-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 5 20 25 32 40 1500 1500 5 20 25 32 40 Heating capacity [W] Heating capacity [W] 1000 1000 500 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature[] Circulating fluid temperature[] 50Hz 60Hz Fig. 9-6 Heating capacity(HRS050-W-20

HRX-OM-R005

capacityW 1500 e e 1500 40 32 25 20 5 40 32 25 20 5 1000 1000 500 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature Circulating fluid temperature 50Hz 60Hz Fig. 9-6 Heating capacity(HRS060-W-20-(BJM)) HRS Series 9.4 Cooling capacity 9-7 HRX-OM-R005 Chapter 9 Documents 9.6 Pump capacity 9.6.1 HRS060--20-(BJM) 0.7 70 0.6 60 Circulating fluid pressure[MPa]