CLS

m 0.3 MPa Graph (5) F 0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 9-9-6 7 Model Selection Series CLS Selection Graph Graph (5) Graph (2) 0.3 MPa ) P < 0.4 MPa 0.3 MPa ) P < 0.4 MPa 4000 4000 3000 3000 250 2000 2000 200 Load weight: m (kg) Load weight: m (kg) 180 CL 1000 1000 160 700 800 900 700 800 900 250 140 CL1 600 600 125 200 500 500 180 MLGC 400 400 160 300 300 140 CNG 125 200 200 MNB

5 Port Air Operated Valve

) 40.5 2 45.5 2 x 2 (Breathing hole) 17.8 (Breathing hole) 7.5 1 P P 1 7.5 7.5 M5 x 0.8, 1/8 [1(P) port] M5 x 0.8, 1/8 [1 (P) port] 12.9 10 2 x M4 x 0.7 thread depth 5 (For mounting) 10 12.5 12.5 2 x M4 x 0.7 thread depth5 (For mounting bracket) VFA1120-01(-F)(-P) VFA1220-01(-F)(-P) (16.6) (16.6) (Distance between ports) (Distance between ports) 38 1/8 [4 (A), 2 (B) port] 12 11.5 1/8 [4 (

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Rod end nut Rod end male thread 7-6-53 54 (In the case of without auto switches, A, B, F and P dimensions will be only changed. Refer to the dimension chart.)

High Vacuum Angle Valve, XL Series

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

PF-OMN0009_C

PF3W520 [ M P a ] [ M P a ] PF3W540 PF3W511() [ M P a ] [ M P a ] PF3W521() [ M P a ] -33No.PF-OMN0009CN-F PF3W511(PVC ) PF3W521(PVC ) [ M P a ] [ M P a ] -34No.PF-OMN0009CN-F PF3W504/520/540 PF3W504S/520S/540S [MPa] [MPa] [ M P a ] [ M P a ] a] [MP a] [MP PF3W511() PF3W521() PF3W511/521(PVC ) [MPa] [ M P a ] [ M P a ] a] [MP [MPa] a] [MP -35No.PF-OMN0009CN-F IN 3F.S.8 cm

Electric Actuator with Integrated Guide

P.68 Non-standard Motor Mounting P.69 Deflection Data P.71 Part Number Designations P 1 E F G LTF 6 100 R 2 X10 Motor specification Lead screw lead Series Series 6 Nil X10 F H L 6 8 Standard motor 6mm Cable length Non-standard motor 10mm Series 8 2 3 4 5 2m 20mm Motor specification 3m Motor output Nil G R Y Standard motor 4m Brake Matsushita Electric Industrial Co., Ltd. 5m Nil K E

Guide Cylinder Series MGG

220 Allowable end load F (N) MGT MGGL 100Stroke 1 1000st (Ball bushing bearing type) 900st Deflection Y (mm) 800st 700st 0.5 600st D500st 400st -X st: Stroke (mm) 200st 300st Individual -X 100st 0 0 20 40 60 80 100 120 140 160 180 200 220 240 260 280 300 Allowable end load F (N) 367 Series MGG Allowable Eccentric Load Slide Bearing: MGGM Stroke 3000 P = 0.5 MPa 2000 MGGM100l l MGGM801000

Fieldbus System

9 P. 11, 12 P. 17 P. 19 How to Order Specifications Parts Description Dimensions Series SY (IP67) Digital Unit Unit to input or output digital (switch) signals P. 9 P. 13, 14 P. 18 P. 20 How to Order Specifications Parts Description Dimensions P.27 Series SV (IP67) Analog Unit Manifold solenoid valves Unit to input or output analog (voltage/current) signals P. 10 P. 15, 16 P. 18

Rubber seal 5 Port Solenoid Valve Series SYJ7000

1.6 (PE port) 1/8 (P, R1, R2 port) B A 17 One-touch fitting (A, B port) (4.9) 36 Applicable tubing O.D.: 6, 1/4" : 8, 5/16" (3.6) L plug connector (L): SYJ7120-L-01 (-F) M plug connector (M): SYJ7120-M-01 (-F) M8 connector (W0): SYJ7120-W0-01 (-F) DIN terminal (D): SYJ7120-D-01 (-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 65 31.5 [38.5] 101 Max. 10 57.5 16.1 46.2 31.1

Cylinder with Lock Series CLS

(Rc, NPT, G) Cylinder port 4 x J M MM BZ GB R TDe8 D EA TY E C B W FA AL C A K F M TT N N B S + Stroke H BY TX TZ ZZ + Stroke BW For 180, 200, 250 Z1 + l + 1/2 Stroke With rod boot BV BZ BG BE e 4 x MA Effective thread depth MB (for holding eyebolt) f l ZZ1 + l + Stroke h + l (mm) Stroke range (mm) Bore size (mm) A AL B BABB BC BV BW BY BZ BP C D E EA F FA GAGB H P N K KA M J MM GC BD BG

SV

M3 Terminal screw 102.9 27.3 A A A A A 39.5 40 A B A B 69.1 6.2 Silencer (Air discharge port) Manual override Press and turn for the locking type. ( DIN rail holding screw ) (Built-in silencer specifications) 4(A) port side: Orange 2(B) port side: Green With option L2 5 (Rail mounting hole pitch: 12.5) L1 50.5 4 A 4 A 4 A 4 A 54.5 3/5 E 3/5 E 86.5 79 92.3 94.5 2 B 2 B 2 B 2 B 1 P 1 P F F

Thermo-chiller/Rack Mount Type

Mounted p. 34 Air-cooled Refrigeration (Single-phase 100/115 VAC) p. 13 With Feet/Without Rack Mounting Brackets p. 35 Water-cooled Refrigeration (Single-phase 100/115 VAC) p. 13 Removed Parts p. 35 HRR012/018/024/030 How to Order VOptional Accessories Air-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 14 qConcentration Meter p. 36 Water-cooled Refrigeration (Single-phase

MGG

Stroke (mm) 200st 1 300st 1 200st 100st 200st 100st 100st 75st 75st 0 0 0 0 0 0 10 20 30 40 50 60 10 20 30 40 50 20 40 60 80 100 Allowable end load F (N) Allowable end load F (N) Allowable end load F (N) MGGL 40Stroke 4 (Ball bushing type) 800st Deflection Y (mm) 3 700st 600st 2 500st 400st 1 300st st: Stroke (mm) 200st 100st 0 0 20 40 60 80 100 120 Allowable end load F (N) MGGL 50Stroke

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

2 A B A B Stroke 20 to 50 mm Stroke 20 to 50 mm Dimensions: 10 mm Stroke Dimensions: 10 mm Stroke (mm) (mm) Model A B C D F H I J K P Q: 6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 118 136.5 13 140 5 12.5 20 22 40 43 13 15.5 36 48.5 50 115 13 133.5 13 137 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 40 119 137.5 141 6 19.5 13.5 25 28 50 53

2/3 Port Valve

Water Air Oil Low vacuum (1 Torr) Coolant Steam Applicable fluid 1 8 1 4 3 8 1 2 3 4 Rc(PT) 1 Port size 1 4 1 1 2 1 2 32A 40A 50A Flange 65A 80A Page P.4.2-3 to P.4.2-10 P.4.2-11 to P.4.2-18 P.4.2-19 to P.4.2-27 P.4.2-28 to P.4.2-34 P.4.2-35 to P.4.2-42 4.2-2 2 Port Valve for Comressed Air and Air-hydro Circuit Control Process Valve SeriesVNA Universal 2 Port Valve Exclusively for air pressure

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

M16 x 1.5 21 34f8 22 5 Hydraulic Cylinder: 7MPa Series CHN Axial foot type: CHNL H GA2 GB2 I Rc P Rc P Rc P K A F GA1 GB1 T V Cushion valve Effective thread H2 width across flats B2 Cushion valve Cushion valve H1 width across flats B1 MM D 4-LD W LH LT Width across flats E GB3 GA3 Air release Air release NA NB S + Stroke X X LS + Stroke Y Y LX ZZ + Stroke LZ (mm) Bore size (mm) Stroke range

5 Port Solenoid Valve Series VQZ1000/2000/3000

3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) VQ1000-FPGC4 M5 F Option None Nil OUT side port size DIN rail mounting (For manifold) IN side port size M5 C3 C4 C6 D M5 thread 3.2 one-touch fitting 4 one-touch fitting 6 one-touch fitting C4 C6 4 one-touch fitting 6 one-touch fitting F With bracket Name plate N Note) When two or more symbols are specified, indicate them

Compressed Air Preparation Filter

10 Micro Mist Separator AMD Series Standard Specifications p. 11 Flow Rate Characteristics p. 12 Activated Carbon Filter AMK Series Standard Specifications p. 19 Flow Rate Characteristics p. 20 AFF AM AMD Construction p. 21 Dimensions p. 23 Modular Connection Example p. 25 Accessories Sold Separately p. 27 International Standard ISO 8573-1:2010 p. 28 Specific Product Precautions

Rubber seal 5 Port Solenoid Valve Series SYJ5000

-00-P How to Order Type 41 (5 Port/Base mounted) SS5YJ5 41 05 M5 Stations 02 2 stations P, R port thread type -+ -+ R port 1/8 : : R P Nil F N T Rc G NPT NPTF 20 20 stations A, B port M5 x 0.8 M5 M5 x 0.8 A, B port size P port 1/8 Applicable solenoid valve SYJ540SYJ543SYJ550SYJ553Type 42 (5 Port/Base mounted) How to Order SS5YJ5 42 05 C6 Stations Applicable blanking plate assembly SYJ5000

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Order seal kit in accordance with the bore size. 6-5-59 60 Series CBG1 Rubber Bumper Type: CBG1BN Head end lock: CBG1BN Stroke H Bore size MM H GA GB Width across flats B1 2-Rc P 2-TC TD D E 0 0.05 0 0.05 I E AL TE 2-TC K F TA DL2 TF TG A F Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com