Fieldbus System

9 P. 11, 12 P. 17 P. 19 How to Order Specifications Parts Description Dimensions Series SY (IP67) Digital Unit Unit to input or output digital (switch) signals P. 9 P. 13, 14 P. 18 P. 20 How to Order Specifications Parts Description Dimensions P.27 Series SV (IP67) Analog Unit Manifold solenoid valves Unit to input or output analog (voltage/current) signals P. 10 P. 15, 16 P. 18

Rubber seal 5 Port Solenoid Valve Series SYJ7000

1.6 (PE port) 1/8 (P, R1, R2 port) B A 17 One-touch fitting (A, B port) (4.9) 36 Applicable tubing O.D.: 6, 1/4" : 8, 5/16" (3.6) L plug connector (L): SYJ7120-L-01 (-F) M plug connector (M): SYJ7120-M-01 (-F) M8 connector (W0): SYJ7120-W0-01 (-F) DIN terminal (D): SYJ7120-D-01 (-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 65 31.5 [38.5] 101 Max. 10 57.5 16.1 46.2 31.1

Cylinder with Lock Series CLS

(Rc, NPT, G) Cylinder port 4 x J M MM BZ GB R TDe8 D EA TY E C B W FA AL C A K F M TT N N B S + Stroke H BY TX TZ ZZ + Stroke BW For 180, 200, 250 Z1 + l + 1/2 Stroke With rod boot BV BZ BG BE e 4 x MA Effective thread depth MB (for holding eyebolt) f l ZZ1 + l + Stroke h + l (mm) Stroke range (mm) Bore size (mm) A AL B BABB BC BV BW BY BZ BP C D E EA F FA GAGB H P N K KA M J MM GC BD BG

SV

M3 Terminal screw 102.9 27.3 A A A A A 39.5 40 A B A B 69.1 6.2 Silencer (Air discharge port) Manual override Press and turn for the locking type. ( DIN rail holding screw ) (Built-in silencer specifications) 4(A) port side: Orange 2(B) port side: Green With option L2 5 (Rail mounting hole pitch: 12.5) L1 50.5 4 A 4 A 4 A 4 A 54.5 3/5 E 3/5 E 86.5 79 92.3 94.5 2 B 2 B 2 B 2 B 1 P 1 P F F

Thermo-chiller/Rack Mount Type

Mounted p. 34 Air-cooled Refrigeration (Single-phase 100/115 VAC) p. 13 With Feet/Without Rack Mounting Brackets p. 35 Water-cooled Refrigeration (Single-phase 100/115 VAC) p. 13 Removed Parts p. 35 HRR012/018/024/030 How to Order VOptional Accessories Air-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 14 qConcentration Meter p. 36 Water-cooled Refrigeration (Single-phase

MGG

Stroke (mm) 200st 1 300st 1 200st 100st 200st 100st 100st 75st 75st 0 0 0 0 0 0 10 20 30 40 50 60 10 20 30 40 50 20 40 60 80 100 Allowable end load F (N) Allowable end load F (N) Allowable end load F (N) MGGL 40Stroke 4 (Ball bushing type) 800st Deflection Y (mm) 3 700st 600st 2 500st 400st 1 300st st: Stroke (mm) 200st 100st 0 0 20 40 60 80 100 120 Allowable end load F (N) MGGL 50Stroke

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

2 A B A B Stroke 20 to 50 mm Stroke 20 to 50 mm Dimensions: 10 mm Stroke Dimensions: 10 mm Stroke (mm) (mm) Model A B C D F H I J K P Q: 6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 118 136.5 13 140 5 12.5 20 22 40 43 13 15.5 36 48.5 50 115 13 133.5 13 137 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 40 119 137.5 141 6 19.5 13.5 25 28 50 53

2/3 Port Valve

Water Air Oil Low vacuum (1 Torr) Coolant Steam Applicable fluid 1 8 1 4 3 8 1 2 3 4 Rc(PT) 1 Port size 1 4 1 1 2 1 2 32A 40A 50A Flange 65A 80A Page P.4.2-3 to P.4.2-10 P.4.2-11 to P.4.2-18 P.4.2-19 to P.4.2-27 P.4.2-28 to P.4.2-34 P.4.2-35 to P.4.2-42 4.2-2 2 Port Valve for Comressed Air and Air-hydro Circuit Control Process Valve SeriesVNA Universal 2 Port Valve Exclusively for air pressure

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

M16 x 1.5 21 34f8 22 5 Hydraulic Cylinder: 7MPa Series CHN Axial foot type: CHNL H GA2 GB2 I Rc P Rc P Rc P K A F GA1 GB1 T V Cushion valve Effective thread H2 width across flats B2 Cushion valve Cushion valve H1 width across flats B1 MM D 4-LD W LH LT Width across flats E GB3 GA3 Air release Air release NA NB S + Stroke X X LS + Stroke Y Y LX ZZ + Stroke LZ (mm) Bore size (mm) Stroke range

5 Port Solenoid Valve Series VQZ1000/2000/3000

3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) VQ1000-FPGC4 M5 F Option None Nil OUT side port size DIN rail mounting (For manifold) IN side port size M5 C3 C4 C6 D M5 thread 3.2 one-touch fitting 4 one-touch fitting 6 one-touch fitting C4 C6 4 one-touch fitting 6 one-touch fitting F With bracket Name plate N Note) When two or more symbols are specified, indicate them

Compressed Air Preparation Filter

10 Micro Mist Separator AMD Series Standard Specifications p. 11 Flow Rate Characteristics p. 12 Activated Carbon Filter AMK Series Standard Specifications p. 19 Flow Rate Characteristics p. 20 AFF AM AMD Construction p. 21 Dimensions p. 23 Modular Connection Example p. 25 Accessories Sold Separately p. 27 International Standard ISO 8573-1:2010 p. 28 Specific Product Precautions

Rubber seal 5 Port Solenoid Valve Series SYJ5000

-00-P How to Order Type 41 (5 Port/Base mounted) SS5YJ5 41 05 M5 Stations 02 2 stations P, R port thread type -+ -+ R port 1/8 : : R P Nil F N T Rc G NPT NPTF 20 20 stations A, B port M5 x 0.8 M5 M5 x 0.8 A, B port size P port 1/8 Applicable solenoid valve SYJ540SYJ543SYJ550SYJ553Type 42 (5 Port/Base mounted) How to Order SS5YJ5 42 05 C6 Stations Applicable blanking plate assembly SYJ5000

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Order seal kit in accordance with the bore size. 6-5-59 60 Series CBG1 Rubber Bumper Type: CBG1BN Head end lock: CBG1BN Stroke H Bore size MM H GA GB Width across flats B1 2-Rc P 2-TC TD D E 0 0.05 0 0.05 I E AL TE 2-TC K F TA DL2 TF TG A F Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Digital Pressure Switch ( compatible)

[F 0] Display units, switch output specifications and diagnostic information selection function Page 30 Units specification Pressure range Default setting ISE20B MPa "Nil" or M ZSE20B(F) kPa ISE20B P psi ZSE20B(F) Item Default setting Switch output specifications PNP Diagnostic information ALL -28No.PS-OMV0006-D [F 1] Setting of OUT1 Page 32 Item Explanation Default setting Output mode Either

LEC-OM02904

P-D P P C C G3 D (2) G4 5m 5m (1) 1.

Electric Actuators

Press MANUAL button ( ) once for sizing operation (speed, sizing amount are specified values) P P MOVE Test P P P Return to ORIG Compatible Compatible P Operation of the specified step data P P Test drive Compatible Compatible (Continuous operation) P Forced output Compatible ON/OFF of the output terminal can be tested.

5 Port Solenoid Valve SY Series

) G H 1 2 23 32.3 (A, B port) 1/8 0.8 1.6 16.2 (20) 15 EA P EB 28.1 [32] For manifold gasket positioning 22.2 die-cast hole (P, EA, EB port) 1/8 27.2 32.5 20.5 23 32.3 L plug connector: L SY5120-L(-F ) 1 2 C4, N3 C6, N7 C8, N9 M plug connector: M SY5120-M(-F ) DIN terminal (D): C4, N3 C6, N7 C8, N9 SY5120-W0(-F ) 1 2 M8 connector (W0): C4, N3 C6, N7 C8, N9 1 2 C4, N3 C6, N7 C8, N9 1 2 SY5120

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

8.5 13 12.7 2-2.6 (For manifold mounting) 28.1 [35.1] (Light/surge voltage suppressor) 2-2.6 (For mounting) + 14.5 3 23 20 2.3 55.6 [57.8] 12.7 28.1 [35.1] 8 9 M5 x 0.8 (P, R port) 23 7 (Bracket) R P 11 11.5 1.4 (PE port) L plug connector (L): SYJ52-L-M5 (-F) M plug connector (M): SYJ52-M-M5 (-F) DIN terminal (D): SYJ52-D-M5 (-F) M8 connector (M0): SYJ52-W0-M5 (-F) Applicable cable O.D.

A_HEC-OM-K001

During Auto tuning Auto tuning failure A T 1 E R R 1 9 P V < 2 3 . 0 C # 1 A T F a i l u r e A u t o T u n i n g M O D E S h u t O f f C a n c e l : A T k e y <4> External sensor sampling cycle setting: Mode indication External Sensor Sampling Cycle. Default value: 180 sec. Setting range 10 to 999 sec.

Electric Actuator Miniature Rod Type Miniature Slide table Type

The higher the set value, the quicker it stops. f < Pushing force> Pushing force ratio is defined. /See 7.3 Caution(12) on p.43 and Caution(14) on p.44 g < Trigger LV> The condition at which INP output signal is turned on. Set it at the value equivalent to the pushing force or less.