CLS

W FA AL C B A K F N N M TT S + Stroke H BY TX TZ ZZ + Stroke BW With rod boot 180, 200, 250 Z1+ l + 1/2 stroke BV BZ BG BE e 4-MA Effective thread depth MB (To attach eyebolt) f l 15 h + l ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) J M AL B C E F FA GA K KA N A BA BB BC BD BG BE BZ BV BW BP D EA GB GC H MM P BY MB MA 125 140 160 180 200 250 14 14 14 17 17 20 15 15 17 20 20 25 31 31

energy saving effect

temperature 32C 25 25 Ambient temperature 43C Cooling capacity [kW] Cooling capacity [kW] 24 20 20 Facility water temperature 40C 15 15 Ambient temperature 45C 10 10 5 5 5 10 15 20 25 30 35 0 5 10 15 20 25 30 35 0 Circulating fluid temperature [C] Circulating fluid temperature [C] 170 Thermo-chiller Inverter Type HRSH Series If the product is used at altitude of 1000 m or higher, refer

Air Slide Table Series MXQ

bore size Adjustment range Nil -X11 -X12 5 mm 15 mm 25 mm 6 8 12 16 20 25 6 8 12 16 20 25 -X12 (adjusting range: 25 mm) is not available in Series MXQ6.

2/3 Port Valve

e, r are for selection of valve composition.

58

Made to Order specifications (For details, refer to pages 25 to 29.)

MXS

Model H G A B C J* K E D F 16.5 MXS-AT6 5 MXS 6 7 21 19 8 5 10.5 2.5 M2.5 X 8 M5 X 0.8 * MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 25 9 6 12.5 3 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 32 13 8 18.5 4 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 40 15 10 23 5

MXS Series Air Slide Table

Applicable model H G A B C J K E D F 16.5 MXS-AT6 5 MXS 6 7 10.5 2.5 21 19 8 5 M2.5 X 8 M5 X 0.8 MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 12.5 3 25 9 6 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 18.5 4 32 13 8 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 23 5 40

Air Fittings & Tubing

H w H w H e e H H r 2.2-2 Series KJ Male connector: KJH Thread (T) UNF NPT 10-32UNF <10-32UNF> <10-32UNF> Tube O.D. (inch) H (Hex.) Min. hole dia.

Low Profile Air Gripper Series MHF2

7.7 14.8 15 19 25 E 4 x 3.4 through (Mounting hole) MHZ 0 0.1 20 27 1 27 1 MHF 4 x 5.5 M5 x 0.8 Close: 0 +0.1 0 Finger opening port E-E MHL Open: 481 Use the attached hexagon socket head screws for mounting holes.

CKZ2N

0.03 30 3 25 0.05 R45 50 0.05 6.5 6.5 18 10 10 18 R25 19 R6 R6 R25 19 19 19 NAAMS code A Weight kg (lbs) NAAMS code A Weight kg (lbs) B C D E F G H I B C D E F G H I Part no.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

2 e @1 q @7 @5 @8 MY CXSM10 CXSM15 CY @0 !5 @9 @4 r w !3 i !0 @2 u t !6 @0 !5 @9@3@4r w !3i!0@2u t!6 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20!4 y e !1 !2 @3 @1 q !4y e !1 !2 q @1 Data CXSM20 to 32 @0 !5 !6 @3 @4rw o i !0 u @2 t !4 y e !1 !

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

L dimension 223 235.5 248 260.5 273 285.5 298 310.5 323 335.5 Weight (g) 56.4 59.6 62.7 65.9 69.1 72.2 75.4 78.6 81.7 84.9 20 21 22 23 24 25 26 27 28 29 No.

Compact Manifold Regulator Series ARM5

q i w t y ARJ w r AR425 to 935 t AMR e ARM u y u q i ARP r IR o Replacement Parts Component Parts IRV Description Material Part no.

SYJ300/500/700

(For details, refer to page 4-4-25.) 4-4-20 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Construction q e r t w y q e r t w y N.C. N.O.

RSQ

W I T 25 24 14 U 10 (11) 20 (22) 4-N through 8-O counterbore 28 100 + Stroke A + 2 stroke B + Stroke E M 0.2 Built-in One-touch fittings Tubing O.D.

SYJ3000/5000/7000

21 25 21 Pg7 28 25 28 25 28 Applicable cable O.D. 3.5 to 7 28 Refer to page 1-5-79 for dimentions with connector cable. 1-5-56 57 5 Port Solenoid Valve Rubber Seal Series SYJ7000 3 Position Closed Center/Exhaust Center/Pressure Center [ ]: AC 3 4 5 G H 3 4 5 G H C6, N7 C8, N9 Grommet (G), (H): SYJ7 20-01 Built-in One-touch fitting: SYJ7 20G: Approx. 300 H: Approx. 600 (Lead wire length)

High Power Cylinder Series RHC

8-J GA WH ND H1 MM I D E E Effective thread K FA JC JC FB A NF C H S + Stroke B ZZ + Stroke (mm) H GA 80 FB 16 FA 10 EA 23 D 62 C 20 B 53 A E 0 Bore size (mm) Stroke range (mm) Effective thread length 50 70 35 32 250 to 1000 50-0.042 0 80 16 10 23 58 20 60 80 35 32 250 to 1000 63 55-0.074 0 90 20 10 23 61 25 75 95 40 37 250 to 1000 80 65-0.074 0 95 20 10 25 63 30 90 116 40 37 250 to 1000

Step Motor Controller

Enable switch (Option) 5 6 Key switch Switch for each input 7 Cable Length: 3 meters 8 Connector A connector connected to CN4 of the controller i u 25 22.5 24

Mechanically Jointed Rodless Cylinders

Load Weight Allowable Moment MY3A, MY3B/m1 MY3A, MY3B/M1 MY3A, MY3B/M2 MY3A, MY3B/M3 40 30 80 200 200 50 100 40 30 20 100 10 50 40 30 50 40 30 20 5 4 3 10 20 20 Load weight (kg) 63 q Moment (Nm) Moment (Nm) Moment (Nm) 5 4 3 63 50 40 63 63 10 10 2 50 50 50 t w e r 5 4 3 2 5 4 3 1 32 40 40 40 0.5 0.4 0.3 1 25 2 2 32 32 32 20 0.5 0.4 0.3 1 0.2 1 25 16 25 25 20 0.5 0.4 0.3 0.1 0.5 0.4 0.3 0.2

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C