Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

, 150, 200, 250, 300, 350 400, 450, 500 15 1000 Note 2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact P/A if the maximum stroke will be exceeded.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

JIS symbol 5 Port 4 Port Fluid Specifications Air 22~100 (0.15~0.7) 15~100 (0.1~0.7) 22~100 (0.15~0.7) 2 Position single 2 Position single 2 Position single 2 Position double 3 Position 2 Position single 2 Position double 3 Position A B A B Operating pressure range PSI (MPa) P R R P R Operating pressure to 100 (Operating pressure to 0.7) 15~100 (0.1 to 0.7) 22~100 (0.15 to 0.7) Max.140 Not

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

It can be used in the vacuum (up to 100 kPa) or low pressure line with 0.15 MPa or less. Specifications Base mounted (SYJ714R, SYJ724R) Applicable model 100 kPa to 0.7 Main pressure Operating pressure range MPa 0.15 to 0.7 External pilot pressure P, R port 1/8, 1/4 Note 1) For manifold base, refer to page 39.

Vacuum Unit Ejector / Vacuum Pump System

ZK2-PS1-A ZK2-PS3-A Model (Sensing unit: Standard model (PSE541) (PSE543) number) Rated pressure range 0 to -101 kPa -100 to 100 kPa Proof pressure 500 kPa Output voltage 1 to 5 VDC Output impedance Approx. 1 k Power supply voltage 12 to 24 VDC 10%, Ripple (p-p) 10% or less Current consumption 15 mA or less Accuracy 2% F.S. (Ambient temperature at 25 oC) Linearity 0.4% F.S.

Air Slide Table

100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height interchangeable type MXQ 10 10 10 10 10 10 20 20 20 20 20 20 30 30 30 30 30

Cylinder with lock

Doc. no.C96N-OM0197Q PRODUCT NAME Cylinder with lock MODEL / Series / Product Number CP96N*32&100-*C Contents Safety Instructions P.2 1. Product Specifications P.4 1-1. Cylinder specifications P.4 1-2. Lock unit specifications P.4 1-3. Stop accuracy P.4 1-4. Precautions on model selection P.5 2. Installation and Handing P.9 2-1. Air supply P.9 2-2. Design P.10 2-3. Mounting P.11 2-4.

Cylinder with lock

Doc. no.C96N-OM0198Q PRODUCT NAME Cylinder with lock MODEL / Series / Product Number C96N*32&100-*C Contents Safety Instructions P.2 1. Product Specifications P.4 1-1. Cylinder specifications P.4 1-2. Lock unit specifications P.4 1-3. Stop accuracy P.4 1-4. Precautions on model selection P.5 2. Installation and Handing P.9 2-1. Air supply P.9 2-2. Design P.10 2-3. Mounting P.11 2-4.

Digital Flow Switches, Series PF2A, Series PF2W

Unit switching Real-time switch output ( ) For air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON YES CFM x 10-2, CFM x 10-1 ft3 x 10-1 OFF P-1 P-2 High flow rate CFM=ft3/min "P" Window comparator mode H : Hysteresis High Flow Rate Type (For Air) H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON NO OFF P-1 P-2 ft3, ft3 x 103, ft3 x 106 CFM

10

125 40 56 41 23 12.5 25 37.5 50 75 100 125 50 64 51 25 12.5 25 37.5 50 75 100 125 150 63 64 51 25 12.5 25 37.5 50 75 100 125 150 80 68 56 29 12.5 25 37.5 50 75 100 125 150 175 200 100 76 61 29 12.5 25 37.5 50 75 100 125 150 175 200 125 82 75 27 10 20 30 40 60 80 100 120 140 160 180 200 [mm] Rubber Bumper Bore size [mm] h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401

Digital Flow Switches

Unit switching Real-time switch output ( ) For air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON YES CFM x 10-2, CFM x 10-1 ft3 x 10-1 OFF P-1 P-2 High flow rate CFM=ft3/min "P" Window comparator mode H : Hysteresis High Flow Rate Type (For Air) H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON NO OFF P-1 P-2 ft3, ft3 x 103, ft3 x 106 CFM

CG5-S

Plug Series Variations Bore sizes (mm) Seal materials Applicable auto switches 10 16 20 25 32 Series 40 50 63 80 100 Water resistant D-H7BAL CJ5-S NBR FKM Water resistant D-G5BAL CG5-S Related Equipment P. 18 Water Resistant Air Cylinders Speed Controller with One-touch Fittings/Stainless Steel Series AS-FG P. 20 One-touch Fittings/Stainless Steel Series KG P. 21 Miniature Fittings MS P.

ZQ-OM01301

ZQ-OM01301-A Revision history A P.22 Change of the spare part numbers for the solenoid valve P.24 Change of the spare part numbers for the V port fitting P.25 Change of the spare part numbers for the Washer assembly P.27 P.28 Added items to 8.

Electric Actuator

(Refer to page 36.) 100/;40 200/;60 Motor output [W]/Size [mm] specifications AC servo motor (100/200 VAC) Motor type Motor type S2, S3: Incremental 17-bit encoder (Resolution: 131072 p/rev) Encoder Motor type S6, S7: Absolute 18-bit encoder (Resolution: 262144 p/rev) Type Note 5) Non-magnetizing lock specifications Lock unit Holding force 13.5 lbf (60 N) 42.5 lbf (189 N) Power consumption

VQ5000

VA (12 mA) 100 VAC Power consumption (Current) 3 position pressure center 2 position double (Metal) Inrush 1.3 VA (11.7 mA), Holding 1.3 VA (11.7 mA) 110 VAC (A) 4 (B) 2 (A) 4 (B) 2 Inrush 2.4 VA (12 mA), Holding 2.4 VA (12 mA) 200 VAC Inrush 2.6 VA (11.7 mA), Holding 2.6 VA (11.7 mA) 220 VAC 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Note 1) Use dry air to prevent condensation when operating

Multistage Ejector Series ZL112.212

Fluid Pressure range Scale range (Angular) Accuracy Class HEP Air 100 to 100 kPa 230 3% F.S.

High Power Cylinder Series RHC

WH ZZ Bore size (mm) -X 50 M18 x 1.5 73 7.5 10 88.5 53 6.8 to 11.3 30 10 335 52 275 1/2 215 25 27 Individual -X 63 M18 x 1.5 60 80 7.5 342 55 289 10 95 1/2 215 37 10 24.5 27 80 M22 x 1.5 10 308 12 115 75 100 3/4 8.5 to 13.5 40 13 371 65 228 30.5 32 100 M26 x 1.5 139 90 118 10 13 391 80 330 14 3/4 236 47 41 34 1207 Series RHC Dimensions: Rod Side Flange Style 20 to 40 2 x Rc P GB GA 4 x FD

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: S, W, Y d1 = Q1 = M L2 + (3 x P) L1 = L2 = (mm) Size 30 50 63 80 100 Q2 = M Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc1/8 Rc 1/4 2.5 4 5 4 5 6.8 (mm) (mm) d1 Size 30 50 63 80 100 100 Q2 M3, M4 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 6.8 8.5 10.3 8 6.8 8.5 10.3 8 11 2.5 4 to 7 4.5 to 18 6.8 to 11 6.8 to 13

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: S, W, Y d1 = Q1 = M L2 + (3 x P) L1 = L2 = (mm) Size 30 50 63 80 100 Q2 = M Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc1/8 Rc 1/4 2.5 4 5 4 5 6.8 (mm) (mm) d1 Size 30 50 63 80 100 100 Q2 M3, M4 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 6.8 8.5 10.3 8 6.8 8.5 10.3 8 11 2.5 4 to 7 4.5 to 18 6.8 to 11 6.8 to 13

Compact

00 I 1.8, Eccentrlc distance: L(mml | , ^-l^-t I I fti-+i-*-t'-1 | l t ' + t r Over 100 stroke Non-rotating accuracy of plate Non-rotatng accurary 0 10.09. $0Pi8$ I)(P _ uomlam neouil nctun loxt Fifl.[r[ $$or tE L X P B T I o.l O",u*o, "r,"p"f i?'Ic.dffiAil a Number ot auto switch t1--'l-G'l [?

C95

80 200 200 63 100 80 100 100 50 40 100 100 Load weight: m [kg] Load weight: m [kg] CJ1 63 50 40 30 50 40 30 32 50 40 CJP 20 20 32 CJ2 10 10 CM2 5 4 3 5 4 3 C85 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 C76 s] Maximum speed: V [m m/ s] Maximum speed: V [m m/ CG1 Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa MB 1000 1000 100 80 MB1 500 400 300 500 400 300 63 63 63 100 80 CP95