Rodless Cylinder for Vacuum Series CYV ø15, ø32

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

Compact Guide Cylinder End Lock Type SeriesMGP

B + Stroke A + Stroke FA FB S HR E b a With front lock XAH7 c d e MO XB T-slot dimensions (mm) DM HN XAH7 XC XL Bore size (m) a b c d e End lock mechanism (locking type manual release ) 6.5 10.5 5.5 3.5 9.5 32 Section XX detailed diagram 6.5 10.5 5.5 4 11 40 8.5 13.5 7.5 4.5 13.5 50 11 17.8 10 7 18.5 63 LL With rear lock (mm) Standard strokes (mm) Bore size (mm) ML NN OA B C DA FA FB G GA

Desktop Duster Box

Ionizer Additional air blow Air blow Ionized air 497 ZVB Series Dimensions C B D A C B A D F E [ZVB20] F E [ZVB40] Model A B C D D Note 1) E F F Note 2) ZVB20 211 202 212 310 351 210 297 341 ZVB40 248 392 298 349 390 400 384 428 Note 1) Dimension D is the overall height including the knob of the regulator.

VY511, VYU5

Controller (VYU5-D) External appearance of exclusive controller RUN1 STOP START SEL. SW RESET RUN2 RUN1 OV INPUT 6 7 5 8 4 + 9 3 SET UP A 2 B 1 0 C D 1 E F 0 to 10V V R 1 OUTPUT SET UP BALANCE CONTROLLER VYU5-D 2 V R 2 OV ERR.

Air Cooled Aftercooler Series HAA 1

70 94 58 65 200 200 480 610 220 220 225 238 Model HAA15 HAA22 B C D E F G H J K L M N P Q R S 1B union union 1 2 B 1 HA AT ID AMG AFF AM Misc. 14-15-3

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

C D E F Dimensions Part no.

AC Servo Motor Driver (Pulse input type)

(Parameter initial configuration Set the recommended parameter value Operation start) *3 The travel distance of the actuator per 1 pulse should be 10 [m/pulse]. 26 - Recommended Parameter Values [LEY] LEY25/ LEY25D/ LEY32/ LEY32D/ LEYG25 LEYG25D LEYG32 LEYG32D Series Lead symbol A B C A B C A B C A B C Lead 12 6 3 12 6 3 20 10 5 16 8 4 Parameter *1,*2 Para.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VCHR 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVX c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

SRF 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVH c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

High Vacuum L Type Valve

E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

XL-OMY0001

7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMY0001 6. 200 []1 1.5 1 200 FKM 110Pa

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

Z (Example) F9BZ D-F9BA is available only as "L". Auto switches marked with a "" symbol are produced upon receipt of order. Note 1) Take note of hysteresis with 2 color indication type switches. Note 2) Refer to pages 53 through 65 for detailed auto switch specifications. Cylinder Bore Size MHS 2 D 50 32 to 63 Y59A Number of auto switches Nil S 2 pcs. 1 pc.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 9 Direct Operated Precision Regulator/Modular Style Series ARP20/30/40 Dimensions 2 x P1 Port size A Pressure gauge (Option) Q C OUT IN K V P2 Pressure gauge port size B R Bleed port F S D U N Bracket (Option) J M T Panel fitting dimension Y The dimensions for special applications (not including

AMF

AMF901 445 12B 570 300 520 1093 3 867 AMF800/900/1000 ORIENTATION holes Label Drain Model Connection (Flange) 2B 8B C 2B, 3B, 4B 500 A 330 B 300 D 1070 E 1200 F 1290 G 20 H 720 M16 x l400 Anchor bolt M20 x l500 AMF800 AMF900 400 550 560 745 300 300 1070 1090 1230 1320 1335 1450 24 24 4B, 6B 870 M20 x l500 AMF1000 14-20-48

RS2H-OM0045P

D-M9/D-A9 D-M9 D-M9W D-M9AVL D-M9V D-M9WV D-M9AL D-A9 D-A9V A B A B A B A B 50 23.5 9.0 23.5 11.0 23.5 7.0 19.5 10.5 (13.0) 63 25.5 12.5 25.5 14.5 25.5 10.5 21.5 14.0 (16.5) 80 39.5 19.5 39.5 21.5 39.5 17.5 35.5 21.0 (23.5) ( )D-A96 -15 D-P3DW D-P3DW A B Hs Ht 50 14.5 6.5 41 35 63 16.5 10 47 44 80 30.5 17 55 54 D-P3DW BQ6-032S -16 18 - 7-3. 7-3-1.D-M9D-A9 (-) -17 5~6mm D-A9(V)

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

Flow Characteristics Series Flow characteristics C [(dm3/sbar)] b Cv 0.12 0.21 0.74 0.36 0.32 0.35 0.46 0.83 2.9 SYJ3000 SYJ5000 SYJ7000 Cover (stainless steel) Rubber seal 4/5 Port Solenoid Valve Series SYJ3000/5000/7000 Variations Option Manual override Sonic conductance: C [dm3/(s.bar)] Type of actuation Series Voltage Electrical entry With light/surge voltage suppressor SYJ3000 For DC

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Flow Characteristics Type 21P Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Effective area (mm2) C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port Manifold Body ported for internal pilot SS5YJ3-21P SYJ323 1/8 M3 x 0.5 0.9 SS5YJ3-32P-M5 SS5YJ3-32P-C4 Base mounted for internal pilot 0.25 0.25 0.19 0.18 0.060 0.059 0.32 0.3 0.25 0.27 0.077 0.075 M5 x 0.8

Electro-Pneumatic Regulator IT1000/2000/4000

VDC Pressure Characteristics Pressure Characteristics 1 i 6 _ 102 9 s 3 o t 5 o 1000 2000 3000 4000 5000 F ow rale f/min(ANBI 20 30 40 200 400 600 400 looo Fow rale i/m n(ANF) 1 3 1 102 e7 T3 d 7 3 58 a a a 29 1 5 1 5 o 4 8 1 2 1 6 2 A 2 4 2 8 400 800 1200 1.in 2004 2400 200 400 600 800 1000 Belief flo\i/ i.

End Lock Cylinder Series CBG1

P 2-TC TD D I E 0 -0.05 0 -0.05 E AL TE 2-TC K F TA DL2 TF TG A S + Stroke H NA F ZZ + Stroke Section TA With non-locking type manual override (suffix N) With locking type manual override (suffix L) HN HR MO RF WL WL KA 0.1 C 8-J NA (mm) Stroke range Bore size (mm) A AL B1 C D DL2 E F GA GB H H1 HR HN (max.)

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Option Digital pressure switch (Electrical entry: Wiring top entry) Digital pressure switch (Electrical entry: Wiring bottom entry) Option Round type pressure gauge J J J H Dimensions Center of piping H Center of piping H Center of piping Standard specifications Model P1 P2 A B Note 1) C D F J K ARP20(K) 1021 1021 1021 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 ARP30(K) 2.5 1/8 53