Prevents Micro-Bubbles

Dimensions LLCA--C Stations 4-Mounting hole for W Y A K D L3 L2 L1 (Max.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Lead wire with connector 1.5 45 44 1.5 F02 C01 25 8.5 25 8.5 M5 x 0.8 Thread depth 5 G1/4 Rc1/8 17 Piping port Rc1/8 Piping port G1/4 Gasket 1.5 52.7 46.7 1.5 A2 B2 25 8.5 25 8.5 URJ1/4 TSJ1/4 Piping port URJ1/4 Piping port TSJ1/4 28 ZSE20C(F)/ISE20C(H) Series Dimensions ZSE20C(F) ISE20C(H) Piping direction Piping specification 25 41.7 1.5 2 x 2.6 Depth 12 or less 12 11 4.5 02L 30 4.5 R1/

Compact Guide Cylinder

A Auto Switch Proper Mounting Position [mm] Auto Switch Mounting Height [mm] D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV A B 12 (10 x 2) 10.0 2.5 16 (12 x 2) 10.0 2.5 20 (16 x 2) 9.5 6.0 25 (20 x 2) 9.5 6.5 32 (25 x 2) 9.5 8.5 40 (32 x 2) 8.5 16.5 50 (40 x 2) 8.5 23.0 63 (45 x 2) 8.5 27.5 80 (56 x 2) 8.5 41.5 100 (71 x 2) 7.5 46.5 Auto switch model Auto switch model D-M9V D-M9WV D-M9AV Bore size

Modular Type Filter Regulator Series AW

Note 2) Symbol Nil B C D E G H Port size Body size Symbol Port size Float type auto drain (N.O.)

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

CJ2Y-Z CM2Y-Z CG1Y-Z MBY-Z CA2Y-Z CS2Y CQSY CQ2Y-Z CJ2X-Z CM2X-Z CQSX CQ2X CUX (mm) Auto switch model Bore size 10 16 Auto switch mounting Auto switch model Bore size (mm) 10 16 D-M9m/M9mV D-M9mW/M9mWV D-M9mA/M9mAV 2.5 3 D-M9m D-M9mV D-M9mW D-M9mWV D-A9m D-A9mV Band mounting BJ6-010 (A set of a, b, c, d) BJ6-016 (A set of a, b, c, d) D-A9m 6 7 D-C7m/C80/C73C/C80C 7 7 D-H7m/H7mW D-H7BA/H7NF

REC

30.0 40 70.0 39.5 64.0 33.5 69.0 38.5 65.5 35.5 67.5 37.0 67.0 36.5 63.5 33.0 Auto Switch Mounting Height (mm) D-C7 D-C8 D-H7 D-H7lW D-H7lF D-H7BAL D-B5 D-B6 D-B59W D-G5NTL D-H7C D-G39 D-K39 D-A33 D-A34 Bore size (mm) D-C73C D-C80C D-A44 HS HS HS HS HS 20 24.5 27 62 69.5 27.5 25 27 29.5 64.5 72 30 32 30.5 33 68 75.5 33.5 40 35 37.5 72.5 80.0 38 4.9-16

VZ100/300/500

R A: 0.19 A P: 0.13 VP VG Grommet (G) Body Ported Base Mounted VZ300 VP S070 M5 x 0.8 0.66 2 3 (A R) VQ L plug connector (L) VKF (Standard) VQZ 100 VAC 50/60 Hz With surge voltage suppressor (G) (L) (M) (D) With light/ surge voltage suppressor (L) (M) (D) VZ500 200 VAC 50/60 Hz 24 VDC VZ VS 2.5 2 3 (A R) (Option) N. C. N. O.

Thermo-chiller/Rack Mount Type

Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20 [50 Hz] [60 Hz] 400 400 35C Heating capacity [W] Heating capacity [W] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature Facility water temperature Facility water temperature Facility water temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

LEH_C

a b c d e f g h i j k a ABS INC ABS() / / INC()// b c ) 0.5mm ()/ P.53 8.3 d e f )LEHZ(J)LEHFLEHS 40100% LEHZJ10L, LEHZJ16L 50100% g INP ON P.51 8.3 INP INP ON h 16 - )LEHZ(J)LEHS 550mm/secLEHF10 520mm/sec LEHF203240 530mm/sec /P.50,51 8.3 , i )150% P.52 8.3 j 2 AREA ON INC ABS() k () INP ON() )No.1 5 4 1( ) 17 - (1) a b c d e f g h i j k No.0 0 1<2 INP

Pin Clamp Cylinder Series CKQ/CLKQ

more 22 or more 17 or more 54 or more 52 or more Auto Switch Mounting Height Atmosphere General use Mounting Rail mounting Rail mounting Welding Direct mounting D-A7 D-A80 D-A7H D-A80H D-F7BAL D-F7W D-J79W D-F7NTL D-F79F D-F7D-J79 D-F7WV D-F7BAVL D-F7V D-A9V D-F9WV D-F9V D-M9V D-A79W D-A73C D-A80C D-J79C D-F9BAL D-P5DWL D-P5DWSC Model U 43.5 C(L)KQ 41 42 48 44.5 47.5 36.5 38.5 36 50 Rail

VEX1

Conduit terminal j DIN connector a Model b d e f VEX5500 VEX5501 19 130 110 9 12 2.3 187 187.5 205.5 205 32 VEX5700 VEX5701 136 9 20 2.3 204 204.5 222.5 120 222 VEX VEX5900/5901 AN AMC 5.1-34 VEX5 Dimensions Select style VEX5510/E5511 VEX5710/E5711 Port size E F G H I J L M P A Model R T U B C K N O Q S D A,P port Rc(PT) , ,1 R port Rc(PT) VEX5510 VEX5511 1 2 3 4 , ,1 1 2 3 4 50 25 10 7 25

VQ5000

Note Conductor resistance /km, 20C 65 or less 1.5 m 3 m 5 m AXT100-DS25-015 10 Cable 25 cores x 24AWG AXT100-DS25-030 Voltage limit VAC, 1 min. 1000 AXT100-DS25-050 L For other commercial connectors, use a 25 pins type with female connector conforming to MIL-C-24308. Note) The min. bending radius of D-sub cable is 20 mm.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A A B C D E F A B C D A B C D A B C D A B C D Tubing O.D. PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Note 6) At rated voltage Series SYJ7000 Cylinder Maximum Operating Speed 1000 E 900 D 800 B C SY 700 Piping length 1m Max.operating speed (mm/s) SYJ 600 Piping length 5m SX A B 500 VK 400 VZ 300 VF 200 VFR 100 VP7 20 25 32 40 40 50 63 80 100 VP4 CM2 cylinder CA1 cylinder Cylinder bore size (mm) System Figure a VQ Solenoid valve VQ4 Fitting Air cylinder VQZ VQD Silencer VZS Speed controller

VQ7-6/7-8

25 25 X (PE) port 1/8 A, B port 2-/4, 3/8 9 1/8 R1, R2 port 2-3/8 P port 1/4, 3/8 Y(PE) port 2 position double : VQ7-6-FG-D double (Reverse pressure): VQ7-6-YZ-D 3 position closed center : VQ7-6-FHG-D exhaust center : VQ7-6-FJG-D pressure center: VQ7-6-FIG-D 155 145 68.5 86.5 76.5 68.5 50 50 50 50 13 (A port) 13 (B port) 13 (A port) 13 (B port) Manual override Manual override A B A B B B

NCA1

I E S N C A 1 X C 3 O P T I O N E (Port Location Standard) CAP END NCDA1L500 2400 XC3 A B E F TAT A H (Port Location Standard) F (Cushion Location Standard) Head Cover Port Location A, B, C or D Head Cover Cushion Location A, B, C or D Cap Cover Port Location E, F , G or H D Cap Cover Cushion Location E, F , G or H G B (Cushion Location Standard) C HEAD END CHART 1 Spare Parts and Repair

Air Cylinder NCA1 Series

I E S N C A 1 X C 3 O P T I O N E (Port Location Standard) CAP END NCDA1L500 2400 XC3 A B E F TAT A H (Port Location Standard) F (Cushion Location Standard) Head Cover Port Location A, B, C or D Head Cover Cushion Location A, B, C or D Cap Cover Port Location E, F , G or H D Cap Cover Cushion Location E, F , G or H G B (Cushion Location Standard) C HEAD END CHART 1 Spare Parts and Repair

VQ7-6/7-8

light 2-6.5 Mounting hole 3-Rc1/4, 3/8 (P, A, B) 42.5 42.5 34 G1/2 (cable 6.8 to 10) Bottom port drawing 125.5 137.5 SMC (ports A, B) 37 93 255 (port X) 12 5 3 Y 25 22 14 14 1 2-Rc3/8 Ports R1, R2 2-Rc1/4, 3/8 Ports A, B Rc1/4, 3/8 Port P 9 25 25 Rc1/8 Port X (PE ) Rc1/8 Port Y (PE) 2 position/Double : VQ7-6-FG-D Double (reverse pressure): VQ7-6-YZ-D 3 position/Closed center : VQ7-6-FHG-D