CXS A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5
length) Pg7 80.5 [82.7] 90.5 70.7 [72.9] 79.6 72.2 65.7 49.7 23.5 10.9 23.5 10.9 23.5 10.9 23.5 10.9 21 21 21 21 25 25 25 25 2-3.2 (For mounting) 2-3.2 (For mounting) 28 2-3.2 (For mounting) 2-3.2 (For mounting) 28 28 28 Refer to page 4-4-61 for dimensions with connector cable. 4-4-40 41 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ700 Base Mounted (With Sub-plate) [ ] for
Standard Stroke Bore size (mm) Standard stroke (mm) Range of manufacturable stroke Auto switch model 40 CV Bore size (mm) 50 63 80 100 Without rod boot With rod boot Without rod boot With rod boot D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F5NTL D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B64 D-B59W D-G5/K59 D-G5W/K59W D-G5BAL D-G59F/G5NTL 40 25 to 850 25 to 700 Up to 1200 Up to 950 MVGQ 50 25 to 800 25
D-sub connector (25 pins) Note1) 2) Spring type terminal block (32 pins) Note1) 2) DM EX600 Digital Input/Output Unit Input/Output type Number of inputs/outputs and connector Symbol Description PNP NPN Number of inputs 8 inputs 8 inputs Number of outputs 8 outputs 8 outputs Symbol Connector P N E F D-sub connector (25 pins) Note1) 2) Spring type terminal block (32 pins) Note1) 2) Note 1)
MLU Clevis pin and knuckle pin Rod end nut ML1C D30 d Dd9 -X d 20D C l m m t t L H B Data (mm) (mm) Part no. Size 25 32 40 50 l 18.2 22.2 26.2 32.2 d 7.6 9.6 9.6 13.4 L 23 27 31 38 d M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 D 16.5 18 21 26 Dd9 C 19.6 21.9 25.4 31.2 B 17 19 22 27 H 6 7 8 11 Size 25 32 40 50 Part no.
C D A B (mm) D-A9, D-A9V (mm) D-F9, D-F9V (mm) D-F9W, D-F9WV A A A B B B Bore size 16 25 32 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 54 106 58 102 57 103 54 156 58 152 57 153 11 8.5 8.5 85 245 89 241 88 242 (mm) (mm) (mm) C C C D D D Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range 27 133
Auto switch mounting band CLK2 CLKG Auto switch model Bore size (mm) 40 50 63 CKQ CLKQ D-M9 D-M9W D-A9 CK CLK BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) CKQ D-M9ANote 2) BMA3-040S (A set of a, b, c, e) BMA3-050S (A set of a, b, c, e) BMA3-063S (A set of a, b, c, e) Auto switch Switch bracket (Resin) Transparent (Nylon)Note 1) d e White (PBT
Hexagon width across flats 24 25 G Width across flats 37 45 45 4-M4 x 0.7 4-M4 x 0.7 E 10 10 G Width across flats 37 F F E Y Y 8 8 34 34 C C A A B D B D Dimensions Dimensions (mm) (mm) Model Model B A B C D E F G Y A C D E F G Y ZPT63HB-A16 ZPT63HB-B8 63 65.1 45.5 67.6 31.5 43 73 21.5 M8 x 1.25 ZPT80HB-A16 -B10 80 83 58.4 85.1 37 48.5 78.5 27.5 M10 x 1.5 63 65.1 45.5 67.6 31.5 43 21.5 -B12
Kit designation CU1 Note 1) C Stations Kit (connector) CU2 Note 1) 02 2 stations Direct exhaust with silencer box: D and U side exhausts Direct exhaust with silencer box: D side exhaust Direct exhaust with silencer box: U side exhaust P65 enclosure SB SD Note 1) 12 12 stations SU Note 1) W U D U D Note) Combination of [C ] and [S ] is not possible.
A Auto Switch Proper Mounting Position [mm] Auto Switch Mounting Height [mm] D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV A B 12 (10 x 2) 10.0 2.5 16 (12 x 2) 10.0 2.5 20 (16 x 2) 9.5 6.0 25 (20 x 2) 9.5 6.5 32 (25 x 2) 9.5 8.5 40 (32 x 2) 8.5 16.5 50 (40 x 2) 8.5 23.0 63 (45 x 2) 8.5 27.5 80 (56 x 2) 8.5 41.5 100 (71 x 2) 7.5 46.5 Auto switch model Auto switch model D-M9V D-M9WV D-M9AV Bore size
C D 15 (mm) Auto switch model A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 Bore size (mm) 17.5 15 D-A9 21.5 76.5 72.5 56.5 60.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 (mm) A D-Y5 D-Y7 D-Y7W B C D Auto switch model D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 22 101 103 47 47 78 78 22 32 30.5
D E G 1 2 3 6 8 C J N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto drain (N.C.)
WA WB View E NN F GB GC GA Mounting nut Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Piping port 2 x M5 x 0.8 Cover surface D LY LB LH LT LZ LX LT S + Stroke H NA A NB Y X Y X 4 x LC Mounting hole LS + Stroke Z + Stroke WW C B 0 0.3 B 0 0.3 Drawing of view E (mm) Z S WW WB WA NB NA NN MM H GB GA F D C B A Y X 91.5 92.5 LS LZ 42 42 25 25 LY LX 33 33 2.3 2.3 LT 14 14 LH 5.5 5.5 LC
Thread nominal size 30 Description H B C D d JS10 nut M4 x 0.7 3.2 7 8.1 6.8 JS16 nut M5 x 0.8 4 8 9.2 7.8 JS20 nut M8 x 1.25 5 13 15 12.5 D C JS32 nut M10 x 1.25 6 17 19.6 16.5 JS40 nut M14 x 1.5 8 22 25.4 21 H B JS63 nut M18 x 1.5 11 27 31.2 26 10-19-14
5 7 8 7 10 13 17 22 27 14.4 19 24.8 29 38.4 49.2 17 23 29.9 33.5 38 47.5 80 210 JS20-8-125 JS32-10-125 M8 x 1.25 M10 x 1.25 43.9 49.5 1100 2500 6000 11000 JS40-14-150 JS63-18-150 M14 x 1.5 M18 x 1.5 60 74.5 11 13.5 Rod end nut (mm) d: Thread nominal size 30 Description H B C D d JS10 nut M4 x 0.7 3.2 7 8.1 6.8 JS16 nut M5 x 0.8 4 8 9.2 7.8 JS20 nut M8 x 1.25 5 13 15 12.5 D C JS32 nut M10
0.5 Finger closing port MHC MHT 25 25 MHY 3-3 depth 6 +0.02 0 M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port (A, B, C common view) MHW 6-M3 x 0.5 thread depth 6 (A, B, C common view) MRHQ Misc.
9.5 31 16 46.8 12 -M4 X 15 20.5 10 15 M4 X 15 MXS16 MXS-BS16 RB1007 11 37 19 53.7 14 -M5 X 18 23 12 18.5 M5 X 18 MXS20 MXS-BS20 RB1411 13 47 26 78.3 19 12 M6 X 25 27 13 25.5 M6 X 25 MXS25 MXS-BS25 RB1412 16 53.5 26.5 79.3 19 12 M8 X 25 33 17 25.5 M8 X 25 Mounted to body MXS-BS 8, 12, 16 C A MXS-BS 20, 25 P A C B P B WIDTH ACROSS FLATS E D Mounted to table WIDTH ACROSS FLATS F D WIDTH ACROSS
KQ2E Inch size tube/metric thread (formerly IQ) e l b a c i l p p A . D .
Refer to page 13-2-10 for details. (1) Valve unit (4) Adsorption confirmation switch unit K1 A V ZX1 5 Z B D M L Unit for replacement 15 C 0X B ZSP1 D Piping specifications Applicable nozzle diameter Manifold All ports are equipped with plugs.