VQ5000

5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 position double 3 position exhaust center Nil: Non-locking push type (Tool required) B: Slotted locking type (Tool required) (A) 4 (B) 2 (A) 4 (B) 2 Metal Rubber 4 Bore 6.1 Bore 6.1 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) PUSH TURN LOCK 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 Light/Surge voltage suppressor 1 (P) 5 (R1)

NCA1

T I O N S ( I F A P P L I C A B L E ) XB5 _ For information on Bore Size, Rod and Rod Thread , please see How To Order Series NCA1 Replacement Parts.

MLGC

B76 B73 I.C. 5V P P P P P P P P P P P P P P P P P 3 wire (Equiv.

60

VXK21 VXK22 VXK23 Model Solenoid Coil P P P 2 mm P P P P P P P P Coil: Class B, Class H Orifice size Orifice size 3 mm 4.5 mm Rated Voltage 6 mm AC: 100 V, 200 V, 110 V, 220 V, 240 V 230 V, 48 V DC: 24 V, 12 V 8 mm Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 Normally Open (N.O.)

AC Servo Motor Driver (CC-Link Type ）

` p 0 0 0 1 1 SOH DC1 !

Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

7ND9071en

Code D33 SST Sensor Dual Module Code D44 Namur Sensor Dual Module Code I02 P+F NJ2-12GK-SN Code I09 P+F NCB2-12GM35-N0 Code I32 Omron E2E-X2Y1 Code I41 P+F NJ4-12GK-SN Code I45 P+F NJ3-18GK-S1N Code I56 IFC 2002-ARKG/UP Code K05 Omron D2VW-5 Code K06 Omron D2VW-01 Code B06 Omron D2VW-01 (ND9100F/P, ND9200F/P and ND9300F/P only) 2.5 Recycling and disposal WARNING (ND9000, ND7000): During automatic

1

MY1B P . 8-11-16 MY1M P . 8-11-40 MY1C P . 8-11-56 MY1H P . 8-11-72 MY1CW P . 8-12-14 MY1MW P . 8-12-14 Stroke adjusting unit For applicable symbol, refer to the table below. Note) For MY1H, the parts are packed together when shipped. Stroke Note) Indicates the stroke prior to mounting the stroke adjusting unit.

Digital Flow Switches

Real-time switch output Unit switching Hysteresis mode ON For Air YES OFF P-1 P-2 Display Real-time flow rate l/min Accumulated flow l Real-time flow rate "P" Window comparator mode H : Hysteresis CFM x 10-2 x CFM x 10-1 ft3 x 10-1 H H CFM = ft3/min ON High Flow Rate Type (For Air) NO OFF P-1 P-2 Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 Real-time flow rate OUT1

AC Servo Motor Driver (Network card type ）

(factory-wired) When using a driver built-in regenerative resistor, connect P+ and D. (factory-wired) When using a regenerative option, disconnect P+ and D, and connect the regenerative option to P+ and C. P+/C/D Regenerative option Refer to section 11.2 for details. Symbol Connection target (application) Description Supply the following power to L11 and L21.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 2 x P (Rc, NPT, G) G H2 M5 x 0.8 (This drawing shows the cases of 20 and 25.)

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Cushion needle Q + Stroke PG MY1B P P (MY1HG) MY1H MY1H (Hexagon socket head taper plug) 1 (Hexagon socket head taper plug) QQ SS RR YH MY1B PP QQ RR SS A B H NE NH NF MY1M P P (MY1HG) P (Port) P (Port) PP (Hexagon socket head taper plug) (Hexagon socket head taper plug) G G MY1C TTT UU UU TT A N Z + Stroke MY1H P MY1 HT P (Port) (Hexagon socket head taper plug) MY1 W MY2C P P (Port) (Hexagon

MY2

M5 x 0.8 1/8 1/4 "P" indicates cylinder supply ports.

HRX-OM-Z002

(Note12) The capacity is 60Hz even in the 50Hz area when option P is selected. (Note13) The weight will increase by 4kg when option C and P is selected.

Possible to transfer a workpiece at low-speed.

MSU CRJ L1 + (3 x P) L1 + (3 x P) Q1 = M Q1 = M CRA1 L2 + (3 x P) L2 + (3 x P) L1 = L1 = CRQ2 L2 = L2 = Q2 = M Q2 = M MSQ Size 10, 15 Size 20, 30, 40 Size 10, 15 Size 20, 30, 40 MSZ (mm) (mm) Q1 M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 Q2 M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 Size 10 15 20 30 40 Size 10 15 20 30 40 CRQ2X MSQX CRQ2X MSQX MRQ Symbol: A4 Symbol: A5 Symbol: A3 The long shaft can

Multistage Ejector Series ZL112.212

4 Exhaust port 76 P Standard ZL212 40 V ZA 54 125 Label ZX 188 61 ZR P Port exhaust ZL212P ZM V ZMA Exhaust port (EXH.)

Water-cooledThermo-chiller

50 or less Chloride ion (Cl) [mg/L] 50 or less Sulfuric acid ion (SO42) p p p p p [mg/L] 50 or less Acid consumption amount (at pH4.8) [mg/L] 70 or less Total hardness 1.Thoroughly read the Operation Manual.

4

N.C. 2(A) (P)1 2(A) 2(A) 2(A) 2(A) (P)1 2 (A) (R)3 3 (R) 1 (P) 1 (P) 3 (R) 3 (R) 1 (P) 1 (P) 3 (R) (R)3 3 Port Solenoid Valve, Universal Porting Type Variations Poppet type Direct operated poppet type Pilot poppet type New New VP300/500/700 VT325 VT317 VT307 Series 0.62 0.19 1.4 0.8 to 3.6 Cv (PA) http://www.smcworld.com Refer to the SMC website for details.

PF2A/PF2W

Unit switching Real-time switch output ( ) ZSE ISE For Air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON PSE YES CFM x 102, CFM x 101 ft3 x 101 OFF P-1 P-2 High flow rate Z I SE3 CFM = ft3/min P Window comparator mode H: Hysteresis High Flow Rate Type (For Air) PS H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON Z I SE1 2 NO OFF P-1 P-