Free Mount Cylinder Series CU

, 25 10, 16 32, 40 Direct mount type Direct mount type 20, 25, 32 40, 50, 63 10-/1121-/22CG1R Direct mount type End lock Free Mount Cylinder P.53 Air Cylinder P.46 Mini-free Mount Cylinder P.50 Model Size CA2 10-/1121-/22Model Size CUJ 1011Model Size CDU 10-/1121-/2240, 50, 63 6, 8, 10 6, 10, 16, 20, 25 Compact Cylinder P.56 Compact Cylinder P.64 Sine Cylinder P.72 Model Size CQS 10-/1121

ChemicalThermo-con

acid) H2SO4: 96% or less p 50 to 140F (10 to 60C) Ozone p Note 2) 50 to 140F (10 to 60C) Ammonium hydroxide NH3: 5% or less NH3: 5% or less H2O2: 20% or less p Note 1) 2) 50 to 140F (10 to 60C) Ammonia hydrogen peroxide solution p Note 2) 50 to 140F (10 to 60C) Sodium hydroxide NaOH: 50% or less p Note 1) 50 to 140F (10 to 60C) Deionized water How to read the table: p: Useable c: Consult

Ionizer

mm x 150 mm, capacitance: 20 pF) as defined in the U.S.

CRB2/CRBU2/CRB1

(mm) L2(3 x P) Size 10 X L1 max.

Ionizer Nozzle type IZN10 Series IZS

150 mm, capacitance: 20 pF) as defined in the U.S.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft types: J, K, T Applicable shaft types: J, K, T (mm) (mm) Q1 Q2 L2 + (3 x P) L2 = L2 + (3 x P) K axis (T axis) J axis Shaft type Shaft type J K J K T T Size Size Q1 = M L1 = L1 + (3 x P) L2 = 10 10 Not available Not available 15 15 M3 M3 20 20 M3, M4 M3, M4 30 30 M3, M4, M5 M3, M4, M5 Q2 = M Q2 = M 40 40 M3, M4, M5 M3, M4, M5 Symbol: A37 Symbol: A38 The long shaft can be

Table of Contents

Applicable shaft types: J, K, T Applicable shaft types: J, K, T (mm) (mm) Q1 Q2 L2 + (3 x P) L2 = L2 + (3 x P) K axis (T axis) J axis Shaft type Shaft type J K T J K T Size Size Q1 = M L1 = L1 + (3 x P) L2 = 10 10 Not available Not available 15 15 M3 M3 20 20 M3, M4 M3, M4 30 30 M3, M4, M5 M3, M4, M5 Q2 = M Q2 = M 40 40 M3, M4, M5 M3, M4, M5 Symbol: A37 Symbol: A38 The long shaft can be

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft types: J, K, T Applicable shaft types: J, K, T (mm) (mm) Q1 Q2 L2 + (3 x P) L2 = L2 + (3 x P) K axis (T axis) J axis Shaft type Shaft type J K T J K T Size Size Q1 = M L1 = L1 + (3 x P) L2 = 10 10 Not available Not available 15 15 M3 M3 20 20 M3, M4 M3, M4 30 30 M3, M4, M5 M3, M4, M5 Q2 = M Q2 = M 40 40 M3, M4, M5 M3, M4, M5 Symbol: A37 Symbol: A38 The long shaft can be

asilltr

400 (4') Auto-switch Mounting Kit 056-150 BQ-z 20G400 BQ-3 Series NCDQT Magnet Center D, S, DC Type T Type Borc D Type S T y p e ' DC Type ' -T rtpe A B , " , ,.

Air Cylinder NCQ7 Series Compact Cylinder

400 (4') Auto-switch Mounting Kit 056-150 BQ-z 20G400 BQ-3 Series NCDQT Magnet Center D, S, DC Type T Type Borc D Type S T y p e ' DC Type ' -T rtpe A B , " , ,.

C76

Extended Retract Extended Retract Extended Retract Extended Retract 10, 25 50, 100 150, 200 32 53.9 48.8 53.9 41.2 53.9 28.4 66.7 19.6 66.7 18.1 66.7 19.6 10, 25 50, 100 150, 200 250 78.5 72.6 78.5 63.7 78.5 49.0 76.5 23.5 76.5 23.5 76.5 23.5 76.5 23.5 40 Spring Extended (N) Spring force Bore size (mm) Standard stroke 10 25 50 100 150 200 250 Extended Retract Extended Retract Extended

C76

100 150 200 250 Extended Retract Extended Retract Extended Retract Extended Retract Extended Retract Extended Retract Extended Retract 10, 25 50, 100 150, 200 66.7 56.3 66.7 40.7 66.7 14.7 66.7 19.6 66.7 18.1 66.7 19.6 32 10, 25 50, 100 150, 200 250 76.5 50 76.5 23.5 76.5 23.5 76.5 23.5 76.5 23.5 76.5 23.5 76.5 65.9 40 6-10-20 21 Series C76 Air Cylinder: Standard/Non-rotating Type Single

Single Axis Electric Actuator Series LJ1H

Consult P/A.

Cylinder with Turntable Series MGT

= 0.5 MPa m MGTL63 P = 0.5 MPa 100 MGTM63 100 Load mass m (kg) Load mass m (kg) Larger than 100st Larger than 50st 50 40 50st or smaller 75, 100st 30 20 50 25, 50st 40 10 l 30 5 4 3 m 20 2 10 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 30 40 50 100 200 300 400 Eccentric distance l (mm) Eccentric distance l (mm) 300 300 200 MGTL80 P = 0.5 MPa 200 MGTM80 P = 0.5 MPa 100 Load mass m (kg) Load

Programless controller Step motor (servo 24 VDC)

2500 75 2500 150 2500 100 2500 11 200 3000 100 3000 200 3000 110 3000 12 250 3500 125 3500 250 3500 120 3500 13 300 4000 150 4000 300 4000 130 4000 14 350 4500 175 4500 350 4500 140 4500 15 400 5000 200 5000 400 5000 150 5000 60 No.

MLGP

, 175, 200, 250, 300, 350 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 RLQ Manufacture of Intermediate Stroke MLU ML1C Spacer installation type Spacers are installed in the standard stroke cylinders. 20 to 32: Stroke can be modified by the 1 mm interval. 40 to 100: Stroke can be modified by the 5 mm interval.

MLGP

, 175, 200, 250, 300, 350 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 RLQ Manufacture of Intermediate Stroke MLU ML1C Spacer installation type Spacers are installed in the standard stroke cylinders. 20 to 32: Stroke can be modified by the 1 mm interval. 40 to 100: Stroke can be modified by the 5 mm interval.

7ND9071en

Number of switches Electrical values: According to switch type, check connection diagram from Section 12.11 2-wire, DC voltage proximity switches: I02 P+F NJ2-12GK-SN Ui: 16 V, Ii: 52 mA 2 I09 P+F NCB2-12GM35-N0 Ui: 16 V, Ii: 52 mA 2 I56 IFM IFC2002-ARKG/UP U: 10-36 V DC, Imax: 150 mA 2 I41 P+F NJ4-12GK-SN Ui: 16 V, Ii: 52 mA 4 3-wire, DC voltage proximity switches: I45 P+F NJ3-18GK-S1N Ui

ITV

Set pressure: 0.2 MPa Flow characteristics Relief flow characteristics Pressure characteristics Supply pressure: 0.7 MPa Supply pressure: 0.7 MPa 0.6 0.8 0.7 1.0 Output deviation factor (%F.S.) 0.5 0.5 0.6 Set pressure (MPa) Set pressure (MPa) 0.4 Set point 0.5 0.3 0.4 0.0 0.3 0.2 0.5 0.2 0.1 0.1 1.0 0.0 0.0 0 50 100 200 150 0 50 100 150 200 250 0.2 0.4 0.6 0.8 Flow rate (L/min (ANR)) Flow

PFxx-OMU0002

PF3A703H Item Default Settings [P] Set value of OUT 1500 L/min [H] Hysteresis of OUT 150 L/min PF3A706H Item Default Settings [P] Set value of OUT 3000 L/min [H] Hysteresis of OUT 300 L/min PF3A712H Item Default Settings [P] Set value of OUT 6000 L/min [H] Hysteresis of OUT 600 L/min : For hysteresis, please refer to [F 1] Setting of OUT (page 31). 22 No.PF-OMU0002-D [Hysteresis