Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(dm3/ 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ Valve model Actuation type Valve model Actuation type 1, 5, 3 L/M plug W M8 L/M plug W M8 1, 5, 3 4, 2 (A, B) (P, EA, EB) 4, 2 (A, B) DIN terminal (sbar)) Cv b C (dm3/ (sbar)) Cv b C (dm3/ (P, EA, EB) connector 51 53 68 74 connector 57 82 connector 101 104 120 125 connector 108 133 (sbar)) (sbar)) Single Single 2 position 125 167 2

SFOD-OMT0009CN

USB 7. 106 No.SFOD-OMT0009CN-B 7. 7. 4. ( EMG ) 4. 107 No.SFOD-OMT0009CN-B 1. 1.1 LEY/LEYG LEY16/LEYG16 LEY25/LEYG25 LEY32/LEYG32 LEY40/LEYG40 A B C A B C A B C A B C [mm] 10 5 2.5 12 6 3 16 8 4 16 8 4 [mm] 300 300 300 400 400 400 500 500 500 500 500 500 [mm/s] 500 250 125 500 250 125 500 250 125 300 150 75 [mm/s] 15 8 4 18 9 5 24 12 6 24 12 6 () [mm/s] 22 12 6 26 13 7 34 17 9 34

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

C D A B (mm) D-A9, D-A9V (mm) D-F9, D-F9V (mm) D-F9W, D-F9WV A A A B B B Bore size 16 25 32 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 54 106 58 102 57 103 54 156 58 152 57 153 11 8.5 8.5 85 245 89 241 88 242 (mm) (mm) (mm) C C C D D D Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range 27 133

HRX-OM-X037

Indication Item Setting and selection Setting range [High] Set the temperature range of the circulating fluid SP. +0.1 C to +10.0 C +1.0 C Upper/lower temperature limit (1) High/ Low [Low] Set the temperature range of the circulating fluid SP. -0.1 C to -10.0 C -1.0 C TEMP READY signal is output when the set time has passed after the circulating fluid temperature rises/drops within the

100

Specific Product Precautions 22 A ZL3/ZL6 Series Exhaust Characteristics (Representative value) ZL3H ZL3M 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 0.3 0.4 0.5 400 500 450 400 350 300 250 200 150 100 50 0 0.2 0.6 Vacuum pressure Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure 350

Air Cylinder Series MB

Order Made 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 Symbol Specifications/Descriptions 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 XA 100 Change of rod end shape 1500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450,

AC Servo Motor Driver (Pulse input type/Positioning type)

Positioning Mode: Minimum actuator travel distance of 1[m]. 28 - Recommended Parameter Values [LEY] LEY25/LEYG25 LEY25D/LEYG25D LEY32/LEYG32 LEY32D/LEYG32D Series Lead symbol A B C A B C A B C A B C Lead 12 6 3 12 6 3 20 10 5 16 8 4 Parameter *1,*2 Para. No Initial value Recommended value Number of command input pulses per revolution *3. PA05 100 100 Electronic gear numerator *3.

Ionizer Nozzle type IZN10 Series IZS

Bar length (mm) IZN10-G-100-X216 IZN10-G-200-X216 IZN10-G-300-X216 IZN10-G-400-X216 IZN10-G-500-X216 IZN10-G-600-X216 100 Part no. IZN10-G-X198 Part no.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Clean series 10 11 Relief type Vacuum suction type 10 C D B M 2 B 20 100 H N M9BW C 21 C D B M 2 B 20 100 H N M9BW C Nil Built-in magnet Number of auto switches Cylinder stroke (mm) No Nil S n 2 pcs. 1 pc. "n" pcs.

Process Pump

Symbol C[dm3/(sbar)] b Cv N.C.

5 Port Solenoid Valve SY Series

rate: 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

Table of Contents

C. Normally closed IN OUT N. O.

V

Max Vacuum Pressure* 0.5 0.7 1.0 1.3 mmHg (Torr) 5 12 24 40 Max Suction S Type 660 (100) 8 20 34 70 Flow Rate L Type 360 (400) / / / / L Type 400 (400) 10 20 34 68 Air Consumption S Type 660 (100) 10 20 34 68 L Type 360 (400) H O W T O O R D E R ZH V A C U U M E J E C T O R *Vacuum pressure is quoted as mmHg below atmospheric (Torr Absolute) 1 Torr = 0.0197PSI D ZH D I M E N S I O N S M

SMC Pneumatic Clean Series

Line A IDG5 Fitting: Oil-free one-touch fitting Piping: Urethane tuing Oil-free: Wetted parts oil-free AME AMF Oil-free regulator Oil-free solenoid valve SUP Oil-free needle valve Line A Line B Example of clean air equipment Line B Line C Fittings: Clean one-touch fittings Piping : Polyolefine tubing Clean: Oil-free, Assembled in clean room Line C Clean precision regulator Stainless steel

VM

Only when output 1 and 2 are in the ON state, and C turns ON, will output 3 turn ON. If either A or B is turned OFF , output 3 will not be turned ON, even if C is turned ON.

Modular F.R.L. Units

AD27-A With bowl guard AD27-C-A AD37-A AD47-A Normally open (N.O.)

42

C kit (Plug lead type) 6.

Title not found

Connector C (Terminal no.)

Electric Slide Table / High Precision Type 《 AC servo motor 》

200 400 200 400 200 Pushing speed [mm/s] *2 35 or less 30 or less Actuator specifications Max. acceleration/deceleration[mm/s2] 5000 Positioning repeatability [mm] 0.01 Lost motion [mm] *3 0.1 or less Lead [mm] (including pulley ratio) 12 6 20 10 16 8 Impact/Vibration resistance [m/s2] *4 50/20 Ball screw Ball screw(In-line) Actuation type Belt[1.25:1] Ball screw Ball screwBelt(parallel)

VQ7-6/7-8

Thread type Rc Nil Control equipment Symbol A Nil AP M MP F G C E NPTF T G F Air filter with auto-drain Air filter with manual drain Regulator Air release valve Pressure switch Blanking plate (Air release valve) Note) It is not applicable to O n e t o u c h fittings.