VQ4000

Double wiring (Standard) Single/Double mixed wiring (Option) D side U side D side U side 10 Single 11 12 Stations Stations 1 2 3 4 5 6 7 8 8 1 Double 2 Double 3 Single 4 Single 5 Double 6 Double 7 Double 8 Double 9 Single 9 Double Double Double Single Single Single Single Single SI unit SI unit SI unit output no. SI unit output no.

CV/MVGQ

D-Y7W D-Y7WV Auto switch model D-F5 D-J5 D-F5W D-J59W D-F59F D-A5, D-A6 D-A3/A3C D-A44/A44C D-G39/G39C D-K39/K39C D-B5/B64 D-G5W D-K59W D-G59F D-G5 D-K59 D-G5NTL D-A59W D-F5NTL Bore size (mm) A A A A A A A B B B B B B B RE A B 0 (0) 0 (0) 0 (2.5) 2 (6) 4 (7.5) 0 (0.5) 0 (0.5) 0 (3) 2.5 (6.5) 4.5 (8) 3.5 (6.5) 3.5 (6.5) 5.5 (9) 8.5 (12.5) 10.5 (14) 0 (2) 0 (2) 1 (4.5) 4 (8) 6 (9.5) 1 (4)

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

D-G39A D-K39A D-A44A D-H7W D-H7BAL D-H7F D-G5NTL D-H7 D-H7C D-C73C D-C80C D-B5 D-B6 D-B59W MG MGP A 1(0) 1(0) 2(0) 7 B 0(0) 0(0) 1(0) 6 B 0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B 5(3) 5(3) 6(4) 11 B A B 1.5(0) 1.5(0) A 7(5) 7(5) 8(6) 13 B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 A Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D-K39A D-A44A D-H7W D-H7BAL D-H7F D-G5NTL D-C73C D-C80C D-H7 D-H7C D-B5 D-B6 D-B59W MGG MGC A 1(0) 1(0) 2(0) 7 B 0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B A B 1.5(0) 1.5(0) B 0(0) 0(0) 1(0) 6 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 A B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5 72 75.5

SZ3000

G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V Power supply { Transmission line Transmission line G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V Black White Brown Blue Crimp connector SL-J1A Main transmission line Transmission line 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V The above is

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

B A C Operating Range D B D-Z7/Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BAL Bore size (mm) A C 11.5 (10) 18.5 (17) 26.5 (25) 34 (32.5) 34 (32.5) 44 (42.5) D 0.5 (1) 3.5 (2) 0.5 (1) 3 (1.5) 5 (3.5) 5 (3.5) C 13 20 28 36 36 46 D C 5.5 12.5 20.5 28 28 38 Auto switch model Bore size (mm) 6 10 15 20 25 32 9 7 9 9 9 11 6 10 15 20 25 32 5.5 2.5 5.5 3 1 1 2 5 2 4.5 6.5 6.5 4.5 7.5 4.5 7 9 9 15.5

Air Slide Table Series MXS

125 150 MXS 6 6 Reed auto switch D-A9 D-A9V Solid state auto switch D-M9 D-M9V 2-color indication solid state auto switch D-M9W D-M9WV Extension end With buffer MXS 8 8 MXS12 12 Retraction end With end lock (Except for 6) MXH MXS16 16 MXU MXS20 20 Both ends Axial piping type MXS MXS25 25 MXQ Functional Options Adjuster Options MXF MXW Stroke Adjuster With Buffer Mechanism With End

SZ3000

G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V Power supply { Transmission line Transmission line G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V Black White Brown Blue Crimp connector SL-J1A Main transmission line Transmission line 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V The above is

EX120/121/122

Mount a unit to the D side of the manifold MJ1 EX12 S D 6 Unit specifications Communication protocol MJ1 CC-Link Separate power supply of unit and valve Enclosure IP67 Compatible with SV/VQC valves 6 Mounting specifications D Mount a unit to the D side of the manifold 1653 Series EX123/124/126 How to Order Option Fuse for replacement A fuse for replacement used for EX126D-SMJ1.

90

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 04 06 08 10 For 2 stations manifold For 4 stations manifold For 6 stations manifold For 8 stations manifold For 10 stations manifold d Model and dimensions D Applicable size d 6 8 1/4" 5/16" Weight (g) Note A L D Symbol 06 08 07 09 White White Orange Orange 18 20.5 18 20.5 35 39 35 39 8 10 8.5 10 1 2 1 2 Connector type 1 2 D sub-connector (

VQ7-6/7-8

VQ7-6-FG-DVQ7-6-FG-D-R FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R VQ7-6-FPG-DValve replacement parts FHG FJG FIG FHG FJG FIG Description Material VQ7-6-FG-SVQ7-6-FG-DVQ7-6-FPG-DVQ7-6-FG-S-R VQ7-6-FG-D-R VQ7-6-D-R VQ7-6-DNo.

Filter Regulator

Bowl assembly / auto drain for AW40-D, AW60-D Option symbol Semi-standard symbol 6 J 6J Semi-standard: (Standard) Semi-standard: J Piping port Piping port (9) Part No. thread ty pe (9) Part No. thread ty pe Rc Rc C4SF-J-D C4SF-D G G C4SFF-J-D NPT C4SF(-Z)-D NPT C4SFN-J(Z)-D Appearance and part No.

Compact

1 LEF LEJ A A LEL B D-D #3 LEM LEM LEY !6 @3 @3 @5 @4 @7 @2 @4 @5 @1 LES #1 #0 u #2 i y LEPY LEPS !3 C-C A-A LER !8 @6 @8 @9 B w !2 C !7 D LEH LEY -X5 D #4 #4 11LEFS C o !0 !5 11LEJS Motor option: With lock 25A!1 LEC !2 LEC S !3 LEC SS-T @0 LEC Y !9 Motorless LAT Component Parts Component Parts LZ No. Description Material Note 1 Body Aluminum alloy Anodized No.

Table of Contents

C D E F Dimensions Part no.

Rotary Actuator

9.5 24 M3 x 0.5 depth 6 M3 3.6 4 9 0.036 CRB2BWU15-D CRB2BWU20-D CRB2BWU30-D CRB2BWU40-D 0.004 0.016 0 34 20 21.2 18 4 10 0.5 14 10 29 M3 x 0.5 depth 5 M3 7.6 5 12 0.043 0.004 0.016 0 42 29 25 20 4.5 10 0.5 20 13 36 M4 x 0.7 depth 7 M5 10.5 6 14 0.043 0.005 0.020 0 50 40 29 22 5 12 1.0 26 14 43 M5 x 0.8 depth 10 M5 14 8 16 0.043 0.005