Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS 12 16 0.1 5 10 20 30 40 50 100 200 0.01 5 10 20 30 MXW Overhang L (mm) Overhang L (mm) Maximum Speed: Up to 400 (mm/s) Graph (5) Graph (2) Maximum Speed: Up to 300 (mm/s) MXJ 0.3 50 40 30 20 MXP 0.2 10 MXY 0.1 2 3 4 5 Mass W (kg) Mass W (kg) 40 32 MTS 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 20 8 0.02 16 12 0.01 0.1 5 10 20 30 5 10 20 30 40 50 100 200 Overhang L (mm) Overhang L (mm) Graph (3)
None 8 Purple White Flat ribbon cable type/Cable assembly 9 Gray Black 1 to 3 10 White Black AXT100-FC11 White Red Triangle mark position 12 Yellow Red 6 Red 13 Orange Red 14 Yellow Black 26 2 25 1 15 Pink Black W 16 Blue White 17 Purple None 18 Gray None (15.6) Terminal no. 19 Orange Black L 20 Red White Flat Ribbon Cable Assembly 21 Brown White 22 Pink Red Cable length (L) 10 pins 20
TYPE BRACKET H O W T O O R D E R L T Y P E B R A C K E T Spacer with Bracket Bracket Only 1000 S E R I E S Y10L .B110L 2000 S E R I E S Y20L .B210L 3000 S E R I E S Y30L .B310L 4000 S E R I E S Y40L .B410L 4000-06 S E R I E S Y50L .B510L 5/6000 S E R I E S Y50L .B610L D I M E N S I O N S L T Y P E B R A C K E T Spacer with L-type bracket A B C D E F G R L Y10L 20 12 4.5 3 25 5 8 2.25 27 Y20L
Model Model ZPR20B-0-A10 ZPR40B-0-A14 23.5 38.5 49.3 67.1 12.4 47.5 58.3 76.1 24.4 20 25 40 48 16 22 43 34 10.5 25 ZPR25B-0-A10 19 ZPR50B-0-A14 50 24 39 49.8 67.6 15.6 51.5 62.3 80.1 32.4 28 57 27 53 38 14 ZPR32B-0-A10 32 29 44 54.8 72.6 18.9 37 34 Dimensions by Stroke Dimensions by Stroke 40 50 J K: 6 K: 8 Model 20 25 32 J K: 4 K: 6 K: 8 G H G H L M L M Model G H G H G H L M L M L M ZPRB10
50 20 40 Pressure loss (kPa) Pressure loss (kPa) 15 30 10 20 5 10 Flow rate (l/min) 0 200 0 50 100 150200250 300 400 350 450 500 20 50 100 150 Flow rate (l/min) Sensor Unit Construction PF2A710/750 PF2A510/550 Parts list No. 1 2 3 4 5 Description Attachment Seal Mesh Body Sensor Material ADC NBR Stainless steel PBT PBT Flow direction PF2A711/721/751 PF2A511/521/551 Parts list Material ADC
Model Flow range 0.5 L/min 2 L/min 5 L/min 10 L/min 20 L/min 50 L/min 100 L/min 200 L/min 0.5 L/min 20 L/min LFE1 0.4 L/min 24 L/min 0.4 L/min 24 L/min 2.5 L/min 100 L/min LFE2 2 L/min 120 L/min 2 L/min 120 L/min 5 L/min 200 L/min LFE3 4 L/min 240 L/min 4 L/min 240 L/min Rated flow range Display flow range Set flow range 21 These safety instructions are intended to prevent hazardous situations
14-4-37 20 Series ARM11A/B End Block Pressure Gauge ARM11E L Indication unit Part no.
Black 19 Orange L White 20 Red Flat Ribbon Cable Assembly 21 Brown White 22 Pink Red Cable length (L) 20 pins 26 pins 10 pins Red 23 Gray 1.5 m 3 m 5 m AXT100-FC10-1 AXT100-FC20-1 AXT100-FC26-1 White 24 Black AXT100-FC10-2 AXT100-FC20-2 AXT100-FC26-2 25 White None AXT100-FC20-3 AXT100-FC26-3 AXT100-FC10-3 Connector width (W) 30 37.5 17.2 D-sub Connector Cable Assembly Electric Characteristics
14-4-37 20 Series ARM11A/B End Block Pressure Gauge ARM11E L Indication unit Part no.
79 6.6 8 42 52 20 FX FT 10 to 50, 75, 100 106.5 84.5 5.5 8 48 56 25 B + Stroke L FZ 10 to 50, 75, 100 126 104 5.5 8 54 62 28 2-FD A + Stroke 25, 28 Bore size (mm) FZ L M 55 18 10 60 20 16 FV 64 20 20 65 22 34 25 72 22 FT 40 28 FX B + Stroke L FZ A + Stroke 4-FD Rear flange type/MQQLG 10, 16, 20 (mm) 25, 28 Bore size (mm) Stroke range (mm) A L 4-FD 2-FD 75 8 10 10 to 40 88.5 10 16 10 to
control Port 1 0: L+ ON, 1: L+ OFF 1 L+ control Port 2 0: L+ ON, 1: L+ OFF 5 2 L+ control Port 3 0: L+ ON, 1: L+ OFF 3 L+ control Port 4 0: L+ ON, 1: L+ OFF 4..7 Reserved 0 -105No.EX-OMX1011 Configuration format (EX600-LAB1 / EX600-LBB1) Byte 6 to 45 EX600-LAB1 / EX600-LBB1 (46 byte) Byte Bit Parameter Setting value PortConfig Port 1 0: Deactivated 1: IOL_Manual 2: IOL_Autostart 3:
If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.
M L M L M L M L 472 Slide Unit: Built-in Shock Absorber Slide Bearing Type Series CXWM 10, 16, 20, 25, 32 How to Order Port thread type M thread 10 to 20 Nil Rc 1/8 TN 25, 32 NPT 1/8 16 150 CXWM TF G 1/8 150 J79W DB 16 C XWM With auto switch Made to Order Refer to page 474 for the Made to Order specifications.
M L M L M L M L 472 Slide Unit: Built-in Shock Absorber Slide Bearing Type Series CXWM 10, 16, 20, 25, 32 How to Order Port thread type M thread 10 to 20 Nil Rc 1/8 TN 25, 32 NPT 1/8 16 150 CXWM TF G 1/8 150 J79W DB 16 C XWM With auto switch Made to Order Refer to page 474 for the Made to Order specifications.
/single rod Double acting Action CY1B: 6 10, 15, 20 25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20 25, 32 12, 16 20, 25 32, 40 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 20, 25 32, 40 50, 63 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50mm/s 7 to
Unit: mm -X416 (one side) -X417 (one side) Bore size (mm) Spacer Spacer Adjustment range Adjustment range Length (l) Length (l) MY3B MY3B Head cover 16 25 40 63 10 12 16 24 10 to 20 20 to 30 20 24 32 48 12 to 24 24 to 36 16 to 32 32 to 48 24 to 48 48 to 72 l (X416) Stroke adjusting unit l (X417) Holder mounting bracket 8-14-24 24 Series MY3A/3B Made to Order Specifications 2 Please contact
GR-S-010 (10 g) GR-S-020 (20 g) Guide unit GR-L-005 (5 g) GR-L-010 (10 g) Cylinder unit High carbon chrome bearing steel Stainless steel NBR NBR NBR 25 Series MXQR Auto Switch Proper Mounting Position (Detection at Stroke End) Solid State Auto Switch: D-M9B, D-M9N, D-M9P, D-M9BW, D-M9NW, D-M9PW Stroke B Stroke E A Model 10 20 30 125 75 100 40 50 150 10 20 30 125 75 100 40 50 150 MXQR6 17.5
--20-T, HRS024--20-T 0.8 80 0.7 70 Circulating fluid pressure [MPa] Available area Outlet60Hz 0.6 60 Pump head [m] 0.5 50 0.4 40 0.3 30 Outlet50Hz 0.2 20 Return port Available area 0.1 10 0 0.0 5 0 5 10 15 20 25 Circulating fluid flow [L/min] Fig 9.6-4 Pump capacity(HRS012--20-T, HRS018--20-T, HRS024--20-T) HRS Series 9.6 Pump capacity 9-13 HRX-OM-M090 Chapter 9 Documents 9.6.5 HRS012--20