5 Port Solenoid Valve Series SQ1000/2000

A A B A B A B A B A B A B 122.3 4 A SMC 53.6 2 B 37.6 18.5 Approx. 12 Approx. 12 EXH. outlet Applicable connector: Flat cable connector (20P) (conforms to MIL-C-83503) Triangle mark indicator position Approx. 10 D side U side Station 1 2 3 4 5 6 7 8 n C10: R(EXH) port For top ports C10: P(SUP) port 4 A 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A R 62 41.5 (58) 39.5 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 25.5

Ozone Resistant

-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves 0 1000 2000 4000 5000 1000 2000

NARM Series

-P10-N01 Blanking plate kit 136114A 136214A (plate, screws, and o-ring) Manifold base, 13612-*-N 13622-*-N Common IN (A1, A2) Manifold base, 13613-*-N 13623-*-N Individual IN (B1, B2) * Denotes number of stations: 2~10 available. 10 10 station NARM2000-4B2 Note1) In case of A1 and B1, a pressure gauge or a plug is mounted at the body side, while in case of A2 and B2, at the manifold side.

Gun Type Ionizer

AC adapter (Without AC cord) 03 Power supply cable (For 24 VDC wiring) N None Symbol Type 01 Standard nozzle 02 Bypass nozzle*3 *1 The AC adapter body and the power supply cable (For AC adapter) come as a set.

VT307

1/8, 1/4 (A port) P = 26 L Dimension n: Stations Stations Formula L1 = 26 x n + 24 L2 = 26 x n + 12 2 76 64 3 102 90 4 128 116 5 154 142 6 180 168 7 206 194 8 232 220 9 258 246 10 284 272 L L1 L2 [ ]: With light/surge voltage suppressor 4-7-8

ZQ-OM01401

) 4 3.2 () 5 4 () 24 - No.ZQ-OM01401-B ZS-39-5G ZQ1-LW6-N-A 1) N NPN P PNP (1) 3 Assy ZQ1-PL11-A 4 Assy ZQ1-FC1-A 5 (10 ) ZQ1-FE2-A 6 ZQ1-CV 7 V VVQ1000-50A-C4 (1) 50A-M5 (M5x0.8) (1) 50A-C3 3.2 () 50A-C4 4 () 8 (10 ) 50A-C6 6 () ZK1-CP-A F1-LC3 3.2 () F1-LC4 4 () 9 Assy ZQ1-BK1-A 25 - No.ZQ-OM01401-B 7.3 b a a a 1. (2 ) 2.

Thermo-chiller

With functions narrowed down, 2 independent temperature control systems have been achieved with only a single compressor , a single pump , and a single tank .

VHS

Left IN1(P) Piping VHS500-06 VHS501-06 VHS400-04 VHS401-04 VHS400-03 VHS401-03 VHS400-02 VHS401-02 Right IN1(P) 3 4 1 2 3 8 1 4 Port size Effective area (mm2)(CV) Weight (kg) 93(5.22) 57(3.20) 35(1.97) 21(1.18) 105(5.90) 76(4.27) 54(3.03) 35(1.97) 0.29 1(P)2(A) 2(A)3(R) 0.34 0.25 0.27 Left or right to the front face of the handle.

33

x Depth 580 HRSE018-A-23 HRSE024-A-23 HRSE012-A-23-T 48 Height 790 x Width 470 x Depth 580 HRSE018-A-23-T HRSE024-A-23-T IDH Selection Warning 1.

ZSE F/ISE

High Suction Vacuum Work 1 Work 2 Work n Max.A ON point OFF point Min.B Not adsorption Work 1 Work 2 Work n Atmosphere A B 4 A B 4 = A ON point Max.A: Maximum pressure value when workpiece is vacuumed. Min.B: Maximum pressure value when workpiece is not vacuumed.

3 Port Solenoid Valve Rubber Seal Series SY100 1

(Station 1) (Station n) A A A A 13 13 8.7 7.7 (Pitch) n-M3 x 0.5 (A port) 12.6 P = 10.5 n-M5 x 0.8 (A port) 12.6 P = 10.5 (Pitch) M3 M5 L plug connector (L) M plug connector (M) 31.7 (For AC) 30.4 (For DC) 15.6 39.1 (For DC) 45.6 (For AC) 40 (Light/Surge voltage suppressor) (Light/Surge voltage suppressor) 26.4 Other dimensions are same as grommet type.

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

M1 Weight (g) 4 6 6 8 6 8 10 8 10 8 10 10 12 Applicable tubing O.D. d T H D1 D2 L1 L2 L3 Model AS121-M5-F04 AS121-M5-F06 AS221-01-F06S AS221-01-F08S AS221-02-F06S AS221-02-F08S AS221-02-F10S AS321-02-F08S AS321-02-F10S AS321-03-F08S AS321-03-F10S AS421-04-F10S AS421-04-F12S 16 17 17 18.5 17 18.5 21 18.5 21 18.5 21 21 22 13 13 34 31 54 50 52 86 81 93 88 154 146 21 21.5 25.5 26 M5 x 0.8 28.3

VXA21/22

VXA22 , , 18 21 9 10.5 40 45 21 27 55 62 64 71 11 13 36 46 46 56 11.5 Dimensions (Orifice Size: 8 mm, 10 mm) VXA225/VXA226 Thread fixed: (VXA2262 0-04 only) 2-M5 x 0.8 depth 8 Dimension of view from A Pilot port Port size P Rc , With bracket E Port size View from A Model A B C D VXA22 52 60 02 03 VXA226 -04 2 0 1 4 3 8 22 28 11 14.5 67 73 77 83 27 30 1 2 Fixing with thread is also possible

Series SY100 3 Port Solenoid Valve Rubber Seal

(Station 1) (Station n) A A A A 13 13 8.7 7.7 n-M5 X 0.8 (A port) 12.6 P=10.5 (Pitch) n-M3 X 0.5 (A port) 12.6 P=10.5 (Pitch) In case of M3 In case of M5 L plug connector (L) M plug connector (M) 31.7 (In case of AC) 30.4 (In case of DC) 15.6 39.1 (In case of DC) 45.6 (In case of AC) 40 (Indicator light and surge voltage suppressor) (Indicator light and surge voltage suppressor) 26.4 Other

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

Model B C D E F G H J K L M N P U T S R VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 VFN 1 4, 3 8, 1 2 64 64 65 70 1 136 35 9 64 54 19 32 50 50 118 96 120 60 7 1 2, 3 4 82 68 88 92 1 181 53 12 81 70 35 36 66 52 133 96 140 66 9 DC C Model VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 A B Port size Rc 1 4, 3 8, 1 2 64 50.8 163 196 68 60.5 1 2, 3 4 4-16-7

Pilot Operated Regulator AR425 to 935 Series

AR4 5 AR6 5 AR8 5 AR9 5 Description Model Pressure gauge with limit indicator Note 1) B24P B25P Bracket G46-10-02 (Max. 1.0 MPa), G46-2-02 (Max. 0.2 MPa) Note 1) In the gauge part no. (e.g. G46-10-02), indicate kind of the connecting thread. Put nothing for Rc and N for NPT thread. Please consult with SMC for NPT pressure gauge.

Speed Controller: Standard Type In-line Type AS Series

Nil Metric thread (M3, M5) Rc NPT G N F Bore size Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 1/8 1/4 3/8 1/2 AS1000 AS1000 AS2000 AS2000, 3000, 4000, 5000 AS3000, 4000, 5000 AS4000, 5000 650 A AS Series Speed Controller: Standard Type In-line Type Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

CEx-OMQ0010

-03 100 VFS440R VFS310 AR425 12/9 AN400-04 AS420-04 1m 6-2 6-3 (1)( ) (2) No.2()(CEU2 ) (3) (4) CEU2 19 7-1 () () ( 8 ) CE2 14.5mT CE2 15000 18cm 7-2 ()() A /B (CEU1CEU5 )0.1mm 20 8-1 A() 8-2 2 15 0.3MPa 30 21 M4x10 LOCK FREE 8-3 () 2 15 0.3MPa 30 [LOCK] 22 8-4 MPa () () mm 40 50 63 80 100 N 882 1370 2160 3430 5390 )15% 23 8-5 (kgf) (kgf) (mm/s) (mm/s) 24

Rotary One-touch Fittings Manifold Series KM

Series KM Rotary One-touch Fittings Manifold Construction KM11 KM12 Port A: One-touch fitting Port B: One-touch fitting Port A: One-touch fitting Port B: NPT or Rc (PT) female thread KM14 KM13 Port A: One-touch fitting Port B: One-touch fitting Port A: One-touch fitting Port B: One-touch fitting, R(PT) male thread KM16 KM15 Port A: One-touch fitting Port B: One-touch fitting stud Port A:

HRX-OM-X037

For a facility with a large installation area that can vent the air naturally: Make an air outlet on a wall at a high level and air inlet on a wall at a low level, to allow for adequate airflow. 2. For a facility with a small installation area that cannot vent the air naturally: Make a forced air exhaust vent on a wall at a high level and an air inlet on a wall at a low level. 3.