SMC Corporation of America
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Manifold Terminal blocks 1 to 4 stations 1 row 5 to 8 stations 2 rows Note) Wiring other than those above is possible. See p.1.10-67 for details.

Number of samplings Sampling method 0.5 to 5 m: Correction possible when it is sucked at a nonconstant velocity 108 Maximum concentration limit (particles/m 3) Considered particle diameter (m) 0.1 0.2 0.3 0.5 1 5 10 100 1000 10 10 10 Cleanliness class (N) 107 Airborne particle concentration, Cn (particles/m3) 106 2 24 237 2370 23700 237000 1 2 3 4 5 6 7 8 9 4 35 352 3520 35200 352000 3520

R1 R2 n VQC B A VVQ4000 -10A-1 SQ 7 VQ0 B A 6 VQ440 0 1 VQ4 B A VQ5 1. Electrical entry of manifold (except L and C kit) is individual wiring. For details, refer to internal wiring figure of each kit. Cable length is 0.6 m for L kit. VQ430 0 1 5 VQZ B A VQD VQ420 0 1 4 1.

Reference VCR: 1/8 turn after tightening by hand SWJ: 1 1/4 turns after tightening by hand 3. Attach the valve using body bottom mounting screws (2-M5 P=15). 1. The body material is SUS304, the electromagnet is 13Cr stainless steel, and the seal material is fluoro rubber (Viton). Use fluids which are compatible with these materials. 2.

When block is locked and block is moved counterclockwise, the shaft with single flat in Fig. 1-1 rotates from point zero to end of rotation w. The maximum rotation range of the shaft with single flat is as follows: Sizes 10, 40: up to 230; Sizes 15, 20, 30: up to 240 (Fig. 1-2 shows when the rotation is 0.)

Size Ejector System Vacuum Pump System Port Metric Inch Metric Inch PV 6 1/4 6 1/4 V 6, 8 1/4, 5/16 6, 8 1/4, 5/16 EXH (Port exhaust) 8 5/16 PE EXH Common Port open to atmosphere Note 1) PS 4 5/32 PD Note 2) M3 M3 : Not applicable Note 1) Piping for PE port is available as an option (M3). Refer to page 11. Note 2) A model with PD port (M3) is available as an option. Refer to page 11.

1 1 5 3 3 5 3 5 Regulating port B Regulating port P Regulating port A Caution Part No.

Terminal block number 5 6 7 8 4 3 2 1 The applicable panel thickness is 1 to 3.2mm.

1 Made to Order Nil 1 3 5 Nil D Screw mounting DIN rail mounting1 Nil X5 Standard product With magnet/switch rail Without cable 1.5 3 1 Only available for the controller types 6N and 6P 2 DIN rail is not included. Order it separately. 5 When Without controller is selected for controller types, I/O cable length cannot be selected.

P. 17-5-101 6 VN 1 2 LVC 3 LVA Male 4 LVH 5 Elbow LQ1L P. 17-5-102 6 LVD 1 LVQ 2 LQ 3 Female 4 LVN 5 TI/ TIL P. 17-5-103 6 PA 1 2 PAX 3 PB Male 4 5 Run tee LQ1R P. 17-5-104 6 1 2 3 Female 4 5 P. 17-5-105 6 Note) Basic size With reducer 17-5-93 22 Series LQ 1 2, LVN, TL/TIL Port size Tubing O.D.

It is possible to set the step data from 1st to 5th. When test drive is executed, the operation is tested by the step data in a number order from No.1 to 5. AX IS. Test DRV 1 1st None 2nd Press the key. AX IS.

ZX1-R1-1 ZX1-R1-3 ZX1-R16 4 pcs. (Ordering example) ZZX106-R 1 pc. (Manifold base) ZX100-K15LZ-EC 5 pcs. (Vacuum single unit) ZX-BM1 1 pc.

, where 1 cycle is one reciprocal motion.

HRS 100/150 5 Timer for operation start/stop Timer is used to set the operation start/stop. HRSH 090 6 Signal for the completion of preparation A signal is output when the circulating fluid temperature reaches the set temperature, when using contact input/output and serial communication. !0 !1 !2 !3 !4 !5 !6 HRSH HRSH No.

It is possible to select the function to memorize it. (Every 2 or 5 minutes) When 5 minutes memorizing is selected, the lifetime of the memory element (electronic part) is 1 million times (5 minutes x 1 million times = 5 million minutes = Approx. 9.5 years for 24 hour energizing).

0 (A) 4 (B) 2 5 (EA) 1 (P) 3 (EB) 4(A) 2(B) 5(EA) 1(P) 3(EB) i JIS symbol 2 position double 2 position double (A) 4 (B) 2 w e q r t y u o !0 5 (EA) 1 (P) 3 (EB) 4(A) JIS symbol 3 position closed center (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i 3 position exhaust center (A) 4 (B) 2 3 position closed center/exhaust center/pressure center 5 (EA) 1 (P) 3 (EB) w e q r t y u o !

Q_Address bit 7 6 5 4 3 2 1 0 1 ID5 ID4 ID3 ID2 ID1 2 (6) Return of the final station number Indicates the range of the ID of the controller (LEC) to communication when the initial is processed. ID number is set in binary digit. Input range is from 1 to 5. If the set value is lower than 0 or larger than 5, 5 is set. ID bit 3 2 1 0 1 0 0 0 1 2 0 0 1 0 3 0 0 1 1 5 0 1 0 1 45 - 13.

FEP, PFA, Nylon, Soft nylon (1), Polyurethane ", ", ", ", ", ", " 1 8 1 4 1 2 3 8 5 32 3 16 5 16 Note 1) Soft nylon tubing is not compatible with water.