Air Slide Table

A1 A M5 x 102 23 4 RJ(H)N MXQA-JT20P3 Model Adjuster part no.

AC Servo Motor Driver (Network card type ）

The model speed command is a speed command generated in the driver for forced stop deceleration of the servo motor. 3 23 3.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

-01, 1 8 For 8, 5/16" Applicable tubing O.D.: 6, 1/4" (A, B port) One-touch fitting (Pitch) (Pitch) 9 18 P=17.5 9 18 P=17.5 (A, B port) 1/8 7.5 23 7.5 23 B B B B A A A A L2 L1 5 (Pitch) P=17.5 21 + 13.8 15.2 + (4.9) 5.3 7.3 68.1 100.2 [102.4] (For mounting) 4 x 4.5 27.7 20 139.6 [144] 20 20 37.7 66.7 B B P EB EA B B B 127 [131.4] 100.5 A A A A A 16 Manual override (P , EA, EB port) 1/4 +

LEC-OM071xx

n e l D i s p l a y a n d SigmaWin+TM 2.

F

21 47 23 P R O D U C T S E L E C T O R B U L K H E A D U N I O N : KQE (KQ2E) Use to junction connection of tubes for installation of panel.

KQ2

Can be used for a wide range of pressures from a low vacuum up to a pressure of 1 MPa The use of a special profile ensures sealing and reduces resistance when the tube is inserted.

AC Servo Motor Driver

A 9 CONTENTS 1.

2/3 Port Valve

VX22 0 2 3 4 VX23 0 2 3 4 VX070-022 4.1-5 VX21/22/23 Air How to Read the Graph In the sonic flow region: For a flow of 500 l/min.

Table of Contents

Seal guide B Slide plate Spacer Hexagon socket head cap screw MYMK-16-A MYMK-16-A MYMK-25-A MYMK-25-A MYMK-25-A Side seal unit Nickel plated Seal List No. !

10

Body material Port size Orifice diameter e VX2 3 A A 0 Body material Aluminum Port size 1/8 A e w Orifice diameter 2 Select electrical specification. Step 3 Item Selection item Symbol VX2 3 0 A A Voltage 24 VDC Select electrical specification. A r Electrical entry Grommet r For special options, refer to pages 21 to 23.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

23 23 23 27 Refer to page 563 for dimensions with connector cable. 519 10-SYJ5000 5 port solenoid valve Series 2 position double [ ]: AC G H Grommet (G), (H): 10-SYJ5223-M5 Built-in One-touch fitting 10-SYJ5223G H C4,N3 C6,N7 G: Approx. 300 H: Approx. 600 (Lead wire length) 87.2[91.6] 43 3.5 11 5 B A B A 19 10 10.6 Manual override M5 x 0.8 (A, B port) 2-2.6 (For manifold mounting) One-touch

ZP

A r Buffer stroke t Vacuum inlet y Width across flats M Connection thread S 10 91 57 23 20 129 67 51 30 139 77 40 175 87 77 50 185 97 10 13 46 29.9 21 P 10 8 M5 x 04 06 2.5 10 91.5 57.5 0.8 23 20 129.5 67.5 51 30 139.5 77.5 40 175.5 87.5 77 50 185.5 97.5 Applicable tubing O.D.

SQ1000/2000

A 1 () Station 1 SOL. A Station 2 14 () SOL. A Station 3 2 () 1 SOL. A Station 4 14 15 () 2 15 SOL. A 3 3 () Station 5 16 SOL. B 4 16 () 17 5 SOL. A 4 () 18 6 Station 6 SOL. B 19 17 () 7 20 SOL. A 8 5 () Station 7 21 SOL. B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.

NCQ2/CQ2

14 17.5 15 17.5 20.5 23.5 B 9 12 15.5 18.5 23 29.5 A 18 21.5 19 21.5 24.5 27.5 B 13 16 19.5 22.5 27 33.5 A 15 18.5 16 18.5 21.5 24.5 B 10 13 16.5 19.5 24 30.5 A 15.5 19 16.5 19 22 25 B 10.5 13.5 17 20 24.5 31 A 20.5 24 21.5 24 27 30 B 15.5 18.5 22 25 29.5 36 A 12.5 16 13.5 16 19 22 B 7.5 10.5 14 17 21.5 28 B 3.5 6.5 9.5 12.5 17 23.5 A 8 11.5 9.5 12 15 18 Bore size 32 40 50 63 80 100 Note)

5 Port Solenoid Valve Series SV1000/2000/3000/4000

(Pitch) With External Pilot Specifications P=10.5 13.5 46.7 22.3 11.8 18.1 8.4 10 12.6 23 29.2 28.6 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 45.5 5 3 E 5 3 E 5 3 E 5 3 E 52.7 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 59 P 1 P 1 C2 P 1 P 1 C2 PE PE One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 8 5/16" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 3.2, 1/8" 4, 5/32

1

A A A A A R Y + Stroke R Y + Stroke 2-Rc 1/8 (Both sides) HU Width across flats HT 2-Rc 1/8 (Both sides) HU Hs CL View A-A CL R Y CL HT HU Bore size (mm) 20 25 32 40 50 63 80 100 14 108 49 14 30.7 14 108 54 14 33.2 14 110 64 14 36.5 15 121 77 14 41 16 136 92 17 46.2 16 139 100 17 53.2 23 165 115 23 62.2 23 165 140 26 72.7 Specifications other than above are the same as standard type.

CATALOG VC10

F540-A F560-A F5100-A F620-A F640-A F660-A F6100-A 20 40 60 100 20 40 60 100 BRASS NPT FILTER BRASS NPT FILTER/STRAINER S543-A S5140-A 43 140 BRASS NPT NPT MUFFLER M875-C M975-C 75 75 430F SS 430F SS NPT NPT EXAMPLE: Inline Filter NPT 60 Micron Brass Body No.F660-A FILTER/STRAINER SPECIFICATIONS: Pipe Size: 1/8 NPT CV=.23 Screen Rating: 43 Micron or 140 Micron Max.

TABLE OF CONTENTS

F540-A F560-A F5100-A F620-A F640-A F660-A F6100-A 20 40 60 100 20 40 60 100 BRASS NPT FILTER BRASS NPT FILTER/STRAINER S543-A S5140-A 43 140 BRASS NPT NPT MUFFLER M875-C M975-C 75 75 430F SS 430F SS NPT NPT EXAMPLE: Inline Filter NPT 60 Micron Brass Body No.F660-A FILTER/STRAINER SPECIFICATIONS: Pipe Size: 1/8 NPT CV=.23 Screen Rating: 43 Micron or 140 Micron Max.

0.4

7#> 1*&$ 1*&$ 23 23 23 23 23 23 23 :$!&"# 1-#*$ 1*&$ -#*$ :; 1*&$ !"#! $%&!"' !"#! $%&!"' ( )!$*+ % ,-$$-. ( )!$*+ % ,-$$-. ( )!$*+ % ,-$$-. 0 1*&$ *&+#"4 5 5 2$"$-*4 3"-+ 4$"$-*4 T VQC1000/2000/4000 Kit (Terminal block box kit) IP67 compliant This kit has a small terminal block inside a junction box.

Table of Contents

11 2 MRHQ 18 25 15.5 41.5 Misc. 5 Angle adjustment bolt 33 33 63 D3-R1.5 2011 +0.025 0 2-4.5 through 2-8 depth of counter bore 2.5 3-3H9 depth 4 (one each on three sides) 2 10 +0.025 0 3-3H9 long groove depth 3 (one each on three sides) 0 -0.062 37h9 M5 x 0.8 Port A M5 x 0.8 Port B 4-M4 x 0.7 depth 6 I N J E A D P A A M N 2 R SMC R E O P P T 6 A I R R G Y R A I 18 6 21 9 5 5 23 34 Side A