) 10VDC 1 LG P S T CN5 (Note 1) VBUS 1 2 3 5 Servo motor D CN2 P S T Encoder USB D GND 7 8 MR MRR MD MDR 3 2 4 LG E M 3 49 3.
of needle rotations ASN Dimensions AQ (Hexagon width across flats) (Hexagon width across flats) Applicable tubing O.D. d ASV Applicable tubing O.D. d AK VCHC ASR ASQ A (2) L4 (1) Max.
Metric Inch Model Port size 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 ASD230F-M5 ASD330F-01 ASD430F-02 ASD530F-02 ASD530F-03 ASD630F-04 M5 X 0.8 R(PT)1/8 R(PT)1/4 R(PT)1/4 R(PT)3/8 R(PT)1/2 ASD230F-U10/32 ASD330F-N01 ASD430F-N02 ASD530F-N02 ASD530F-N03 ASD630F-N04 10-32 UNF NPT1/8 NPT1/4 NPT1/4 NPT3/8 NPT1/2 Specifications Proof pressure 1.5MPa Max. operating pressure 1MPa JIS symbol
Thread T F N Orifice size 2 3 4 5 6 Rc(PT) NPTF G(PF) NPT 3mm 4.5mm 6mm 8mm 10mm Refer to table q for configuration. Port size 01 02 03 04 1 8 1 4 Valve/Body 0 2 Normally closed (N.C.)/single unit Normally open (N.O)/single unit 3 8 1 2 Refer to table q for configuration.
VSR8-2-FDCG-D VSR8-4-FDCG-D VSR8-2-FDBG-D VSR8-4-FDBG-D VSR8-2-FDAG-D VSR8-4-FDAG-D 6 A 4 A 3 A 1 A 5 B 2 B Output COM. 1 2 3 4 5 6 7 8 9 10 IP65 enclosure compliant 4-position dual 3-port valves (Rubber seal only) kit (Terminal block box) L Model A side B side Symbol Connector wiring diagram (Mixed wiring) Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4
Parameter Classification . 15 2.4.2 Notation for Parameters . 16 2.4.3 Setting Parameters. 16 2.5 Monitor Displays. 16 2-1 2 P a n e l D i s p l a y a n d SigmaWin+TM 2.
, D-H7NF, D-F7BAL Solid state D-B53, D-B54, D-B64, D-B59W D-G5NTL BA-01 Reed BA-32 BA-02 BA-04 Solid state *Mounting screw set made of stainless steel Use the following mounting screw set made of stainless steel according to operating environment.
m AFJ20-02-40-S/AFJ30-03-40-S/AFJ40-04-40-S AFJ20-02-40-T/AFJ30-03-40-T/AFJ40-04-40-T 12 12 AFJ20-02-40-T AFJ30-03-40-T AFJ20-02-40-S AFJ30-03-40-S AFJ40-04-40-S 10 10 Pressure drop [kPa] Pressure drop [kPa] 8 8 AFJ40-04-40-T 6 6 4 4 2 2 Water drop removal type Nominal filtration rating: 40 m Large flow type Nominal filtration rating: 40 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate
Total Land Area: 55,647m 2 Floor Space: 23,022m 2 Total Land Area: 124,227m 2 Floor Space: 17,204m 2 Tohno Factory (Iwate Prf.) Total Land Area: 60,638m 2 Floor Space: 10,622m 2 Tsukuba Factory (Ibaragi Prf.)
to 92.7 4 to 186 8 to 371 Instantaneous CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Setting/Display flow range flow CO2 0.8 to 18.5 1.8 to 46.3 4 to 93 8 to 185 CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Min. setting/display unit 0.1 CFM x 10-2 0.1 CFM x 10-2 1 CFM x 10-2 1 CFM x 10-2 Accumulated Setting/Display flow range 0.0 to 9.0 0.0 to 9.9 0 to 9 0 to 9 ft3 x 10-1 ft3 x 10-1 ft3 x
Grommet Grommet (with surge voltage suppressor) A A D D J J Exhaust port 24.4 I R Q z300 24.4 Q z300 I 1/2 R 1/2 K K S S Exhaust port L L E H H E U U F F G G 2 P 2 P Port size Port size DIN terminal A D Q T J R Cable 6 to 12 S I K 24.4 1/2 Exhaust port (44) U F G1/2 L H E Port size 2 P G Dimensions (mm) Model Port size P A D E F G H I J K L S VXF25A< VXF26A< 2 1/2 3 182 206 92 102 212
L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 4 33 25 10 10.5 10.5 12 8.5 13.75 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 53.2 9.1 14.1 30 10 18 11.6 19.5 23 20 29 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 67 15.5 17.5 34 14 22
(Applicable to all models) (Ex.)A731 D-A731 Ac ces s sorie sl Part s Li st 056 (e^6) 075 (3/4) 106 0n/16) 150 (1-1/2') 2OO (2') 25O (2-1t2',) 300 (3') 400 (4"' Jam Nd JM.O1 JM-02 JM-03 JM.O4 JM.O5 JM-05 JM-08 JM-10 Single Rod Clevis RCS-015 BCS-02 RCS-03 RCS-04 HCS-o5 RCS-05 RCS-08 RCS-10 Double Rod Clevis RDS-o15 RDS-02 RDS-03 RDS-04 RDS-05 RDS{5 RDS.08 RDS-10 w/ dn(l). rcteinino rin6{21
(Applicable to all models) (Ex.)A731 D-A731 Ac ces s sorie sl Part s Li st 056 (e^6) 075 (3/4) 106 0n/16) 150 (1-1/2') 2OO (2') 25O (2-1t2',) 300 (3') 400 (4"' Jam Nd JM.O1 JM-02 JM-03 JM.O4 JM.O5 JM-05 JM-08 JM-10 Single Rod Clevis RCS-015 BCS-02 RCS-03 RCS-04 HCS-o5 RCS-05 RCS-08 RCS-10 Double Rod Clevis RDS-o15 RDS-02 RDS-03 RDS-04 RDS-05 RDS{5 RDS.08 RDS-10 w/ dn(l). rcteinino rin6{21
a o l F n o i t p i r c s e D 2 ~ 1 0 1 4 S I y t i c a p a C W 5 1 : C D , A V 5 1 : C A e g a t l o V V 0 5 2 C D , V 0 0 1 C A e r u s s e r P f o o r P ) a P M ( g i s p ) 5 . 1 ( 0 2 2 ) a P M ( g i s p e r u s s e r P . r e p O . x a M ) 0 . 1 ( 0 5 1 a i d e M l i O , r e t a W e r u t a r e p m e T d i u l F d n a t n e i b m A ) C 0 6 ~ 5 ( F 0 4 1 ~ 0 4 l e d o M A B C D E F G
Model Effective area (With sub-plate) (mm 2) (Nl/min) Response time (2) (sec) Weight (3) (kg) 0.025 or less 0.015 or less 0.045 or less 0.045 or less 0.05 or less Max. operating rate (1) No. of positions Model 1 4 (cycle/sec.) 20 20 10 10 10 VS7-6-FG-S--Q VS7-6-FG-D--Q VS7-6-FHG-D--Q VS7-6-FJG-D--Q VS7-6-FPG-D--Q 2 (Single) 2 (Double) 3 (Closed centre) 3 (Exhaust centre) 3 (Pilot check) 27
(Max. 20 stations) SUP/EXH block assembly mounting position Valve stations Series 3 5 7 02 2 stations SY3000 SY5000 SY7000 20 20 stations Symbol Mounting position U side D side Both sides Special specifications Applicable stations U D B M 2 to 10 stations 2 to 20 stations In case of special specifications, indicate separately on a manifold specification sheet.
ax mum stalion: 8 (Note 2) (+) and (-) iid cale lhe d rction ol DC soleno d va ve w th lrghl surge voLlage sumiessor lNoie 3) Sres VFS3o0HOM is aso possible Cable clamp 206138-1...1 pc Socket 66105-2...24 pcs. Nippon AlvlP's cable Cable clamp 206128-1...1pc Sockel 661 05'2. . .24pcs.
ax mum stalion: 8 (Note 2) (+) and (-) iid cale lhe d rction ol DC soleno d va ve w th lrghl surge voLlage sumiessor lNoie 3) Sres VFS3o0HOM is aso possible Cable clamp 206138-1...1 pc Socket 66105-2...24 pcs. Nippon AlvlP's cable Cable clamp 206128-1...1pc Sockel 661 05'2. . .24pcs.