125

Aluminum alloy 1728 3 Port 3 Position Valve VEX3 Series Working Principle Fig. (1) A R Fig. (2) Closed center Fig. (3) P A 3(R) 3(R) 3(R) 2(A) 2(A) 2(A) 1(P) 1(P) 1(P) This is a 3-port switch valve in which the shaft 7 extending from the driving piston 3 opens/closes a pair of poppet valves 6.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

A B N E J B (F) T 2-U PB PA A B Pilot port threaded type With flow rate adjustment (Max.

Compact Cylinder with Air Cushion and Lock Series RLQ

Type A mounting bracket part number .YA-03 Joint .YU-03 T1 B 2 x D through 2 x O counterbore Material: Stainless steel (mm) Bore size (mm) B D E J M O Part No. YB-03 32, 40 12 7 25 9 34 11.5 depth 7.5 Joint YB-05 50, 63 12 9 32 11 42 14.5 depth 8.5 K ( across flats) Mass (g) Bore size (mm) T1 RS T2 V W Part No.

RLQ

Type A mounting bracket part number .YA-03 Joint .YU-03 T1 B 2-D through 2-O counterbore Material: Precision die-casting material equivalent to stainless steel 304 (mm) Bore size (mm) B D E J M O Part No. YB-03 32, 40 12 7 25 9 34 11.5 depth 7.5 Joint YB-05 50, 63 12 9 32 11 42 14.5 depth 8.5 K ( across flats) H (With locking) Weight (g) Bore size (mm) RS T1 T2 V W Part No.

AC Servo Motor Driver (Pulse input type/Positioning type ）

0 70 _ _ 4 0 17.6 _ _ 0 1 2250 _ _ 2 1 66 _ _ 4 1 16.5 _ _ 0 2 1125 _ _ 2 2 62 _ _ 4 2 15.6 _ _ 0 3 750 _ _ 2 3 59 _ _ 4 3 14.8 _ _ 0 4 562 _ _ 2 4 56 _ _ 4 4 14.1 _ _ 0 5 450 _ _ 2 5 53 _ _ 4 5 13.4 _ _ 0 6 375 _ _ 2 6 51 _ _ 4 6 12.8 _ _ 0 7 321 _ _ 2 7 48 _ _ 4 7 12.2 _ _ 0 8 281 _ _ 2 8 46 _ _ 4 8 11.7 _ _ 0 9 250 _ _ 2 9 45 _ _ 4 9 11.3 _ _ 0 A 225 _ _ 2 A 43 _ _ 4 A 10.8 _ _ 0 B 204

0.4

VQ 2 x Rc 3/4 1 2 3 4 5 6 7 8 n Stations D-side U-side VQ4 3(R) port 2 x Rc 1/2 4 x G 1/2 1(P) port VQ5 Conduit port SMC SMC SMC SMC SMC SMC SMC VQC 95.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 77.5 90 72 13 VQZ 55.5 42.7 43.5 20.5 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A SQ 33.5 12 11.5 15.7 2 x Rc 1/8 Pilot EXH port (6.5) 21.5 2 x Rc 1/8 VFS External pilot port 27 31 2n x Rc 1/4, 3/8, C8, C10, C12 Rc 1/

LEC-OM071xx

Install the program using the following procedure. 2-3 2 P a n e l D i s p l a y a n d SigmaWin+TM 1. Please download the install program from our home page. 2. "SETUP.EXE" of the file is double-clicked. A message will appear, welcoming you to the SigmaWin+ program. 3. Click Next to continue.s 2-4 2 P a n e l D i s p l a y a n d SigmaWin+TM 4.

7.5

0 o 2 4 (B) (A) 2 4 (B) (A) 3 5 1 (EB) (P) (EA) 3 5 1 (EB) (P) (EA) 4(A) 2(B) i 5(EA)/3(EB) 1(P) 3 position closed center 3 position closed center/exhaust center/pressure center 3 position exhaust center 2 4 (B) (A) 2 4 (A) (B) !1 q y w e r t o !

•

Millirrfeter size 1{1' Q I1'SiZeJ' , 0.6' r'~ '" 0Ur 0~ '2. , ~1/4' a!;'16" 03/4" 'ol/2~ AsP330F'!U R(PT)1/8 M5 X 0.8 J\SP. 4;JOF~02 R(PT)I /4 Rc(PD1 /8 IIS'P530F:03 R(PT)318 Rc(PT)lIS 'ASi"!)30l"'lJ4 " R(PT)1!2 Rc(PT)1I4 ASP;l3OF:,FO~ RIPT)114 G(PF)1I8 I\Sps:ioFf;03' R(PT)318 G(PF)118 ),I'SPsJOF;;04: R(PT)1 /2 G{PF)1/4 A~P33!1F" 'l Il1 NPT1 /8 10-32UNF ,~Sp430FNO,?

Free Mount Cylinder

Applicable bore size (mm) d H1 B1 C1 Width across flats L 2-P through 4-T counterbore S + Stroke Z + 2 x Stroke W + Stroke 6 10 16 20 25 32 NTP-006 NTP-010 NTJ-015A NT-015A NT-02 NT-03 M3 x 0.5 1.8 5.5 6.4 A' A' M4 x 0.7 2.4 7 8.1 M5 x 0.8 4 8 9.2 M6 x 1.0 5 10 11.5 M8 x 1.25 5 13 15.0 M10 x 1.25 6 17 19.6 Bore size (mm) A GB H A' B J C K D L MM E NN GA P Q QA 6 10 16 20 25 32 15 16.5 16.5

F

R E A C O D E Japan, Asia, Australia, UK N Canada, USA P O R T T H R E A D P A N E L M O U N T V E R S I O N R(PT) N NPT B O D Y S I Z E P O R T S I Z E 1 M3, M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard M3 M3x0.5 M5 M5x0.8 01 1/8 (10-32Nom) 02 1/4 03 3/8 04 1/2 T E C H N I C A L SPECIFICATIONS D I M E N S I O N S S E R I E S (N)AS4000 D I M E N S I O N S S E R I E S (N)AS1000-M3

MB

D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A A B A B A A A A B B B B B 32 12 7 4.5 0 0.5 3.5 4 0.5 9.5 4.5 2 1 1.5 0 CJ1 40 12 7 4.5 0 0.5 3.5 4 0.5 9.5 4.5 2 1 1.5 0 50 12.5 7.5 5 0 1 4 4.5 1 10 5 2.5 1.5 2 0 CJP 63 12.5 7.5 5 0 1 4 4.5 1 10 5 2.5 1.5 2 0 80 15.5 10.5 8 2.5 4 7 7.5 4 14 9 6.5 5.5 6 2.5 CJ2 100 15.5 10.5 8 2.5 4 7 7.5 4 14 9 6.5 5.5 6 2.5 125 17.5 12.5 10 6 6

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

x 16 Applicable flange A A B C A B A B A B A B Application Same tubing size 1 2 1 2 1 2 3 1 2 1 2 1 2 Refer to the applicable tubing table.

Compact Cylinder with Air Cushion and Lock Series RLQ

(Example) Cylinder size 40 Part number A type mounting bracket part number . YA-03 Joint . YU-03 T1 B 2-D through 2-O counterbore (mm) Bore size (mm) B D E J M O Part No. 12 7 25 9 34 11.5 depth 7.5 YB-03 32, 40 12 9 32 11 42 14.5 depth 8.5 YB-05 50, 63 Joint Weight (g) Bore size (mm) T1 RS T2 V W Part No.

Plug-in/Plug Lead: Single Unit

M5 ground screw 9 9 2n-Rc 1/2 4(A), 2(B) port VQ0 U side 34.5 VQ4 n X 12 X 12 VQ5 B 2 A 4 6 B B B B B B A A A A A A VQZ B 2 A 4 VQD 5 SMC SMC SMC SMC SMC B 2 A 4 4 L1 L2 B 2 A 4 3 B 2 A 4 2 P = 41 P = 41 B 2 A 4 1 Cable length (600 or 1500 mm) 58.5 34.5 48 68.5 Stations D side 42 16 15.5 61.8 133 22 51 69 117 2-Rc 1/8 (External pilot port) Dimensions Formula: L1 = 41n + 76, L2 = 41n + 96

PF2A/PF2W

2) NC/Analog output 54 44 34 Blue (3) DC () Use this sensor by connecting to SMC remote type display unit Series PF2A3. 4-4.5 2-Port size 30 40 50 Connector pin numbers 2 1 (43.5) A 4 3 (mm) A B Output specifications Pin description Pin no.

LVQ

Size 1 2 1 2 3 1 2 1 2 A B C A B A B A B 2 2 3 3 3 4 4 5 5 2 2 2 3 3 4 4 5 5 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 SMC SMC P U Panel mount union Union SMC SMC With reducer Basic size Note) Select the fittings of the same size as the one at the valve side

Manually Operated Integral Fitting Type/Threaded Type Series LVH

Manifold material PFA Tubing size 1 2 ... Stations Orifice diameter 1/4 3/8 1/2 Valve type Symbol Type 4 8 10 P P Manifold A A N.C. Stations are counted from station 1 on the left side, with the A (OUT) ports in front. A Non-locking Locking A A (OUT) port LLH2A-03-SH 1 set 1 set Manifold base part no. LVH20A-S07 2 sets 2 sets Valve part no.

Digital Flow Switches, Series PF2A, Series PF2W

Connector pin numbers 2 1 (43.5) 4 3 A B Pin no. 1 2 3 4 Output specification Pin description DC(+) NC/Analog output DC() OUT A Pulse output only 42 62 52 Pulse output + Analog output 72 Flow direction 18 Series PF2W Dimensions: Remote Type Sensor Unit for Water PF2W511-(N)B 148 80 32 70 58 46 45 2-Port size 2 45 4-5.5 36 (43.5) A A B Output specification 63 Pulse output only 77 73 87 Pulse

Silencer Series AN

Construction/Parts/Dimensions AN05/10/20 AN15/30/40 No hexagonal part in AN05 and AN10 B Dimensions (mm) B Port size R, NPT A B D Model Sound absorbing material (Resin sintered body) AN05-M5 AN10-01 AN15-02 AN20-02 AN30-03 AN40-04 6.5 M5 x 0.8 15 Body (Resin) A 1/8 23 11 A 16 14 1/4 32 Hexagonal flats D 16.5 14 1/4 45 20 17 3/8 58.5 Port size 24 21 1/2 68 2 Silencer Compact Resin Type/One-touch