Vacuum System Peripherals:

Port size Rc Model M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V VX2110 VX2112 N.C. N.O. VX2120 VX2122 N.C. N.O. VX2220 VX2 N.C. N.O. VX2320 VX2322 N.C. N.O. VX2130 VX2132 N.C. N.O. VX2230 VX2232 N.C. N.O. VX2330 VX2332 N.C. N.O. VX2240 VX2242 N.C. N.O. VX2340 VX2342 N.C. N.C.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Type Load voltage Wiring (Output) 3 (L) 1 (M) 0.5 (Nil) Auto switch model Band mounting DC AC Applicable load Lead wire length (m) Indicator light Electrical entry 5 (Z) M9B M9BW 5 V 12 V 24 V 2-wire Yes Grommet Solid state auto switch Relay, PLC A93 100 V Yes 12 V 24 V 2-wire Grommet Reed auto switch Note 1) Lead wire length symbols: 0.5 mNil M9BW 1 m M M9BWM 3 m L M9BWL 5 m Z M9BWZ

MB1

(different sides, same side) D-Z73, Z76, Z80 Reed switch 15 25 1pc. D-Y59A(B), Y69A(B), 2pcs. (different sides, same side) 15 25 Y7P(V) 1pc. D-Y7NW(V), Y7PW(V), 2pcs. (different sides, same side) Solid state switch 20 25 Y7BW(V) 1pc. 2pcs. (different sides, same side) 20 30 D-Y7BAL 1pc. Center trunnion is not included.

Thermo-chiller/Rack Mount Type

not be detected v Ammonium ion (NH4+) [mg/L] 0.1 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Item Unit Standard value Influence Free carbon (CO2) [mg/L] 4.0 or less v Corrosion Scale generation *1 In the case of [Mcm], it will be 0.003 to 0.01.

7

Possible to mount magnetic field resistant auto switch in 3 directions [CKG1 series/Built-in standard magnet type] D-P3DWASC, D-P3DWASE, D-P3DWA/L/Z (AC magnetic field) D-P4DWSC, D-P4DWSE, D-P4DWL/Z (AC magnetic field) Magnetic field resistant auto switch [CKP1 series/Built-in strong magnet type] D-P79WSE, D-P74L/Z (DC/AC magnetic field) Switch mounting rod Auto switch mounting bracket CK1

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

wire Solid state auto switch Reed auto switch IC circuit 5 V, 12 V 12 V IC circuit 5 V, 12 V Relay, PLC Diagnostic indication (2-color indicator) Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equivalent) Grommet 24 V A96V A96 IC circuit 5 V Yes A93V2 A93 A90 IC circuit 100 V Relay, PLC 2-wire 12 V A90V No

High Vacuum Angle Valve, XL Series

Example) D-F9NL Main switch circuit Main switch circuit Output Black [White] () Blue [Black] D-F9P (+) Brown [Red] Auto Switch Dimensions (mm) 1in=25.4mm Output Black [White] D-F9N, D-F9P, D-F9B () Blue [Black] D-F9B (+) Brown [Red] L dimension (mm) Part No.

Clamp Cylinder with Lock

Applicable cylinder series CLK2Pl40-50 CLKP40-R050 63 50 40 CLK2Pl40-75 CLKP40-R075 Dedicated to CLK2Pl40 series D-P4DWSC D-P4DWSE D-P4DWL/Z CLK2Pl40-100 CLKP40-R100 CLK2G series BK1T-040 CLK2Pl40-125 CLKP40-R125 CLK2Pl40-150 CLKP40-R150 BAP1T-040 D-P79WSE D-P74L/Z CLK2P series CLK2Gl50-50/CLK2Pl50-50 CLKG50-R050 CLK2Gl50 series CLK2Pl50 series CLK2Gl50-75/CLK2Pl50-75 CLKG50-R075 CLK2Gl50

Air Slide Table

,12 V 12 V Reed auto switch Solid state auto switch Relay, PLC Grommet 24 V IC circuit 5 V,12 V Diagnostic indication (2-color indication) 12 V A96V A96 5 V IC circuit Relay, PLC Grommet A93V A90V A93 A90 IC circuit 100 V 2-wire 24 V 12 V 100 V or less Solid state auto switches marked with are produced upon receipt of order.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Lead wire length (m) Auto switch model Electrical entry direction Load voltage Special function Indicator light Wiring (Output) Electrical entry Type Reed switch Solid state switch 0.5 (Nil) 3 (L) 5 (Z) Applicable load DC AC Perpendicular In-line IC circuit 5 V 12 V 100 V or less A90 A90V No Relay, PLC 24 V 2-wire A93 A93V Grommet 100 V 12 V Yes 3-wire (NPN equiv.) 3-wire (NPN) 3-wire

CV/MVGQ

Lead wire length (m) Load voltage Indicator light CV Wiring (Output) Pre-wire connector Special function Type Electrical entry AC DC Auto switch model Applicable load 0.5 (Nil) 3 (L) 5 (Z) None (N) MVGQ 3-wire (NPN equivalent) 5 V IC circuit C76 Reed switch Solid state switch Grommet CC 100 V 100 V, 200 V 12 V C73 B54 C73C B59W H7A1 H7A2 H7B H7C H7NW H7PW H7BW H7NF Yes Relay, PLC 24 V

180° Angular Style Air Gripper Series MHY2/MHW2

MHY D-Y59/Y69 D-Y7P(V)/Y7W(V) MHW2-40D Air gripper model MHW MHW2-50D MHW2-20D MHW2-25D MHW2-32D MHW2-40D MHW2-50D 4 4 2 2 2 (mm) -X Protrusion (mm) In-line electrical entry type Perpendicular electrial entry type Auto switch model Air gripper model MRHQ D-M9V/M9WV D-M9/M9W Max. hysteresis (Max. value) Auto switch model O S O S O S O S O S 7 7 4 3 1 5 5 2 1 MHW2-20D MA D-M9(V)

CJ5-S

12.5 9.5 47 75 R V Double clevis style (D): CJ5DS Piping port 2-M5 x 0.8 Clevis pin ( ) CDH9 + 0.030 0 Dd9 0.030 0.060 NB GA GB MM CA CB D NA A U BA S + Stroke BB H 0 0.3 CX + 0.2 + 0.1 R Z + Stroke ZZ + Stroke 0 0.3 CD (Cd) A BA BB CA CB CX D GA GB H MM NA NB R S U Z ZZ Bore size (mm) 10 15 15 12 17 14 3.3 3.2 4 8 18 28 M4 x 0.7 12.5 22.5 5 46 8 82 87 16 15 18.3 18.3 20 20 5 6.5 5 8 23

CJ5-S

D): CJ5DS Piping port 2-M5 x 0.8 Clevis pin ( ) CDH9 + 0.030 0 Dd9 0.030 0.060 NB GA GB MM CA CB D NA A U BA S + Stroke BB H 0 0.3 CX + 0.2 + 0.1 R Z + Stroke ZZ + Stroke 0 0.3 CD (Cd) A BA BB CA CB CX D GA GB H MM NA NB R S U Z ZZ Bore size (mm) 10 15 15 12 17 14 3.3 3.2 4 8 18 28 M4 x 0.7 12.5 22.5 5 46 8 82 87 16 15 18.3 18.3 20 20 5 6.5 5 8 23 28 M5 x 0.8 12.5 27.5 8 47 10 85 93 Clevis

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

For low differential pressure Rated pressure range 0 to 2 kPa C 0 D 2 kPa F 0.2 kPa Range 1 0.6 4 2.4 A C E F B D A C E F B D Pressure Differential pressure Pressure Differential pressure 848 Pressure Sensor Controller Series PSE300 Internal Circuit PSE30 NPN open collector output (2 outputs), Max. 30 V or 80 mA, residual voltage 1 V or less Analog output: 1 to 5 V Output impedance: Approx

Table of Contents

Reed Switch: Direct Mounting Style D-A90(V)/D-A93(V)/D-A96(V) . Solid State Switch: Direct Mounting Style D-M9N(V)/D-M9P(V)/D-M9B(V) . 2-color Indication, Solid State Switch: Direct Mounting Style D-F9NW(V)/D-F9PW(V)/D-F9BW(V) . Safety Instructions . Warning . Actuator Precautions . Caution on Design . Selection . Mounting . Piping. Lubrication . Air Supply. Operating Environment.

MXW Series Long Stroke Slide Table

286.5 266.5 236.5 224.5 ( ) values for D-F9BV F9NV F9PV 154 154 154 Long Stroke Slide Table MXW Series 2 color indication solid state switch: D-F9BW (V), D-F9NW (V), D-F9PW (V) Switch operation range Stroke (mm) Model 25 50 75 100 125 150 175 200 225 250 275 300 A 49.5 28.5 24.5 24.5 24.5 24.5 B 82.5 103.5 128.5 153.5 178.5 203.5 4 MXW 8 W 35.5 14.5 10.5 10.5 10.5 10.5 V 96.5 117.5 142.5

Low Profile Guide Type

Tightening Torque of Auto Switch Mounting Screws (N.m) Auto switch model Tightening torque D-A9(V) D-M9(V) D-M9W(V) D-M9A(V) 0.10 to 0.20 0.05 to 0.15 Mounting pattern q Mounting pattern e Mounting pattern w Auto switch Watchmakers screwdriver Auto switch mounting screw 5 to 6 (included with the auto switch) 1556 CY1F Series Specific Product Precautions 1 Be sure to read this before handling

Fieldbus System

S Positive common Z V NS Negative common NZ V t Back pressure check valve (Built-in valve type) V Nil None H Built-in * Select a valve from R, U, S or Z when the SI Unit polarity is positive common.

Modular Type Regulators Series AR

1/4 GaugePort D 53 70 Q 46 54 L 41 50 J 239(max.242) 276(max.280) K 59 75 U 40 54 V 53 70 A NPT 3/8 NPT 1/2 W 2.3 2.3 X M38 X 1.5 M42 X 1.5 DD 34.5 41 CC 38.5 42.5 E 30 38 F 83(max.86) 88(max.92) T 8 10.5 Y 31 35.5 Z 7 7 AA 19 21 H 3.5 1.5 S 6.5 8.5 AW30 AW40 6 Series AW20~40 Filter Regulator Standard (Manual Drain) PANEL FITTING IN OUT Z CC Bowl Detail EE (AW20) AA K L V U X W T J S Y Q