KJ

(inch) Applicable fitting size d (inch) Model L2 A M Min. port size Note) Weight (g) D L1 P Q 2-Applicable tubing 17 18 21 3 16 3 16 KQ2U07-99 KQ2U05-99 20.5 21.5 56 56.5 64.5 46 10.6 12 13.7 11.4 13.2 39.5 39.5 16.5 17 18.5 4.6 11.4 13.2 15.2 3.5 1 4 1 4 5 16 5 16 KQ2U09-99 24.5 15.2 6 Note) D: Max. diameter K M Applicable fitting H D Branch Y: KQ2U MS Applicable tubing O.D.

MXS Series Air Slide Table

KA G 9 12 13 15 20 27 H 28 30 20 28 23 28 NN 2 2 3 3 4 5 I 13 8.5 9.5 10.5 24.5 38.5 J 19.5 29 39 56 60 96 K 23.5 33.5 43.5 53.5 63.5 88.5 Z 48.5 53.5 64.5 82.5 100.5 150.5 M 49 54 65 83 101 151 ZZ 56 61 72 90 108 158 MXS8-10 MXS8-20 MXS8-30 MXS8-40 MXS8-50 MXS8-75 82.5 132.5 56 Air Slide Table MXS Series Dimensions MXS 8 With shock absorber (6) MXS8BS, BT, B 8 A 22 23.5 23.5 14.5 14.5

CQS

Example 7-4-5 6 Series CQS Weight/Without Auto Switch (g) For standard stroke Calculation: (Example) CQSD20-20DCM Cylinder weight: CQSB20-20D101 g Option weight: Rod end male thread 10 g : Rubber bumper 2 g : Double clevis style 92 g Cylinder stroke (mm) Bore size (mm) 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 12 29 36 42 49 56 63 93 100 113 147 180 107 16 38 47 56 64

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5

MG

C 0.2 C 0.2 B 0.2 B 0.2 A 0.2 A 0.2 D Bore size (mm) A (mm) B (mm) C (mm) Bore size (mm) A (mm) B (mm) C (mm) D (mm) (mm) Hexagon socket head cap screw Hexagon socket head cap screw MGPM MGPL 12 50 50 18 41 10 8 M4 x 0.7 140 50 116 32 M12 x 1.75 16 80 56 22 46 12 10 M5 x 0.8 214 66 170 47 M16 x 2 Connection thread size Proper tightening torque (Nm) a dimension 20 72 24 54 14 12 M5 x 0.8 25

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LEJ LL LEL LEM FV M M FV LEY Included parts Flange Body mounting bolt FZ FX 4 x FD FT FT FZ FX 4 x FD LES LEPY LEPS Rod/Head Flange [mm] Size FD FT FV FX FZ LL M LER 25 5.5 8 48 56 65 6.5 34 32 5.5 8 54 62 72 10.5 40 63 9 9 80 92 108 28.4 60 LEH LEY -X5 Material: Carbon steel (Nickel plating) * The LL measurement is when the unit is in the Z-phase first detecting position.

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5

CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

CQS

66) Front flange (including bolt) 137 171 56 66 Rear flange (including bolt) 92 127 34 40 Double clevis (including pin, retainer, bolt) ( ): Long stroke model Note 1) Do not add value shown in the table above to long stroke models.

CY1

50 40 30 20 50 40 30 20 Model CY1H10 CY1H15 CY1H20 M2 2.5 16 16 M3 1.5 10 13 Model CY1H25 CY1HT25 CY1HT32 M2 26 85 96 M3 28 56 64 M1 1.5 10 13 M1 28 56 64 28 16 26 CY1H20 CY1H15 13 10 10 Moment Nm Moment Nm 2 3 4 5 22.5 3 4 5 CY1H10 M3 CY1H10 1.5 1 1 0.5 0.5 70 100 300 500 1000 70 100 300 500 1000 M1 M2 Piston speed mm/s Piston speed mm/s Static moment Moment generated

Compact Cylinder with Lock Series CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

Stability of suction position,

changing the internal structure and materials Pad diameter: 63, 80 Compared with the ZP series ( ) * The pad material when weight was measured is NBR. 8 16.4 ZP (Current model) ZP3E ZP2/Flat type ZP3E/Flat type with groove Pad diameter Suction port Area [mm2] Suction port Area [mm2] 32 8.4 55.4 40 6 28.3 50 63 8 50.2 16.4 211 80 100 10 78.52 125 Pad diameter Weight [g] Weight [g] 32 56

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

69 99 44 M16 x 1.5 ZPT125HB-B12 M12 x 1.75 125 129 89 135 56 69 44 -B16 M16 x 1.5 1206 Vacuum Pad: Large Size Bellows Type Vertical Vacuum Entry With Buffer Series ZPT RoHS Specifications Buffer Specifications ZA ZX 40 to 80 Vacuum entry direction 100, 125 Vertical Buffer dia.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

56 173 273 113 40 4-Rc 1/8 thread depth 6.5 (Piping port) (Opposite side: Same) 183 50 293 123 208 343 75 148 (Z) (30) (30) 8 233 393 173 100 4-M5 x 0.8 thread depth 8 2-M8 x 1.25 thread depth 12 258 443 125 198 283 493 223 150 308 543 175 248 333 593 200 273 0.2 Only the CXSW32-10 has a groove cut out for installing auto switches.

MGQ

54 56 61 74.5 84 9 10 11 13.5 15.5 19 25 25 29 35.5 45.5 55.5 15 21 27 33 37 40 2 2 2 2 2.5 2.5 1 1 1 1 1.5 1.5 5 10 10 10 15 15 11 11 12.5 15 18 21 M8 x 1.25 M8 x 1.25 M8 x 1.25 25, 50 75, 100 125, 150 175, 200 124 106 48 122 90 110 M8 x 1.25 M8 x 1.25 M8 x 1.25 140 120 56 138 100 124 M10 x 1.5 M10 x 1.5 M10 x 1.5 150 130 69 148 110 132 M10 x 1.5 M10 x 1.5 M10 x 1.5 188 160 88 185 140 166

CLQ

A A1 E1 L1 NZ 16 16 20 22 28 38 44 34 41 42 56 71 79 25 30 30 40 50 55 20 25 32, 40 50, 63 80 100 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 34 41 42 56 71 79 25 30 30 40 50 55 IY-G02 16 20 IY-G03 20 22 IY-G04 36 28 IY-G05 44 38 IY-G08 56 44 IY-G10 Knuckle pin and snap ring are included. 64 Knuckle Pin (Common with double clevis pin

15

(Recommended height 5 mm) Dimensions [mm] Stroke L A B n D E F 50 201.5 56 160 4 20 100 251.5 106 210 4 35 150 301.5 156 260 4 35 200 351.5 206 310 6 2 240 35 250 401.5 256 360 6 2 240 35 300 451.5 306 410 8 3 360 35 350 501.5 356 460 8 3 360 35 400 551.5 406 510 8 3 360 35 450 601.5 456 560 10 4 480 35 500 651.5 506 610 10 4 480 35 550 701.5 556 660 12 5 600 35 600 751.5 606 710 12

Slider Type Ball Screw Drive/11-LEFS Series

)] (56) [54] Stroke 65 10 (2.4) [Origin] Note 4) Origin Note 3) 38 58 2 [4] 4 [2] 34 LES Motor cable (2 x 5) 57.5 6.5 LEPY LEPS 24 Vacuum port Rc1/8 13.9 48 38.5 LER 6 M4 x 0.7 thread depth 8 (F.G. terminal) LEH Motor option: With lock Step motor Servo motor (160.5) Cable length 250 LEY -X5 15 15 65 20 20 20 11LEFS 11LEFS 24 11LEJS 20 Lock cable (3.5) 24 ( ) 3H9 depth 3 +0.025 0 n x 4.5

I/O Configurator (NFC version)

Setting Function 56 4.1. Edit TAG 56 4.2. Software Control 56 4.3. Forced output 58 4.3.1. Forced output conditions 58 4.3.2. Forced output procedure 59 4.3.3. Forced output release procedure 62 4.4. Export Settings 63 4.5. Import Settings 65 4.6. Reading of the initial value 66 4.7. Initialize 67 -1No.EX-OMV0017-B 5. Pairing of wireless unit 69 5.1.

I/O Configurator (NFC version)

Setting Function 56 4.1. Edit TAG 56 4.2. Software Control 56 4.3. Forced output 58 4.3.1. Forced output conditions 58 4.3.2. Forced output procedure 59 4.3.3. Forced output release procedure 62 4.4. Export Settings 63 4.5. Import Settings 65 4.6. Reading of the initial value 66 4.7. Initialize 67 -1No.EX-OMV0017 5. Pairing of wireless unit 69 5.1.