Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Type Load voltage Wiring (Output) 3 (L) 1 (M) 0.5 (Nil) Auto switch model Band mounting DC AC Applicable load Lead wire length (m) Indicator light Electrical entry 5 (Z) M9B M9BW 5 V 12 V 24 V 2-wire Yes Grommet Solid state auto switch Relay, PLC A93 100 V Yes 12 V 24 V 2-wire Grommet Reed auto switch Note 1) Lead wire length symbols: 0.5 mNil M9BW 1 m M M9BWM 3 m L M9BWL 5 m Z M9BWZ

Profile Design ISO/VDMA Air Cylinder Series CP95

Air consumption Q [Nl/min.] 15 20 30 40 50 15 20 30 40 50 1 1 32 2 0.4 0.5 0.5 20 25 0.4 0.3 160 2 10 10 125 12 0.3 16 1.5 2 3 4 5 1.5 2 3 4 5 9 0.2 0.2 100 8 80 63 50 10 7.5 0.1 10 6 1 1 6 5 40 0.05 4 5 0.6 0.5 0.4 0.3 0.2 0.15 0.1 0.04 32 4 1500 2000 3000 4000 5000 0.03 3 25 20 0.02 2 2.5 16 1.5 1 1000 0.01 1 0.05 0.04 0.03 10 1 150 200 300 400 500 0.5 0.4 0.3 0.005 0.02 0.015 0.01 6 0.2

VFS

Refer to page 3-8-52 for details.

Table of Contents

-3 IDF55C-3 IDF75D-3 IDF120D-3 IDF150D-3 IDF240D-3 IDF55C-3 AM850-20 AMD850-20 75 AMF1000-40 AMF900-30 AMF850-20 AMD850-20 AMD910-30 AMD910-40 AMD1010-40 IDF120D-3 110 150 220 IDF120D-3 IDF150D-3 IDF240D-3 AMF1000-40 For Rotary Screw Compressors (Without Aftercooler) Air compressor Refrigerated air dryer with built-in air cooled aftercooler (4)(6) Local line Flow capacity (m 3/min)

SYJ3000/5000/7000

For connector cable of M8 connector, refer to page 1-5-78. 1-5-52 53 5 Port Solenoid Valve Rubber Seal Series SYJ7000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) q t r w y e q t r w (B) 2 (A) 4 (A) 4 (B) 2 SV i SZ i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) SY SYJ u 3 position closed center/exhaust center/pressure center SX

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

3 !

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

, 3 position and 4 position dual 3 port valves.

7ND9071en

[6 mm or 1/4" (x)] 1.2* 2.1* 2C 1.08 66 3/8 10 mm or 3/8" 2.4 3.0 3C 2.18 133 3/8 10 mm or 3/8" 4.8 5.2 4C 4.34 265 3/8 10 mm or 3/8" 3.2 3.7 5C 8.7 531 3/8 10 mm or 3/8" 7.5 11.0 6C 17.5 1068 3/4 10 mm or 3/8" 12.0 20.0 Air supply piping 10 mm or 3/8" for all actuators.

HRX-OM-W058

Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation and wiring of power supply cable . 3-10 3.3.4 Wiring of remote operation

HRX-OM-X027

Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation and wiring of power supply cable . 3-10 3.3.4 Wiring of remote operation

HRX-OM-M090

2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation

5 Port Air Operated Valve

hole) 101.5 50.5 102 4.4 4.4 1P 3EB 3EB 1P 5EA 5EA 4.4 1/4, 3/8 [1(P), 5 (EA), 3 (EB) port] 1/4, 3/8 [1 (P), 5 (EA), 3 (EB) port] 52 52 3 position closed center/exhaust center/pressure center VFA5 20(-P) 02 03 3 4 5 138 59.5 (78.5) 66 47 (28.2) (Distance between ports) 4A 24 32 3 2B 1/8 (Pilot port: Upward) 28 2 x 4.3 (For mounting) 1/4, 3/8 [4 (A), 2 (B) port] 44 1/8 [Pilot port: Lateral

Solid State Auto Switches

pin 4 pin 1 pin 2 pin 3 pin 4 pin OUT () DC 2-wire type Brown OUT (+) Blue OUT () OUT ( ) DC 2-wire, Non-polar type Blue Brown Diagnostic output OUT DC 3-wire type Brown Black DC (+) Blue DC () OUT DC 4-wire type Brown Black DC (+) Blue Orange DC () Connector Specifications M8-3 pin Connector model M8-3 pin M8-4 pin M12-4 pin 1 2 1 4 1 2 Pin arrangement 3 4 4 3 3 JIS C 4524, JIS C 4525

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Note 3) Weight without sub-plate 1.12-35 VQZ1000/2000/3000 Base Mounted Construction: VQZ1000/2000/3000 Metal seal Rubber seal 4 3 2 1 4 3 2 1 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 2 position double 2 position double (B) 2 (A) 4 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 (1) 3 position closed

Sine Rodless Cylinder Series REA/REB

M L1 We = 5 x 10 3 WgU = 5 x 10 3 1 9.8 300 = 15 [N] Me3 = 1/3We (L2A) = 1/3 15 0.182 = 0.91 [Nm] 3 = Me3/Me3max = 0.91/10 = 0.091 3. Dynamic moment Me3 Guide central axis L2 We W Examine Me3.

15

3 mm or more.

Integrated Controller

Specifications Wiring Examples Operation Data Setting Options Specific Product Precautions EQFS25H (102) 64 3 H9 (+0.025 0 ) depth 3 45 Body mounting reference plane (B dimension range)1 4 x M5 x 0.8 thread depth 8.5 22.5 38 3.5 50 3 H9 (+0.025 0 ) depth 3 54[(56)]4 52 L + Stroke (16) A + Stroke (Table traveling distance)2 (52) (158.4) 10 (56)[54]4 Stroke Parallel I/O connector (M12) 58

Series VQ Metal Seal/Rubber Seal Body Ported

Note) Note) Example) Lead wire length 1000mm Example) Lead wire length 1000mm ..3 pcs. 3 pcs. 3 pcs 3 pcs VQ11405LOC6 AXT66114A10 VQ1140N5LOC6 AXT66114AN10 Connector ass'y No. (DC) Connector ass'y No. Double No. Socket only (3 pcs.) 300mm 600mm 1000mm 2000mm 3000mm Lead wire length Single/3 position No.