CP95

2 pcs. 1 pc. 3 pcs. n pcs.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

21 Series MGZR Construction y !

Table of Contents

L dimension L kit: 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. VV5Q13 L 08 N N 1 D L dimension 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Table of Contents

0.042 0.17 0.33 1.1 1.9 2.9 0.037 0.15 0.29 1.0 1.7 2.6 0.033 0.14 0.26 0.92 1.6 2.4 0.059 0.26 0.81 1.8 3.0 4.3 0.052 0.24 0.74 1.6 2.7 4.0 0.047 0.22 0.69 1.5 2.6 3.8 0.85 1.4 2.2 0.78 1.3 2.1 0.73 1.2 2.0 0.68 1.2 1.8 0.17 0.59 1.1 3.9 5.7 8.5 0.15 0.54 1.0 3.6 5.3 7.9 0.14 0.56 1.1 3.8 5.7 8.6 With auto switch: CDUK-D With auto switch: CDUK-S With auto switch: CDUK-T (N) (N) (N) Model

Compressed Air Preparation Filter

) V C Q IN OUT B Maintenance space A G 23 Compressed Air Preparation Filter AMK Series Dimensions Applicable model Semi-standard Metal bowl AFF/AM/AMD AMK Modular Connection Example B B AMK20-D AMK30-D AMK40-D Model Standard specifications Optional specifications Bracket mount P A B C D E G J M N Q R S T U V AMK20-D 1/8, 1/4 40 133.9 17.5 21 25 21 30 27 22 5.4 8.4 60 2.3 28 AMK30-D 1/4,

Magnetically Coupled Rodless Cylinder

Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 40 30 20 20 30 40 50 3. Select the bore size and type of magnet holding force (types H, L) from Lo and Fn based on data K A .

Vacuum Unit

How to Order w q e r ZK2 A A N0 N N 12 08 t y q Body/Exhaust type r Connector w Nominal nozzle size For pressure switch for vacuum: 2 m (Lead wire with connector) Pressure sensor assembly: 3 m (With lead wire) Symbol Nominal nozzle size 07 0.7 10 1.0 12 1.2 15 1.5 Symbol Body Exhaust type Symbol Note Silencer exhaust Silencer exhaust1 A Y V Cannot be selected when e is N Refer to page 18

PFxx-OMJ0005CN

01/(N)02/F01 17 2 -59No.PF-OMJ0005CN-I PFM7-(N)01L/(N)02L/F01L 2 17 -60No.PF-OMJ0005CN-I PFM7S-(N)01/(N)02/F01 17 2 -61No.PF-OMJ0005CN-I PFM7S-(N)01L/(N)02L/F01L 2 17 -62No.PF-OMJ0005CN-I PFM7-F02 21 2 -63No.PF-OMJ0005CN-I PFM7-F02L 2 21 -64No.PF-OMJ0005CN-I PFM7S-F02 21 2 -65No.PF-OMJ0005CN-I PFM7S-F02L 2 21 -66No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7 2 -67No.PF-OMJ0005CN-I PFM7-C4L/C6L/C8L/N7L

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

16 44 8 (2.4) SMC Connector DB-25SF-N Manufactured by Japan Aviation Electronics Industry, Ltd.

HRX-OM-M090

Plug (Prepared by customer) L N E [Accessory] Power supply connector N E Earth leakage breaker (Secondary side) L N Cable Crimped terminal (Prepared by customer) E (Earth) L Cable size : 14AWG Wire tightening torque : 0.5Nm Fig. 3-5 Power supply cable 3.3 Installation HRS Series 3-10 HRX-OM-M090 Chapter 3 Transport and Setting Up Wiring 1.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 40 30 20 20 30 40 50 3. Select the bore size and type of magnet holding force (types H, L) from Lo and Fn based on data K A .

5 Port Air Operated Valve

(Station 1) 1/8 [Pilot port: Lateral (-P)] VZA VTA 76 53.5 29.5 VGA VPA Dimensions n: Stations 2 3 n L 10 9 8 7 6 5 4 357 VPA3 L1 L2 93 126 159 192 225 258 291 324 80 113 146 179 212 245 278 311 344 Type 21: VV5FA5-21-1-: Common exhaust L2 L1 17.5 20 15 3 P R R 66 2B 2B 2B 2B 2B 47 47 141 110 125 68 28 (62.5) 4A 4A 4A 4A 4A 1/2 [1 (P), 3/5 (R) port] 1/4, 3/8 [4 (A), 2 (B) port] 4 x 9 (For

HRX-OM-W038

Configuration of connection One host computer : One thermo-chiller, or one host computer : N thermo-chillers. (Max. 31 thermo-chillers can be connected.)

HRX-OM-X071

For pipe thread type N, an NPT thread conversion fitting set is included. 21: Weight in the dry state without circulating fluids The weight will increase by 1 kg when Option DM (With electric conductivity control function + Applicable to DI water piping) is selected.

SMC Pneumatic Clean Series

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

HRX-OM-W032

NPT1) Tank port size Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Supply side pressure range MPa 0.2 to 0.5 Automatic water fill function (Standard) Supply side water temp. range oC 5 to 35 Automatic water fill port size Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Over flow port size Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact part material Metal Stainless steel, Copper (Brazing filler metal

IDG

Note 2) They are not applicable in case the thread type is N or F.

MY1

(Refer to page 21 for details.)

MU

Single clevis MUC25SMU25, #5 (#1+#5+#11) MUC32SMU32, #5 (#1+#5+#11) MUC40SMU40, #5 (#1+#5+#11) MUC50SMU50, #5 (#1+#5+#11) MUC63SMU63, #5 (#1+#5+#11) 2.4-5 Plate Cylinder/Double Acting Double Rod Series MUW 20, 32, 40, 50, 63 How to Order Standard MUW B 25 30 D M MDUW B 25 30 D M A73 S With auto switch Built-in magnet Number of auto switches 2 1 n Double rod S n Mounting B L F Basic Foot

CLK1

A B 3 5.5 7 7 15 60 65 + 45 (n-2) D-H7, D-H7W D-H7F 30.5 28.5 30 30 n-2 2 15 + 50 ( ) (n = 2, 4, 6...) Approx. Hs 30.5 35 40.5 47.5 D-H7C 15 65 10 65 + 50 (n-2) A B Approx. Hs 3 5.5 7 7 n-2 2 D-H7C 31.5 28.5 30 30 15 + 50 ( ) (n = 2, 4, 6...)