Electric Actuator/Slider Type

Note 11) Only when motor option With lock is selected. Note 12) For an actuator with lock, add the power consumption for the lock.

Made to Order

(A: 25 mm, B: 50 mm) CA2 series 40 50 63 80 100 9 8 36 8 M12 x 1.25 171 Width across flats ka 11 13 42 8 M16 x 1.5 190 MM 11 17 44 8 M20 x 1.5 200 15 19 54 10 M24 x 1.5 241 15 19 55.5 10 M24 x 1.5 253.5 CA2K, CBA2 (With lock on rod side only) (mm) Bore size (mm) b c d ka MM ZZ ZZ + Stroke + Adjustment d + Adjustment b c 40 50 63 80 100 9 11 44 8 M16 x 1.5 179 11 11 42 8 M16 x 1.5 190 CS1

High Vacuum Angle Valve

55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

Air Cylinder

x 1.25 15 29 1/8 11 81 11 M6 x 0.75 10+0.08 0 5 1 6.5 15 123 32 5.5 10 M10 x 1.25 15 35.5 1/8 11 81 11 M8 x 1.0 12+0.08 0 5.5 1 7.5 24 123 40 6 14 M14 x 1.5 19 44 1/8 11 92 12 M10 x 1.25 14+0.08 0 6 1.25 8.5 24 144 50 7 18 M18 x 1.5 19 55 1/4 11 107 13 M12 x 1.25 16+0.08 0 7.5 2 10 24 167 63 7 18 M18 x 1.5 19 69 1/4 11 107 13 M14 x 1.5 18+0.08 0 11.5 3 14.5 24 167 80 10 22 M22 x 1.5 23 80

15

Motor flange Body side hub [Built-in parts] Spider [Built-in parts] Size: 25 Hub Mounting Dimensions [mm] Size: 32 Hub Mounting Dimensions [mm] Size: 40 Hub Mounting Dimensions [mm] Motor type MM TT PD FP NZ M2.5 x 10 1.00 8 11 NY M2.5 x 10 1.00 8 11 NX M2.5 x 10 1.00 8 5.5 NM1 M3 x 4 0.63 5 11 NM2 M2.5 x 10 1.00 6 11 Motor type MM TT PD FP NZ M3 x 12 1.5 14 17.5 NY M4 x 12 2.5 11 17.5 NX

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Temperature specifications Symbol Nil M9N (L) M9P (L) M9B (L) A90 (L) A93 (L) M9// Symbol Nil H0 Temperature range 5 to 60C 5 to 150C Without auto switch (without built-in magnet) Remarks Auto switch D-M9N (L) D-M9P (L) D-M9B (L) D-A90 (L) D-A93 (L) Solid state switch 6. No. of auto switches/Detecting position Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

134 11 77 99 116 53.5 73.5 53.5 43.5 M12 x 1.75 18 80 100 22 11 154 11 94 117 136 53.5 85 63 43.5 M12 x 1.75 22 100 For details about the rod end nut and accessory brackets, refer to page 7-6-20.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Pair no. of wire Insulation color Dot mark Dot color LEC Y LEC Y 1 1 Orange Red 2 Black 3 2 Light gray 11 6 Orange Red 12 Black 13 7 Light gray 21 11 Orange Red 22 Black 23 12 Light gray Motorless A side Red 4 Black 5 3 White Red 6 Black 7 4 Yellow Red 8 Black 9 5 Pink Red 10 Black Red 14 Black 15 8 White Red 16 Black 17 9 Yellow Red 18 Black 19 10 Pink Red 20 Black Red 24 Black 25 13 White

Bore Size: 16mm

Clean Series: 22 (Copper, Flourine & Silicon-Free+Low Particle Generation, Vacuum Suction Type), Bore Size: 16mm

The MHZ2 series is a standard type parallel air gripper, taking the place of the MHQ*2 series. A linear guide provides high rigidity and high accuracy. MHZ2 can operate under higher pressure even at a larger holding point and overhang. High degree of mounting precision is achieved and mounting repeatability is improved.

Bore Size: Ø16, Finger Position: Standard Type

Bore Size: Ø16, Finger Position: D (Standard Type)

Bore Size: 16mm, Finger Position: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 16mm, Action: Double Acting, Finger Position: Standard, Body Option: Basic, Auto Switch: M9BWV--Solid State, 2-color Indication, 2 Wire, Vertical, Lead Wire or Prewired Connector: -, Number: -, Made-to-Order: -

Bore Size: 16mm, Action: Double Acting, Finger Position: Standard, Body Option: Basic, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 0.5M, Lead Wire or Prewired Connector: 1.0m Cord Length, M8-3 Pin Connector, Number: -, Made-to-Order: -

Bore Size: 16mm, Action: Double Acting, Finger Position: Standard, Body Option: Basic, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 1.0m Cord Length, M8-3 Pin Connector, Number: -, Made-to-Order: -

Bore Size: 16mm, Action: Double Acting, Finger Position: Standard, Body Option: Basic, Auto Switch: M9BV--Solid State, Gen. Purpose, 2 Wire, Vertical, 0.5M, Lead Wire or Prewired Connector: 1.0m Cord Length, M8-4 Pin Connector, Number: -, Made-to-Order: -

Bore Size: 16mm, Action: Double Acting, Finger Position: Standard, Body Option: Basic, Auto Switch: M9BV--Solid State, Gen. Purpose, 2 Wire, Vertical, 0.5M, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -, Made-to-Order: -

Bore Size: 16mm, Action: Double Acting, Finger Position: Standard, Body Option: Basic, Auto Switch: M9NWV--Solid State, 2-color Indication, 3 Wire NPN, Vertical, Lead Wire or Prewired Connector: -, Number: -, Made-to-Order: -