MY1

h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S 40.8 40.8 46.7 67.3 67.3 73.2 73.2 E 14.6 20 24 29 35 40 52 EY 39.5 45.5 53.5 67 83 106 129 EC 5.8 5.8 6.5 8.5 10 14 14 EB 30 32 38 50 57 66 77 Model MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 F 4 4 6 6 6 6 6 T 6 6 7 12 12 15 15 EA 7 10 12 14 17 20 26 W 58 58

AIR COMBINATION

40 9 18 5 48 3/4 AC50B-B 1/8 186.2 220.1 43 93.1 30 43.3 3.2 70 50 11 20 6 60 3/41 AC55B-B 1/8 191.2 234.1 43 98.1 30 43.3 3.2 70 50 11 20 6 60 1 1 AC60B-B 1/8 196.2 234.1 46 98.1 30 43.3 3.2 70 50 11 20 6 60 Optional specifications Semi-standard specifications With barb With Metal bowl Metal bowl Square type Digital Round type Round type Metal bowl With Metal Model drain with with

Thermo-chiller

30 HRLE090-m-20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) M5 R5.5-5 4 cores x 5.5 mm2 30 (4 cores x AWG10) Including grounding cable HRLE090-m-40 3-phase 380 to 415 VAC (50/60 Hz) 3-phase 460 to 480 VAC (60 Hz) M8 R5.5-8 20 An example of the cable specifications is when two kinds of vinyl insulated wires with a continuous allowable operating temperature of 70C at 600 V, are

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

82.4 87 Stroke + 169 Upper: Incremental encoder Lower: Absolute encoder 40 10 Dog fitting for switch 30 5 Work piece mounting reference plane 17.5 15 30 33 2 Pitch = 100 (n1 1) x pitch 60 21.5 47.5 Body mounting reference plane Section AA The body mounting reference plane and work piece mounting reference n1 Stroke Model plane should be used as standards when mounting onto equipment.

Electric Actuator

40 50 0 10 20 30 40 60 70 80 50 Work load [kg] Work load [kg] 1,000 1,000 800 800 Overhang: L2 [mm] Overhang: L3 [mm] Overhang: L4 [mm] Overhang: L5 [mm] 600 600 Mey m 400 400 L2 200 200 0 0 0 10 20 30 40 60 70 80 50 0 10 20 30 40 50 Precautions LECS; Work load [kg] Work load [kg] 1,000 1,000 800 800 600 600 L3 m Mer 400 400 200 200 0 0 0 10 20 30 40 60 70 80 50 0 10 20 30 40 50 Work load

Table of Contents

22 13 16 16 19 23 27 13 15 20 26 32 40 10 11 14 16 20 24 22 24 32 40 50 62 17 18 25 30 38 48 3 4 6 8 10 12 5 6 8 10 7 7 7 9 10 11 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 15 16.5 M3 x 0.5 depth 5 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 3.2 3.2 4.5 5.5 5.5 6.6 4 9 9 13.5 2 4.5 4.5 4.5 16.5 Note) 19 21.5 23 Without auto switch

Compressed Air Preparation Filter

27 22 5.4 8.4 60 2.3 28 159.6 AFF30-D/AM30-D/AMD30-D 1/4, 3/8 53 178.1 21.5 26.5 30 35 26.5 41 35 25 6.5 13 71 2.3 32 219.8 AFF40-D/AM40-D/AMD40-D 1/4, 3/8, 1/2 70 223.5 25.5 35.5 38.4 40 35.5 50 52 30 8.5 12.5 88 2.3 39 263.3 AFF50-D/AM50-D/AMD50-D 3/4, 1 90 237.7 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.2 AFF60-D/AM60-D/AMD60-D 1 90 314.8 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

) 32 (42) 1 23 (30) 1/8 14 port 3/8, 1/2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 1/8 14 port 3/8, 1/2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 3/8, 1/2, 3/4 1 port 3/8, 1/2, 3/4 1 port Dimension inside is for rubber seal.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 11-/22-MXP12 11-/22-MXP12 3 5 11-/22-MXP16 11-/22-MXP16 832 Air Slide Table MXP/MXPJ6 11221122Dimensions: MXPJ6 5 C 11-/22-MXPJ6-5 depth 2.5 2.5 7 H 5 3 3.5 4 x M3 x 0.5 depth 3 10.05 +0.030 0 D B 16.5 3.5 18 14 13 20 6 +0.030 0 depth 2.5 2.5 6 E 5 2 x M4 x 0.7 Piping port F QL 6 13.5 Prepared

PF-OMM0004_C

ms 2 4 7 /6 11 ) 5 / 12 DC1224 V10 50 mA -68No.PF-OMM0004-D PF3W711 PF3W721 0.4 V ()30 ms 2 4 7 /6 11 ) 5 / 12 DC1224 V10 50 mA IP65 050 () 3585R.H.() AC1000V 1 50M (DC500V ) CE UL(CSA)RoHS PPSFKMCPVC 25A 30 A 285 g 340 g 370 g 425 g 171 3mPas(3 cP)70 20.5 s 3F.S. 374 4OFF (2 5 ) 5 100 (24 5 100 500 9.5 ) 590 690 -69No.PF-OMM0004-D PVC ammonium hydroxide

15

R1 UU W Y1 Model Nil TN TF NN adjustable range adjustable range (Both sides: R1 x 2) (Both sides: Y1 x 2) CY1S6-Z M6 x 0.75 RJ0604N M4 x 0.7 M30.5 25 25 49 52 7.5 15 42 10 46 11.5 23 62 16 1 CY1S10-Z M8 x 1 RJ0806HN M4 x 0.7 M50.8 25 38 61 60 5.5 11 47 12.5 58 14 28 72 1 24 CY1S15-Z M8 x 1 RJ0806LN M4 x 0.7 M50.8 30 50 76 75 5.5 11 62 12.5 73 14 28 87 30 1 CY1S20-Z M10 x 1 RJ1007LN

Rotary Actuator/Vane Style Series CRB2

Size: 10 to 30 Size: 40 40 40 18 to 30 6.5 to 30 18 to 30 4.5 to 30 Symbol: A57 Shorten both long and short shafts.

JXCx-OMX0009

External Connections . 30 5.1 PWR: Power supply connector . 30 5.2 MOT: Motor connector, ENC: Encoder connector . 30 5.3 SI: Serial I/O Connector . 30 (1) Connecting the teaching box . 30 (2) Connection with a PC . 31 5.4 CC-Link communication connector . 31 6.

PF-OMN0009_C

11/4 14 11/2 / OUT1 OUT2 1 1~5 V 2 4~20 mA 1T 1~5 V 1~5 V (PF3W3)1~5V (-1-1T) 4~20mA(47) -11No.PF-OMN0009CN-F PVC PF3W5 U 48 () 3 A : 11 21 10~100 L/min 30~250 L/min U PVC 2 11 21 R (PVC) 11 21 40 11 21 25 25A 30 30A 250L/min G : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] L/min L/min(gal/min) JIS K6742 1 2 1~5 V 4~20 mA (PF3W3) 1~5(1) 1 N M8(3m) -12No.PF-OMN0009CN-F

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

For detailed selection procedures, refer to pages 8-11-12 to 8-11-13. 8-12-7 8 Series MY1W Maximum Allowable Moment/Maximum Load Weight Maximum Allowable Moment: MY1MW MY1MW/M2 MY1MW/M3 MY1MW/M1 200 40 50 20 100 30 10 20 50 40 5 4 30 10 3 MY1MW63 MY1MW63 MY1MW63 MY1MW63 MY1MW63 MY1MW63 20 MY1MW63 MY1MW63 MY1MW63 2 MY1MW50 MY1MW50 MY1MW50 Moment (Nm) Moment (Nm) Moment (Nm) MY1MW50 MY1MW50

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

-L) 50 L/min 40 30 25 20 15 10 5 00 5 10 15 20 25 30 kPa Pressure loss [kPa] Pressure loss [kPa] 750 kPa 50 kPa 30 0 kPa 0 kPa 20 30 kPa 50 kPa 70 kPa 750 kPa 350 kPa 10 70 kPa 350 kPa 00 10 20 30 40 50 Flow [L/min] Flow [L/min] PF2M711(-L) 100 L/min PF2M721(-L) 200 L/min 40 90 80 70 60 50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa

MLGP

Low Profile Guide Cylinder with Lock Series MLGP Horizontal Mounting Ball Bushing 29 l2 = 50mm, V = 200m/s 30 l2 = 100mm, V = 200m/s MLGPL20, 25 MLGPL20, 25 10 10 25 25 25 20 25 20 20 Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 25 20 25 20 1 10 30 31 100 101 200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight

MLGP

Low Profile Guide Cylinder with Lock Series MLGP Horizontal Mounting Ball Bushing 29 l2 = 50mm, V = 200m/s 30 l2 = 100mm, V = 200m/s MLGPL20, 25 MLGPL20, 25 10 10 25 25 25 20 25 20 20 Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 25 20 25 20 1 10 30 31 100 101 200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight