Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Aluminum Body Material Brass A A 2 x J 4 x J A A 2 x J 4 x J B C F B B C F B 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 C F C D E D E F D E D E Body Material: Aluminum [mm] Body Material: Brass [mm] Size Port size A B C D E F J 20 1/8, 1/4 11 36 6 34 46 1.5 5.3 30 1/4, 3/8 13 46 7 40 56 1.5 Size Port size A B C D E F J 20 1/8 52 24 9 36 64 1.5 6 20, 30 1/4, 3/8

3

AB B MK MK Basic (mm) MK2T A B C D E F Yh9 G 45 52 64 77 H 16 16 20 20 I 9 9 11 14 J 7 7 8 10.5 K M6 x 1.0 M6 x 1.0 M8 x 1.25 M10 x 1.5 L 10 10 14 18 S 31.5 29 34 34.5 T 10.5 9 11.5 10.5 W 14 15 19 19 X 3 3 3.5 3.5 Z 6.5 6.5 7.5 7.5 AA 4.5 5 7 7 AB 1 1 1 1.4 AC 5.5 5.5 6.6 9 AE 1/8 1/8 1/4 1/4 Model 30 30 37 48 MKB32-Z MKB40-Z MKB50-Z MKB63-Z 0 0.062 0 0.062 0 0.062 0 0.062 49.5 57 71 84

LVQ

S) SMC C A B D SMC B A SMC (Max. T) U Z M N LVQ40, LVQ60 C B A D (Max.

MK

6 6.5 10.5 13.5 16.5 19.5 B 12.5 15.5 18.5 21.5 A 29 29.5 33 24 28.5 29 B 6.5 7 11 14 17 20 A 26 26.5 30 21 25.5 26 B 3.5 4 8 11 14 17 A 19.5 24 24.5 B 9.5 12.5 15.5 A 31.5 22.5 27 27.5 B 9.5 12.5 15.5 18.5 A 35.5 26.5 31 31.5 B 13.5 16.5 19.5 22.5 MK220 MK225 MK232 MK240 MK250 MK263 Auto Switch Mounting Bracket Part No.

Electric Actuators

B-1 A-1 B-2 A-2 B-3 A-3 Signal Cable color S Brown Red Orange Y ellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

HRX-OM-W032

B Contact output signal 3 selected alarm Sets the alarm selected for the contact output signal 3.

Air cylinder

D-F59F D-A59W D-F5NT D-P3DWA Bore size A B A B A B A B 32 10.5 7 8 4.5 15.5 12 9.5 6 40 10.5 10.5 8 8 15.5 15.5 9.5 9.5 50 12 11 9.5 8.5 17 16 11 10 63 13 12 10.5 9.5 18 17 12 11 80 18 14.5 15.5 12 23 19.5 17 13.5 100 18 15.5 15.5 13 23 20.5 17 14.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting. 18 Table 6 (mm) Support bracket other than Center

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

High Vacuum Angle Valve

Heater: Indicator: 12 XLF/XLFV Series Dimensions XLF: Air operated (b) C E E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11

Round Type Hydraulic Cylinder

11.5 18.5 23 B 12.5 14.5 13.5 19 B 9 11 10 15.5 B 7 9 8 13.5 A 14 12 19 23.5 B 13 15 14 19.5 A 14.5 12.5 19.5 24 B 13.5 15.5 14.5 20 B 7.5 9.5 8.5 14 B 10.5 12.5 11.5 17 B 7 9 8 13.5 20 25 32 40 Note) When setting an auto switch, be sure to check its operation before adjusting.

Vacuum Pad

13 A B Vertical Width across flat 10 Width across flat 10 7 7 Lateral 1.8 1.8 1.2 Dimensions (per stroke) Dimensions (per stroke) 10 14 13 With Adapter: Vacuum Inlet Weight (g) Non-rotating (J) Rotating (K) Weight (g) Non-rotating (J) Rotating (K) 11 Model A B A B Model ZP3-T13UM;15-B5 ZP3-T13UM;20-B5 ZP3-T10UM;15-B5 ZP3-T10UM;20-B5 37.5 45 56 63.5 13.1 16.2 15.1 16.2 37.5 45 56 63.5 13.2

Vacuum Pad

13 A B Vertical Width across flat 10 Width across flat 10 7 7 Lateral 1.8 1.8 1.2 Dimensions (per stroke) Dimensions (per stroke) 10 14 13 With Adapter: Vacuum Inlet Weight (g) Non-rotating (J) Rotating (K) Weight (g) Non-rotating (J) Rotating (K) 11 Model A B A B Model ZP3-T13UM;15-B5 ZP3-T13UM;20-B5 ZP3-T10UM;15-B5 ZP3-T10UM;20-B5 37.5 45 56 63.5 13.1 16.2 15.1 16.2 37.5 45 56 63.5 13.2

Vacuum Pad

13 A B Vertical Width across flat 10 Width across flat 10 7 7 Lateral 1.8 1.8 1.2 Dimensions (per stroke) Dimensions (per stroke) 10 14 13 With Adapter: Vacuum Inlet Weight (g) Non-rotating (J) Rotating (K) Weight (g) Non-rotating (J) Rotating (K) 11 Model A B A B Model ZP3-T13UM;15-B5 ZP3-T13UM;20-B5 ZP3-T10UM;15-B5 ZP3-T10UM;20-B5 37.5 45 56 63.5 13.1 16.2 15.1 16.2 37.5 45 56 63.5 13.2

Cylinder with Lock Series CNS

D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL D-A5 D-A6 D-A3 D-A44 D-G39 D-K39 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-F59F Auto switch model D-A9 D-A9V D-A59W D-F5NTL Bore size (mm) A B B B B A B B A B A A A A 125 140 160 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 The above shown are the proper auto switch mounting positions for detection

SYJ300/500/700

(For details, refer to page 4-4-11.) 4-4-6 7 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ300 Construction (A) 2 (A) 2 N.C.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

50 55 60 35 40 45 50 55 60 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 93 48 14.5 6 22 50 7 39 6 36 21 M5 x 0.8

15

M3E Y m x g From the results above, Find the value M3Emax when Va = 350 mm/s from Graph (11) b. n = 0.72 1, so the cylinder can be used. n = 1 + 2 + 3A + 3B = 0.07 + 0.19 + 0.37 + 0.09 = 0.72 Judgement [Graph 5] Allowable load mass by stroke 25 [Graph 9] Allowable load mass on guides m 400 100 B 10 Load mass m [kg] Load mass m [kg] C CY3B CY3R 100 CY1S25-Z 1 y, Z = 100 CY1S CY1S 0.1 CY1L

CC

S F 35 ML2B CCVS02-G-S 45 80 86 35 25 1 36 17.5 88.2 72 45 1/2 148.5 103.9 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 57 1/2 148.5 121.8 101 M5 x 0.8 5.4 to 7.5 C J G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CV CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57

Mechanically Jointed Rodless Cylinder Series MY2

Proper Auto Switch Mounting Position (Detection at stroke end) C D A B D-A9, D-A9V D-M9, D-M9V, D-M9W, D-M9WV B B Series model A Series model A Operating range Operating range MY2C16 MY2C16 44 116 48 112 MY2H16 MY2H16 46 114 50 110 MY2HT16 MY2HT16 11 8.5 70 90 74 86 MY2C/H/HT25 MY2C/H/HT25 54 156 58 152 MY2C/H/HT40 MY2C/H/HT40 85 245 89 241 Series model C Series model C D D Operating range